Sami Franssila
Professor, materials science at Aalto University School of Business
Biography
Aalto University School of Business
Research:
Micro- and nanofabrication, microfluidics, MEMS, thin films, surfaces and coatings
Teaching:
- Academic thinking for freshmen (in Finnish; periodit I-II) CHEM-A1600
- Microfabrication (periods III-IV) CHEM-E5155
- Microfluidics and BioMEMS (periods III-V) CHEM-E8135
- Advanced microtechnology (doctoral course, next fall 2017)
- Thin film technology (doctoral course, next fall 2016)
Recent publications:
Books and book chapters
S. Franssila: Introduction to Microfabrication, 2nd edition, John Wiley & Sons, 2010
Sami Franssila & Lauri Sainiemi: “RIE”, an entry in Encyclopedia of Micro- and nanofluidics, Dongqing Li, editor, Springer, 2nd edition 2014
Sami Franssila & Santeri Tuomikoski: “MEMS lithography”, a chapter in Handbook of silicon based MEMS materials and technologies”, Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka (eds.) Elsevier, 2nd edition 2015
Franz Lärmer, Sami Franssila, Lauri Sainiemi & Kai Kolari: “DRIE”, a chapter in Handbook of silicon based MEMS materials and technologies, Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka (eds.), Elsevier, 2nd edition 2015
Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos (eds): Handbook of silicon based MEMS materials and technologies, 2nd edition, Elsevier 2015
Sami Franssila, Cristina Davis, Michael K. LeVasseur, Zhu Cao, Levent Yobas: Microfluidics and BioMEMS in silicon, a chapter in Veikko Lindroos, Teruaki Motooka, Sami Franssila, Mervi Paulasto-Krockel, Markku Tilli, Veli-Matti Airaksinen, (eds): Handbook of silicon based MEMS materials and technologies, 2nd edition, Elsevier 2015
Review articles
Cecilia A Brunello, Ville Jokinen, Prasanna Sakha, Terazono Hideyuki, Fumimasa Nomura, Tomoyuki Kaneko, Sari E Lauri, Sami Franssila, Claudio Rivera, Kenji Yasuda and Henri J Huttunen: Microtechnologies to fuel neurobiological research with nanometer precision, Journal of Nanobiotechnology, 2013, Vol 11, DOI: 10.1186/1477-3155-11-11
Ciprian Iliescu, Hayden Taylor, Matioara Avram, Jianmin Miao, Sami Franssila: A practical guide for the fabrication of micro- and nano-fluidic devices using glass and silicon, Biomicrofluidics 6, 016505 (2012)
Tuukka Verho, Chris Bower, Piers Andrew, Sami Franssila, Olli Ikkala and Robin H. A. Ras: Mechanically Durable Superhydrophobic Surfaces, Advanced Materials (2011) 23, pp. 673-678. http://dx.doi.org/10.1002/adma.201003129
Sikanen, T., Franssila, S., Kauppila, T., Kostiainen, R., Kotiaho, T., Ketola, R.: Microchip technology in mass spectrometry, Mass Spectrometry Reviews, 2010, pp.351-391, 10.1002/mas.20238
Original articles in peer reviewed journals 2013-2015
S. Hoshian, V.Jokinen, K. Hjort, R.H.A. Ras, S. Franssila: Amplified and Localized Photo-Switching of Atomic Layer Deposited TiO2 by Micro -and Nanostructuring, ACS Applied Materials and Interfaces, 2015, 7, 15593−15599
Nina Nordman, Susanna Laurén, Tapio Kotiaho, Sami Franssila, Risto Kostiainen, Tiina Sikanen: Interfacing Microchip Isoelectric Focusing with On-chip Electrospray Ionization Mass Spectrometry, accepted in Journal of Chromatography A, 2015
Sung Il Kim, Bibhuti Bhusan Sahu, Byung Mook Weon, Jeon Geon Han, Jari Koskinen, and Sami Franssila: Making porous conductive carbon films with unbalanced magnetron sputtering, Japanese Journal of Applied Physics, 2014
Hoshian, Sasha, Jokinen, Ville, Somerkivi, Villeseveri, Lokanathan, Arcot, Franssila, Sami: Robust Superhydrophobic Silicon Without a Low Surface-Energy Hydrophobic Coating, ACS Applied Materials & Interfaces, 2015, Pages: 941-949
Aneliya Karadzhinova, Timo Hilden, Maria Berdova, Rauno Lauhakangas, Jouni Heino, Eija Tuominen, Sami Franssila, Edward Häggström, Ivan Kassamakov: Calibrating an optical scanner for quality assurance of large area radiation detectors, Measurement Science and Technology, 2014
Gianmario Scotti, Ville Matilainen, Petri Kanninen, Heidi Piili, Antti Salminen, Tanja Kallio, Sami Franssila: Laser Additive Manufacturing of Micro Fuel Cells, in J.Power Sources, 2014
Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila: Simple Stacking Method for Silicon Micro Fuel Cells, Micromachines, 2014
Maria Berdova, Oili M. E. Ylivaara, Ville Rontu, Pekka T. Törmä, Riikka L. Puurunen, Sami Franssila: Fracture properties of atomic layer deposited aluminum oxide free-standing membranes, J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Berdova, Maria; Perros, Alexander; Kim, Wonjae; Riikonen, Juha; Ylitalo, Tuomo; Heino, Jouni; Li, Changfeng; Kassamakov, Ivan; Haeggstroem, Edward; Lipsanen, Harri; Franssila, Sami: Exceptionally Strong and Robust Millimeter-Scale Graphene-Alumina Composite Membranes, Nanotechnology 25 (2014) 355701 (7pp)
J. Lyytinen, M. Berdova, P. Hirvonen, X.W. Liu , S. Franssila, Q. Zhou and J. Koskinen: Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres, RSC Advances, 2014
Akanksha Singh, Gianmario Scotti, Tiina Sikanen, Ville P. Jokinen, Sami Franssila: Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips, Micromachines 2014, 5(3), 472-485; doi:10.3390/mi5030472
Ville-Veikko Telkki, Vladimir V. Zhivonitko, Anne Selent, Gianmario Scotti, Jarmo Leppäniemi, Sami Franssila, Igor V. Koptyug: Lab-on-a-Chip Reactor Imaging with Unprecedented Chemical Resolution by Hadamard-Encoded Remote Detection NMR, Angewandte Chemie, Vol 126 (2014) pp. 11471–11475
Nordman, Nina; Barrios-Lopez, Brianda; Laurén, Susanna; Suvanto, Pia; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto; Sikanen, Tiina: Shape-Anchored Porous Polymer Monoliths for Integrated Online Solid-Phase Extraction-Microchip Electrophoresis-Electrospray Ionization Mass Spectrometry, Electrophoresis, 2014
Juan Li, Xuelin Tian, Alexander Pyymaki Perros, Sami Franssila, Ville Jokinen: Self-Propelling and Positioning of Droplets Using Continuous Topography Gradient Surface, Advanced Materials Interfaces (admi.201400001R1), 2014
Maryam Borghei, Gianmario Scotti, Petri Kanninen, T. Weckman, Iyya V. Anoshkin, Albert G. Nasibulin, Sami Franssila, Esko I. Kauppinen, Virginia Ruiz: Enhanced performance of silicon microfabricated DMFC by PtRu anode catalysis supported on carbon nanotubes, Energy 65 (2014) pp. 612-620
Maria Berdova, Tuomo Ylitalo, Ivan Kassamakov, Jouni Heino, Pekka T. Törmä, Lauri Kilpi, Helena Ronkainen, Jari Koskinen, Edward Hæggström, Sami Franssila: Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques, Acta Materialia 66 (2014) 370–377
Jussi Lyytinen, Maria Berdova, Sami Franssila, Jari Koskinen: Adhesion Testing of ALD TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres, J.Vac.Sci.Technol. A 32, 01A102 (2014); doi: 10.1116/1.4827197
Kalle Hanhijärvi, Ivan Kassamakov, Juha Aaltonen, Ville Heikkinen, Lauri Sainiemi, Sami Franssila and Edward Hæggström: Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry, IEEE-ASME Transactions on Mechatronics 18 (2013) pp. 1418-1420, DOI: 10.1109/TMECH.2012.2235080
Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila: Bulk aluminum micromachining for high performance micro fuel cells, J.MEMS 2014 Vol. 23, No. 2, p. 372
M. Wirtssohn, M. Haapala, L. Sainiemi, S. Franssila: Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry, J. Micromech. Microeng. 23 (2013) 074006 (6pp)
Ville Jokinen, Pia Suvanto, Anshul Rao Garapaty, Jussi Lyytinen, Jari Koskinen and Sami Franssila: Durable Superhydrophobicity in Embossed CYTOP Fluoropolymer Micro and Nanostructures; Colloids and Surfaces A: Physicochem. Eng. Aspects 434 (2013) 207– 212
Maria Berdova, Jussi Lyytinen, Kestutis Grigoras, Anu Baby, Lauri Kilpi, Helena Ronkainen, Sami Franssila, Jari Koskinen: characterization of thin film adhesion by a MEMS shaft-loading blister testing, J. Vac. Sci. Technol. A 31, 031102 (2013); doi: 10.1116/1.4801921
Gianmario Scotti, Daniel Trusheim, Petri Kanninen, Denys Naumenko, Malte Shulz-Ruhtenberg, Valentinas Snitka, Tanja Kallio and Sami Franssila: Picosecond Laser-Ablation for Silicon Micro Fuel Cell, Fabrication, J. Micromech. Microeng. 23 (2013) 055021 (14pp)
Vladimir V. Zhivonitko, Ville-Veikko Telkki, Jarmo Leppäniemi, Gianmario Scotti, Sami Franssila &Igor V. Koptyug: Remote detection NMR imaging of gas phase hydrogenation in microfluidic chips, Lab Chip, 2013, pp. 1554 - 1561
Ivan Kassamakov, Kestutis Grigoras, Ville Heikkinen, Kalle Hanhijärvi, Juha Aaltonen, Sami Franssila and Edward Hæggström: Non-destructive inspection of buried channels and cavities in silicon, J.MEMS 2013, p. 438
Ville Jokinen, Prasanna Sakha, Pia Suvanto, Claudio Rivera, Sami Franssila, Sari E. Lauri and Henri J. Huttunen: A Microfluidic Chip for Axonal Isolation and Electrophysiological Measurements, Journal of Neuroscience Methods, 212 (2013) pp. 276– 282
Peer-reviewed scientific articles
Journal article-refereed, Original researchFriction and Wetting Transitions of Magnetic Droplets on Micropillared Superhydrophobic Surfaces
Al-Azawi, Anas; Latikka, Mika; Jokinen, Ville; Franssila, Sami; Ras, Robin H.A.2017 in SMALL (Wiley-VCH Verlag)ISSN: 1613-6810Thiol-ene micropillar array electrospray ionization platform for zeptomole level bioanalysis
Lipponen, Katriina; Tähkä, Sari; Sikanen, T.; Jokinen, V.; Tatikonda, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2017 in ANALYST (Royal Society of Chemistry)ISSN: 0003-2654Electrochemical Characterization of the Microfabricated Electrochemical Sensor-Array System
Pitman, Kätlin; Raud, Merlin; Scotti, Gianmario; Jokinen, Ville; Franssila, Sami; Nerut, Jaak; Lust, Enn; Kikas, Timo2017 in ELECTROANALYSIS (Wiley-VCH Verlag)ISSN: 1040-0397Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications
Berdova, Maria; Wiemer, Claudia; Lamperti, Alessio; Tallarida, Grazia; Cianci, Elena; Lamagna, Luca; Losa, Stefano; Rossini, Silvia; Somaschini, Roberto; Gioveni, Salvatore; Fanciulli, Marco; Franssila, Sami2016 in APPLIED SURFACE SCIENCE (Elsevier Science B.V.)ISSN: 0169-4332Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition
Berdova, Maria; Liu, Xuwen; Wiemer, Claudia; Lamperti, Alessio; Tallarida, Grazia; Cianci, Elena; Fanciulli, Marco; Franssila, Sami2016 in JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (AVS Science and Technology Society)ISSN: 0734-2101Inkjet printed silver electrodes on macroporous paper for a paper-based isoelectric focusing device
Henriques Gaspar, Cristina; Sikanen, Tiina; Franssila, Sami; Jokinen, Ville2016 in BIOMICROFLUIDICS (American Institute of Physics)ISSN: 1932-1058Robust hybrid elastomer/metal-oxide superhydrophobic surfaces
Hoshian, Sasha; Jokinen, Ville; Franssila, Sami2016 in SOFT MATTER (ROYAL SOC CHEMISTRY)ISSN: 1744-683XNon-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching
Hoshian, Sasha; Henriques Gaspar, Cristina; Vasara, Teemu; Jahangiri, Farzin; Jokinen, Ville; Franssila, Sami2016 in MICROMACHINES (Multidisciplinary Digital Publishing Institute (MDPI))ISSN: 2072-666XUV-ozone patterning of micro-nano fibrillated cellulose (MNFC) with alkylsilane self-assembled monolayers
Kämäräinen, Tero; Arcot, Lokanathan R.; Johansson, Leena-Sisko; Campbell, Joseph; Tammelin, Tekla; Franssila, Sami; Laine, Janne; Rojas, Orlando J.2016 in CELLULOSE (SPRINGER)ISSN: 0969-0239Cellulose Nanofibril Film as a Piezoelectric Sensor Material
Rajala, Satu; Siponkoski, Tuomo; Sarlin, Essi; Mettänen, Marja; Vuoriluoto, Maija; Pammo, Arno; Juuti, Jari; Rojas, Orlando J.; Franssila, Sami; Tuukkanen, Sampo2016 in ACS APPLIED MATERIALS AND INTERFACES (AMER CHEMICAL SOC)ISSN: 1944-8244Axonal Kainate Receptors Modulate the Strength of Efferent Connectivity by Regulating Presynaptic Differentiation
Sakha, Prasanna; Vesikansa, Aino; Orav, Ester; Heikkinen, Joonas; Kukko-Lukjanov, Tiina-Kaisa; Shintyapina, Alexandra; Franssila, Sami; Jokinen, Ville; Huttunen, Henri J.; Lauri, Sari E.2016 in FRONTIERS IN CELLULAR NEUROSCIENCE (FRONTIERS MEDIA SA)ISSN: 1662-5102Fracture properties of atomic layer deposited aluminum oxide free-standing membranes
Berdova, Maria; Ylivaara, Oili M. E.; Rontu, Ville; Törmä, Pekka T.; Puurunen, Riikka; Franssila, Sami2015 in JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (AVS Science and Technology Society)ISSN: 0734-2101Amplified and Localized Photoswitching of TiO2 by Micro- and Nanostructuring
Hoshian, Sasha; Jokinen, Ville; Hjort, Klas; Ras, Robin H. A.; Franssila, Sami2015 in ACS APPLIED MATERIALS AND INTERFACES (AMER CHEMICAL SOC)ISSN: 1944-8244Robust Superhydrophobic Silicon Without a Low Surface-Energy Hydrophobic Coating
Hoshian, Sasha; Jokinen, Ville; Somerkivi, Villeseveri; Arcot Raghupathi, Lokanathan; Franssila, Sami2015 in ACS APPLIED MATERIALS AND INTERFACES (AMER CHEMICAL SOC)ISSN: 1944-8244Making porous conductive carbon films with unbalanced magnetron sputtering
Kim, Sung II; Sahu, Bibhuti Bhusan; Weon, Byung Mook; Han, Jeon Geon; Koskinen, Jari; Franssila, Sami2015 in JAPANESE JOURNAL OF APPLIED PHYSICS (Japan Society of Applied Physics)ISSN: 0021-4922Interfacing microchip isoelectric focusing with on-chip electrospray ionization mass spectrometry
Nordman, Nina; Lauren, Susanna; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto; Sikanen, Tiina2015 in JOURNAL OF CHROMATOGRAPHY A (Elsevier Science B.V.)ISSN: 0021-9673Shape-Anchored Porous Polymer Monoliths for Integrated Online Solid-Phase Extraction-Microchip Electrophoresis-Electrospray Ionization Mass Spectrometry
Nordman, Nina; Barrios-Lopez, Brianda; Laurén, Susanna; Suvanto, Pia; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto; Sikanen, Tiina2015 in ELECTROPHORESIS (Wiley-VCH Verlag)ISSN: 0173-0835Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques
Berdova, Maria; Ylitalo, Tuomo; Kassamakov, Ivan; Heino, Jouni; Törmä, Pekka; Kilpi, Lauri; Ronkainen, Helena; Koskinen, Jari; Hæggström, Edward; Franssila, Sami2014 in ACTA MATERIALIA (PERGAMON-ELSEVIER SCIENCE LTD)ISSN: 1359-6454Exceptionally strong and robust millimeter-scale graphenealumina composite membranes
Berdova, Maria; Perros, Alexander; Kim, Wonjae; Riikonen, Juha; Ylitalo, Tuomo; Heino, Jouni; Li, Changfeng; Kassamakov, Ivan; Hæggström, Edward; Lipsanen, Harri; Franssila, Sami2014 in NANOTECHNOLOGY (IOP PUBLISHING LTD)ISSN: 0957-4484Corrigendum Exceptionally strong and robust millimeterscale graphene-alumina composite (Nanotechnology (2014) 25, (355701))
Berdova, Maria; Pyymaki Perros, Alexander; Kim, Won; Riikonen, Juha; Ylitalo, Tuomo; Heino, Jouni; Li, Changfeng; Kassamakov, Ivan; Hæggström, Edward; Lipsanen, Harri; Franssila, Sami2014 in NANOTECHNOLOGY (IOP PUBLISHING LTD)ISSN: 0957-4484Enhanced performance of a silicon microfabricated direct methanol fuel cell with PtRu catalysts supported on few-walled carbon nanotubes
Borghei, Maryam; Scotti, Gianmario; Kanninen, Petri; Weckman, Timo; Anoshkin, Ilya V.; Nasibulin, Albert G.; Franssila, Sami; Kauppinen, Esko I.; Kallio, Tanja; Ruiz, Virginia2014 in ENERGY (PERGAMON-ELSEVIER SCIENCE LTD)ISSN: 0360-5442MME 2013 Editorial Preface
Franssila, Sami; Kolari, Kai2014 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)ISSN: 0960-1317Calibrating an optical scanner for quality assurance of large area radiation detectors
Karadzhinova, Aneliya; Hilden, Timo; Berdova, Maria; Lauhakangas, Rauno; Heino, Jouni; Tuominen, Eija; Franssila, Sami; Häggström, Edward; Kassamakov, Ivan2014 in MEASUREMENT SCIENCE AND TECHNOLOGY (IOP PUBLISHING LTD)ISSN: 0957-0233Self-Propelling and Positioning of Droplets Using Continuous Topography Gradient Surface
Li, Juan; Tian, X.L.; Perros, A. P.; Franssila, Sami; Jokinen, Ville2014 in ADVANCED MATERIALS INTERFACES (WILEY-BLACKWELL)Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres
Lyytinen, Jussi; Berdova, Maria; Franssila, Sami; Koskinen, Jari2014 in JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (AVS Science and Technology Society)ISSN: 0734-2101Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres
Lyytinen, Jussi; Berdova, Maria; Hirvonen, Petri; Liu, Xuwen; Franssila, Sami; Zhou, Quan; Koskinen, Jari2014 in RSC ADVANCES (ROYAL SOC CHEMISTRY)Simple Stacking Methods for Silicon Micro Fuel Cells
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2014 in MICROMACHINES (Multidisciplinary Digital Publishing Institute (MDPI))Bulk-Aluminum Microfabrication for Micro Fuel Cells
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2014 in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (Institute of Electrical and Electronics Engineers Inc.)ISSN: 1057-7157A micro heat exchanger microfabricated from bulk aluminium
Scotti, G.; Franssila, S.2014 in Journal of Physics: Conference Series (IOP Publishing Ltd.)ISSN: 1742-6588Laser Additive Manufacturing of Stainless Steel Micro Fuel Cells
Scotti, Gianmario; Matilainen, Ville; Kanninen, Petri; Piili, Heidi; Salminen, Antti; Kallio, Tanja; Franssila, Sami2014 in JOURNAL OF POWER SOURCES (Elsevier Science B.V.)ISSN: 0378-7753Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips
Singh, Akanksha; Scotti, Gianmario; Sikanen, Tiina; Jokinen, Ville; Franssila, Sami2014 in MICROMACHINES (Multidisciplinary Digital Publishing Institute (MDPI))Lab-on-a-Chip Reactor Imaging with Unprecedented Chemical Resolution by Hadamard-Encoded Remote Detection NMR
Telkki, Ville-Veikko; Zhivonitko, Vladimir V.; Selent, Anne; Scotti, Gianmario; Leppäniemi, Jarmo; Franssila, Sami; Koptyug, Igor V.2014 in ANGEWANDTE CHEMIE (Wiley-VCH Verlag GmbH & Co. KGaA)ISSN: 1433-7851Characterization of thin film adhesion by MEMS shaft-loading blister testing
Berdova, Maria; Lyytinen, Jussi; Grigoras, Kestuti; Baby, Anu; Kilpi, Lauri; Ronkainen, Helena; Franssila, Sami; Koskinen, Jari2013 in JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (AVS Science and Technology Society)ISSN: 0734-2101Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry
Hanhijarvi, Kalle; Kassamakov, Ivan; Aaltonen, Juha; Heikkinen, Ville; Sainiemi, Lauri; Franssila, Sami; Haeggstrom, Edward2013 in IEEE-ASME TRANSACTIONS ON MECHATRONICS (Institute of Electrical and Electronics Engineers Inc.)ISSN: 1083-4435Durable superhydrophobicity in embossed CYTOP fluoropolymer micro and nanostructures
Jokinen, Ville; Suvanto, Pia; Garapaty, Anshul Rao; Lyytinen, Jussi; Koskinen, Jari; Franssila, Sami2013 in COLLOIDS AND SURFACES A: PHYSICOCHEMICAL AND ENGINEERING ASPECTS (Elsevier Science B.V.)ISSN: 0927-7757A Microfluidic Chip for Axonal Isolation and Electrophysiological Measurements
Jokinen, Ville; Sakha, Prasanna; Suvanto, Pia; Rivera, Claudio; Franssila, Sami; Lauri, Sari E.; Huttunen, Henri J.2013 in JOURNAL OF NEUROSCIENCE METHODS (Elsevier)ISSN: 0165-0270Cell adhesion and osteogenic differentiation on three-dimensional pillar surfaces
Kaivosoja, Emilia; Suvanto, Pia; Barreto, Goncalo; Aura, Susanna; Soininen, Antti; Franssila, Sami; Konttinen, Yrjo T.2013 in JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART A (WILEY-LISS)ISSN: 1549-3296Non-destructive inspection of buried channels and cavities in silicon
Kassamakov, Ivan; Grigoras, Kestutis; Heikkinen, Ville; Hanhijärvi, Kalle; Aaltonen, Juha; Franssila, Sami; Hæggström, Edward2013 in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (Institute of Electrical and Electronics Engineers Inc.)ISSN: 1057-7157Picosecond laser ablation for silicon micro fuel cell fabrication
Scotti, Gianmario; Trusheim, Daniel; Kanninen, Petri; Naumenko, Denys; Shulz-Ruhtenberg, Malte; Snitka, Valentinas; Kallio, Tanja; Franssila, Sami2013 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)ISSN: 0960-1317Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry
Wirtssohn, M.; Haapala, M.; Sainiemi, Lauri; Franssila, Sami2013 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)ISSN: 0960-1317Remote detection NMR imaging of gas phase hydrogenation in microfluidic chips
Zhivonitko, Vladimir V.; Telkki, Ville-Veikko; Leppaniemi, Jarmo; Scotti, Gianmario; Franssila, Sami; Koptyug, Igor V.2013 in LAB ON A CHIP (Royal Society of Chemistry)ISSN: 1473-0197Stroboscopic supercontinuum white-light interferometer for MEMS characterization
Hanhijärvi, K.; Kassamakov, I.; Heikkinen, V.; Aaltonen, J.; Sainiemi, L.; Grigoras, K.; Franssila, S.; Hæggström, E.2012 in OPTICS LETTERS (OPTICAL SOC AMER)ISSN: 0146-9592A practical guide for the fabrication of microfluidic devices using glass and silicon
Iliescu, Ciprian; Taylor, Hayden; Avram, Marioara; Miao, Jianmin; Franssila, Sami2012 in BIOMICROFLUIDICS (American Institute of Physics)Oxygen and nitrogen plasma hydrophilization and hydrophobic recovery of polymers
Jokinen, Ville; Suvanto, Pia; Franssila, Sami2012 in BIOMICROFLUIDICS (American Institute of Physics)Rotating multitip micropillar array electrospray ionization-mass spectrometry for rapid analysis and high-throughput screening
Nissila, Teemu; Backman, Nina; Kolmonen, Marjo; Leinonen, Antti; Kiriazis, Alexandros; Yli-Kauhaluoma, Jari; Sainiemi, Lauri; Kostiainen, Risto; Franssila, Sami; Ketola, Raimo A.2012 in INTERNATIONAL JOURNAL OF MASS SPECTROMETRY (Elsevier)ISSN: 1387-3806A microfabricated micropillar liquid chromatographic chip monolithically integrated with electrospray ionization tip
Sainiemi, Lauri; Nissilä, Teemu; Ketola, Raimo A.; Franssila, Sami2012 in LAB ON A CHIP (Royal Society of Chemistry)ISSN: 1473-0197Integration of carbon felt gas diffusion layers in silicon micro fuel cells
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2012 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)ISSN: 0960-1317Microchip capillary electrophoresis-electrospray ionization-mass spectrometry of intact proteins using uncoated Ormocomp microchips
Sikanen, Tiina; Aura, Susanna; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2012 in ANALYTICA CHIMICA ACTA (Elsevier)ISSN: 0003-2670Reversible Switching between Superhydrophobic States on a Hierarchically Structured Surface
Verho, Tuukka; Korhonen, Juuso T.; Sainiemi, Lauri; Jokinen, Ville; Bower, Chris; Franze, Kristian; Franssila, Sami; Andrew, Piers; Ikkala, Olli; Ras, Robin H.A.2012 in PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA (NATL ACAD SCIENCES)ISSN: 0027-8424Porous inorganic-organic hybrid material by oxygen plasma treatment
Aura, Susanna; Jokinen, Ville; Laitinen, Mikko; Sajavaara, Timo; Franssila, Sami2011 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)ISSN: 0960-1317Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation
Grigoras, Kestutis; Zavodchikova, Marina Y.; Nasibulin, Albert G.; Kauppinen, Esko I.; Ermolov, Vladimir; Franssila, Sami2011 in JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY (AMER SCIENTIFIC PUBLISHERS)ISSN: 1533-4880Controlled Lateral Spreading and Pinning of Oil Droplets Based on Topography and Chemical Patterning
Jokinen, Ville; Sainiemi, Lauri; Franssila, Sami2011 in LANGMUIR (AMER CHEMICAL SOC)ISSN: 0743-7463Engineered droplets for dried droplet solute deposition by mass spectrometric imaging
Jokinen, Ville; Franssila, Sami; Baumann, Marc2011 in MICROFLUIDICS AND NANOFLUIDICS (Springer Verlag)ISSN: 1613-4982Feasibility of capillary liquid chromatography-microchip-atmospheric pressure photoionization-mass spectrometry for pesticide analysis in tomato
Kruve, Anneli; Haapala, Markus; Saarela, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Ketola, Raimo A.2011 in ANALYTICA CHIMICA ACTA (Elsevier)ISSN: 0003-2670Superhydrophobic Tracks for Low-Friction, Guided Transport of Water Droplets
Mertaniemi, Henrikki; Jokinen, Ville; Sainiemi, Lauri; Franssila, Sami; Marmur, Abraham; Ikkala, Olli; Ras, Robin H.A.2011 in ADVANCED MATERIALS (WILEY-V C H VERLAG GMBH)ISSN: 0935-9648Integrated microelectrode hot electron electrochemiluminescent sensor for microfluidic applications
Niskanen, Antti J.; Ylinen-Hinkka, Tiina; Kulmala, Sakari; Franssila, Sami2011 in SENSORS AND ACTUATORS B: CHEMICAL (Elsevier)ISSN: 0925-4005Integrated photocatalytic micropillar nanoreactor electrospray ionization chip for mimicking phase I metabolic reactions
Nissila, Teemu; Sainiemi, Lauri; Karikko, Mika-Matti; Kemell, Marianna; Ritala, Mikko; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.2011 in LAB ON A CHIP (Royal Society of Chemistry)ISSN: 1473-0197Rapid and sensitive drug metabolism studies by SU-8 microchip capillary electrophoresis-electrospray ionization mass spectrometry
Nordman, Nina; Sikanen, Tiina; Moilanen, Maria-Elisa; Aura, Susanna; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2011 in JOURNAL OF CHROMATOGRAPHY A (Elsevier Science B.V.)ISSN: 0021-9673Non-Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication
Sainiemi, Lauri; Jokinen, Ville; Shah, Ali; Shpak, Maksim; Aura, Susanna; Suvanto, Pia; Franssila, Sami2011 in ADVANCED MATERIALS (WILEY-V C H VERLAG GMBH)ISSN: 0935-9648Microfabricated silicon platform with 60 microfluidic chips for rapid mass spectrometric analysis
Sainiemi, Lauri; Nissilä, Teemu; Kostiainen, Risto; Ketola, Raimo A.; Franssila, Sami2011 in LAB ON A CHIP (Royal Society of Chemistry)ISSN: 1473-0197Lithography-free fabrication of carbon nanotube network transistors
Timmermans, Marina Y.; Grigoras, Kestutis; Nasibulin, Albert G.; Hurskainen, Ville; Franssila, Sami; Ermolov, Vladimir; Kauppinen, Esko I.2011 in NANOTECHNOLOGY (IOP PUBLISHING LTD)ISSN: 0957-4484Mechanically Durable Superhydrophobic Surfaces
Verho, Tuukka; Bower, Chris; Andrew, Piers; Franssila, Sami; Ikkala, Olli; Ras, Robin H.A.2011 in ADVANCED MATERIALS (WILEY-V C H VERLAG GMBH)ISSN: 0935-9648Immunoassay of C-reactive protein by hot electron induced electrochemiluminescence using integrated electrodes with hydrophobic sample confinement
Ylinen-Hinkka, Tiina; Niskanen, Antti J.; Franssila, Sami; Kulmala, Sakari2011 in ANALYTICA CHIMICA ACTA (Elsevier)ISSN: 0003-2670Feasibility of capillary liquid chromatography/microchip atmospheric pressure photoionization mass spectrometry in analyzing anabolic steroids in urine samples
Ahonen, Linda; Haapala, Markus; Saarela, Ville; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2010 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)ISSN: 0951-4198Feasability of SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microfluidic chips in the analysis of the human cell lysates
Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2010 in ELECTROPHORESIS (Wiley-VCH Verlag)ISSN: 0173-0835Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching
Chekurov, Nikolai; Grigoras, Kestutis; Sainiemi, Lauri; Peltonen, Antti; Tittonen, Ilkka; Franssila, Sami2010 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)ISSN: 0960-1317Integrated liquid chromatography - heated nebulizer microchip for mass spectrometry
Haapala, Markus; Saarela, Ville; Pól, Jaroslav; Kolari, Kai; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2010 in ANALYTICA CHIMICA ACTA (Elsevier)ISSN: 0003-2670Feasibility of gas chromatography-microchip atmospheric pressure photoionization-mass spectrometry in analysis of anabolic steroids
Hintikka, Laura; Haapala, Markus; Franssila, Sami; kuuranne, Tiia; Leinonen, Antti; Kostiainen, Risto2010 in JOURNAL OF CHROMATOGRAPHY A (Elsevier Science B.V.)ISSN: 0021-9673Environmental and food analysis by desorption atmospheric pressure photoionizationmass spectrometry
Luosujärvi, Laura; Kanerva, Sanna; Saarela, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Kaupplia, Tiina2010 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)ISSN: 0951-4198Deposited dielectrics on metal thin films using silicon and glass substrates for hot electron-induced electrochemiluminescence
Niskanen, Antti J.; Ylinen-Hinkka, Tiina; Pusa, Matti; Kulmala, Sakari; Franssila, Sami2010 in THIN SOLID FILMS (Elsevier Science)ISSN: 0040-6090Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors
Niskanen, Antti J.; Varpula, Aapo; Utriainen, Mikko; Natarajan, Gomathi; Cameron, David C; Novikov, Sergey; Airaksinen, Veli-Matti; Sinkkonen, Juha; Franssila, Sami2010 in SENSORS AND ACTUATORS B: CHEMICAL (Elsevier)ISSN: 0925-4005Ionspray Microchip
Pól, Jaroslav; Kauppila, Tiina J.; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2010 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)ISSN: 0951-4198Silicon nanograss as micro fuel cell gas diffusion layer
Scotti, Gianmario; Kanninen, P.; Makinen, M.; Kallio, T.; Franssila, S.2010 in MICRO AND NANO LETTERS (Institution of Engineering and Technology)Temperature measurements of a glowing microbridge
Shpak, Maksim; Sainiemi, Lauri; Ojanen, Maija; Kärhä, Petri; Heinonen, Martti; Franssila, Sami; Ikonen, Erkki2010 in APPLIED OPTICS (OPTICAL SOC AMER)ISSN: 1559-128XOptical Temperature Measurements of Silicon Microbridge Emitters
Shpak, Maksim; Sainiemi, Lauri; Ojanen, Maija; Kärhä, Petri; Heinonen, Martti; Franssila, Sami; Ikonen, Erkki2010 in APPLIED OPTICS (OPTICAL SOC AMER)ISSN: 1559-128XHybrid Ceramic-Polymers New, Non-Biofouling and Optically Transparent Materials for Microfluidics
Sikanen, Tiina; Aura, Susanna; Heikkilä, Liisa; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2010 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)ISSN: 0003-2700Dynamic coating of SU-8 microfluidic chips with phospholipid disks
Sikanen, Tiina; Wiedmer, Susanne; Heikkilä, Liisa; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio2010 in ELECTROPHORESIS (Wiley-VCH Verlag)ISSN: 0173-0835Fabrication of nanocluster silicon surface with electric discharge and the application in desorption/ionization on silicon-mass spectrometry (DIOS-MS)
Suni, Niina; Haapala, Markus; Främ, Elina; Härkönen, Emma; Ritala, Mikko; Sainiemi, Lauri; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2010 in LAB ON A CHIP (Royal Society of Chemistry)ISSN: 1473-0197UV-enbossed inorganic-organic hybrid nanopillars for bioapplications
Aura, Susanna; Jokinen, Ville; Sainiemi, Lauri; Baumann, Marc; Franssila, sami2009 in Journal of Nanosciense and Nanotechnology (Royal Society of Chemistry)The fabrication of silicon nanostructures by local gallium implantation and cryogenic deep reactive ion etching Ion Etching
Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka2009 in NANOTECHNOLOGY (IOP PUBLISHING LTD)Etching under the corner-inclined macropores by reactive ion etching
Grigoras, Kestutis; Franssila, Sami2009 in Physica Status Solidi A (IOP PUBLISHING LTD)Microchip atmospheric pressure photoionization for analysis of pertoleum by FT-IVR mass spectrometry
Haapala, Markus; Purcell, Jeremiah M.; Saarela, Ville; Franssila, Sami; Rodgers, Ryan P.; Hendrickson, Christopher L.; Kotiaho, Tapio; Marshall, Alan; Kostiainen, Risto2009 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)Silicon-glass instrumented solid-phase extraction-zone electrophoresis microchip with thin amorphous silicon filn electrodes: perfomance in immunoaffinity analysis
Hokkanen, Ari; Siren, Heli; Amundsen, Lotta; Kolari, Kai; Franssila, Sami; Tuomikoski, Santeri; Stuns, Ingmar; Rovio, Stella; Nevanen, Tarja; Takkinen, Kristiina; Söderlund, Hans2009 in Microsystems Technology (AMER CHEMICAL SOC)Microstructured surfaces for directional wetting
Jokinen, Ville; Leinikka, Marianne; Franssila, Sami2009 in ADVANCED MATERIALS (WILEY-V C H VERLAG GMBH)Surface assisted laser desorption/ionization on two-layered amorhous silicon coated hydrid nanostructures
Jokinen, Ville; Aura, Susanna; Luosujärvi, Laura; Sainiemi, Lauri; Kotiaho, Tapani; Franssila, Sami; Baumann, Marc2009 in JOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY (Springer New York)Microchip heated nebulizer as an atmospheric pressure thermospray ionization source for mass spectrometry
Keski-Rahkonen, P.; Haapala, Markus; Saarela, Ville; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami; Auriola, S.2009 in RCM (Springer New York)Electronic cooling a submicron-sized metallic beam
Muhonen, Juha; Niskanen, Antti; Meschke, Matthias; Pashkin, Yury; Tsai, J.S.; Sainiemi, L.; Franssila, S.; Pekola, Jukka2009 in APPLIED PHYSICS LETTERS (AMERICAN INSTITUTE OF PHYSICS)ISSN: 0003-6951Ultrathin tunnel insulator films on silicon for electrochemiluminescence studies
Niskanen, A.J.; Ylinen-Hinkka, T.; Kulmala, Sakari; Franssila, S.2009 in THIN SOLID FILMS (Elsevier Science)ISSN: 0040-6090Ultrathin insulating films on silicon foe electrochemiluminescence
Niskanen, Antti; Ylinen-Hinkka, Tiina; Kulmala, Sakari; Franssila, Sami2009 in THIN SOLID FILMS (Elsevier Science)Fully polymeric integrated microreactor/electrospray ionozation chip for on-chip digestion and mass spectrometric analysis
Nissilä, Teemu; Sainiemi, Lauri; Franssila, Sami; Ketola, Raimo2009 in Sensors and Actuators B (Elsevier Science)Microflidic heated gas jet shape analysis by temperature scanning
Saarela, Ville; Haapala, Markus; Kostiainen, Risto; Kotiaho, Tapani; Franssila, Sami2009 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses
Sainiemi, Lauri; Grigoras, Kestas; Kassamakov, Ivan; Hanhijärvi, Kalle; Aaltonen, Juha; Fan, Ji; Saarela, Ville; Haeggström, Edward; Franssila, Sami2009 in SENSORS AND ACTUATORS A: PHYSICAL (Elsevier)Suspended nanostructured alumina membranes
Sainiemi, Lauri; Grigoras, Kestas; Franssila, Sami2009 in NANOTECHNOLOGY (IOP PUBLISHING LTD)Carbon nanotube thin film transistors based on aerosol methods
Zavodchikova, Marina; Kulmala, Tero; Nasibulin, Albert G.; Ermolov, Vladimir; Franssila, Sami; Grigoras, Kestutis; Kauppinen, Esko I.2009 in NANOTECHNOLOGY (IOP PUBLISHING LTD)Development and application of a miniaturised gel eletrophoresis device for protein analysis
Demianova, Z.; Pöysä, E.; Ihalainen, S.; Aura, S.; Shimmo, M.; Franssila, S.; Baumann, M.2008 in MOLECULAR BIOSYSTEMS (Royal Society of Chemistry)Investigation of sub-nm ALD aluminum oxide films by plasma assisted etch-through
Grigoras, K.; Franssila, S.; Airaksinen, V-M.2008 in THIN SOLID FILMS (Elsevier Science)Coating of nanoporous membranes: atomic layer deposition versus sputtering
Grigoras, K.; Airaksinen, V-M; Franssila, S.2008 in NANOTECHNOLOGY (IOP PUBLISHING LTD)Capillary filling conditions of square-shaped microfluidic channels
Jokinen, Ville; Franssila, Sami2008 in MICROFLUIDICS AND NANOFLUIDICS (Springer Verlag)Complex droplets on chemically modified silicon nanograss
Jokinen, Ville; Sainiemi, Lauri; Franssila, Sami2008 in ADVANCED MATERIALS (WILEY-V C H VERLAG GMBH)ISSN: 0935-9648Direct Analysis of Illicit Drugs by Desorption Atmospheric Pressure Photoionization
Kauppila, Tiina; Arvola, Ville; Haapala, Markus; Pol, Jaroslav; Aalberg, Laura; Saarela, Ville; Franssila, Sami2008 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)Deep plasma etching of glass for fluidic devices with different mask materials
Kolari, K.; Saarela, V.; Franssila, S.2008 in Microengineering (JOHN WILEY & SONS LTD)Desorption and Ionization Mechanisms in Desorption Atmospheric Pressure Photoionization
Luosujärvi, L.; Arvola, V.; Haapala, M.; Pol, J.; Saarela, V.; Franssila, S.; Kotiaho, T.; Kostiainen, R.; Kauppila, TJ2008 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)Gas chromatography-mass spectrometry of polychlorinated biphenyls using atmospheric pressure chemical ionization and atmospheric pressure photoionization microchip
Luosujärvi, Laura; Karikko, Mika-Matti; Haapala, Markus; Saarela, Ville; Huhtala, Sami; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Kauppila, Tiina2008 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)Fabrication and electrical, mechanical and optical characterization of SOI thermal microbridge actuators
Sainiemi, Lauri; Kassamakov, Ivan; Hanhijärvi, Kalle; Ji, Fan; Saarela, V.; Franssila, Sami2008 in Sensor Actuators (JOHN WILEY & SONS LTD)Fabrication and characterization of silicon micropillar array electrospray ionization chip
Sainiemi, L.; Nissilä, T.; Jokinen, V.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.; Ketola, R.A; Franssila, S.2008 in Sensors & Actuators B Chemical (JOHN WILEY & SONS LTD)Fabrication and fluidic characterization of silicon micropillar array electrospray ionization chip
Sainiemi, Lauri; Nissilä, Teemu; Jokinen, Ville; Sikanen, Tiina; Kotiaho, Tapio; Kostiainen, Risto; Ketola, Raimo A.; Franssila, Sami2008 in SENSORS AND ACTUATORS B: CHEMICAL (Elsevier)ISSN: 0925-4005Temperature modeling and measurement of an electrokinetic separation chip
Sikanen, Tiina; Zwinger, Thomas; Tuomikoski, Santeri; Franssila, Sami; Lehtiniemi, Reijo; Fager, Carl- Magnus; Kotiaho, Tapio; Pursula, Antti2008 in MICROFLUIDICS AND NANOFLUIDICS (Springer Verlag)Analytical characterization of microfabricated SU-8 emitters for electrospray ionization mass spectrometry
Sikanen, T.; Tuomikoski, T.; Ketola, S.; Kostiainen, R.; Franssila, S.; Kotiaho, T.2008 in JOURNAL OF MASS SPECTROMETRY (John Wiley and Sons Ltd)Selective Surface Patterning with an Electric Discharge in the Fabrication of Microfluidic Structures
Suni, Niina; Haapala, Markus; Mäkinen, Ari; Sainiemi, Lauri; Franssila, Sami; Färm, Elina; Puukilainen, Esa; Ritala, Mikko; Kostiainen, Risto2008 in ANGEWANDTE CHEMIE (Wiley-VCH Verlag GmbH & Co. KGaA)Novel carbon nanotube network deposition technique for electronic device fabrication
Zavodchikova, Marina; Nasibulin, Albert; Kulmala, Tero; Grigoras, Kestutis; Anisimov, Amton S.; Franssila, Sami; Ermolov, Vladimir; Kauppinen, Esko2008 in physica status solidi (b) (Wiley-VCH Verlag GmbH & Co. KGaA)Thin film transistors based on carbon nanotubes prepared by aerosol technique
Zavodchikova, Marina; Grigoras, K.; Kulmala, T.; Nasibulin, A.; Ermolov, V.; Franssila, Sami2008 in NANOTECHNOLOGY (IOP PUBLISHING LTD)Novel hybrid material for microfluidic devices
Aura, Susanna; Sikanen, Tiina; Kotiaho, Tapio; Franssila, Sami2007 in SENSORS AND ACTUATORS B: CHEMICAL (Elsevier)Mask material effects in cryogenic deep reactive ion etching
Franssila, Sami; Sainiemi, Lauri2007 in Journal of Vacuum Science and Technology. Part B. (AMER INST PHYSICS)ISSN: 1071-1023Application of ultra-thin aluminum oxide etch mask made by atomic layer deposition technique
Grigoras, K.; Sainiemi, L.; Tiilikainen, J.; Säynätjoki, A.; Airaksinen, V-M.; Franssila, S.2007 in Journal of Physics: Conference Series (IOP Publishing Ltd.)Microchip for combining gas chromatography or capillary liquic chromatography with Atmospheric Pressure Photoionization Mass Spectrometry
Haapala, M.; Luosujärvi, L.; Saarela, V.; Kotiaho, T.; Ketola, R.; Franssila, S.; Kostiainen, R.2007 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)Desorption Atmospheric Pressure Photoionization
Haapala, Markus; Pol, Jaroslav; Saarela, Ville; Arvola, Ville; Kotiaho, Tapio; Ketola, Raimo; Franssila, Sami; Kauppila, Tiina; Kostiainen, Risto2007 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)Silicon Micropillar Array Electrospray Chip for Drug and Biomolecule Analysis
Nissilä, T; Sainiemi, L.; Sikanen, T.; Kotiaho, T.; Franssila, S.; Kostiainen, R; Ketola, R.2007 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)Glass microfabricated nebulizer chip for mass spectrometry
Saarela, V.; Haapala, Markus; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2007 in Lab Chip (JOHN WILEY & SONS LTD)Rapid fabrication of high aspect ratio silicon nanopillars for Chemical analysis
Sainiemi, L.; Keskinen, H.; Aromaa, M.; Luosujärvi, L.; Grigoras, K.; Kotiaho, T.; Mäkelä, J.; Franssila, S.2007 in NANOTECHNOLOGY (IOP PUBLISHING LTD)Fully microfabricated and integrated, SU-8-based capillary electrophoresis-electrospray ionization microchips for mass spectrometry
Sikanen, T.; Tuomikoski, S.; Ketola, R.; Kostiainen, R.; Franssila, S.; Kotiaho, T.2007 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)Performance of SU-8 microchips as separation devices and comparison
Sikanen, T.; Heikkilä, L.; Tuomikoski, S.; Ketola, R.A; Kostiainen, R.; Franssila, S.; Kotiaho, T2007 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)A microfabricated nebulizer for liquid vaporization in chemical analysis
Franssila, Sami; Marttila, Seppo; Kolari, Kai; Östman, Pekka; Kotiaho, Tapio; Kostiainen, Risto; Lehtiniemi, Reijo; Fager, Carl-Magnus; Manninen, Jorma2006 in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (Institute of Electrical and Electronics Engineers Inc.)ISSN: 1057-7157Minimum Proton Affinity for Efficient Ionization with Atmospheric Pressure Desorption /Ionization on Silicon Mass Spectrometry
Franssila, Sami; Östman, Pekka; Pakarinen, Jaana M.H.; Vainiotalo, Pirjo; Kostiainen, Risto; Kotiaho, Tapio2006 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)ISSN: 0951-4198Design and fabrication of integrated solid-phase extraction-zone electrophoresis microchip
Tuomikoski, Santeri; Virkkala, Nina; Rovio, Stella; Hokkanen, Ari; Sirén, Heli; Franssila, Sami2006 in JOURNAL OF CHROMATOGRAPHY A (Elsevier Science B.V.)ISSN: 0021-9673Capillary liquid chromatography-microchip atmospheric pressure chemical ionization-mass spectrometry
Östman, Pekka; Jäntti, Sirkku; Grigoras, Kestutis; Saarela, Ville; Ketola, Raimo A.; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2006 in LAB ON A CHIP (Royal Society of Chemistry)Gas Chromatography-Microchip Atmospheric Pressure Chemical Ionization-Mass Spectrometry
Östman, Pekka; Luosujärvi, Laura; Haapala, Markus; Grigoras, Kestutis; Ketola, Raimo; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2006 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)Fabrication of porous membrane filter from p-type silicon
Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.2005 in Physica Status Solidi (AMER CHEMICAL SOC)Analysis of amphetamines and fentanyls by atmospheric pressure desorption/ionization on silicon mass spectrometry and matrix-assisted laser desorption/ionization mass spectrometry and its application to forensic analysis of drug seizures
Pihlainen, Katja; Grigoras, Kestutis; Franssila, S.; Ketola, Raimo; Kotiaho, Tapio; Kostiainen, Risto2005 in JOURNAL OF MASS SPECTROMETRY (John Wiley and Sons Ltd)Re-usable multi-inlet PDMS fluidic connector
Saarela, Ville; Franssila, Sami; Tuomikoski, Santeri; Marttila, Seppo; Östman, Pekka; Sikanen, Tiina; Kotiaho, Tapio; Kostiainen, Risto2005 in SENSORS AND ACTUATORS B: CHEMICAL (Elsevier)ISSN: 0925-4005Characterization of SU-8 for electrokinetic microfluidic applications
Sikanen, Tiina; Tuomikoski, Santeri; Ketola, Raimo; Kostiainen, Risto; Franssila, Sami; Kotiaho, Tapio2005 in Lab on aChip (Elsevier)Fabrication on enclosed SU-8 tips for electrospray ionization spectrometry
Tuomikoski, Santeri; Sikanen, tiina; Ketola, Raimo; Kotiaho, Tapio; Franssila, Sami2005 in ELECTROPHORESIS (Wiley-VCH Verlag)Free-standing SU-8 microfluidic chips by adhesive bonding and release etching
Tuomikoski, Santeri; Franssila, Sami2005 in Sensors and Actuators A (Wiley-VCH Verlag)Formation of nanoporous glass layer
Grigoras, Kestutis; Franssila, Sami2004 in PHYSICA SCRIPTA (IOP Publishing Ltd.)Atmospheric Pressure Photoionization-Mass Spectrometry with a Microchip Heated Nebulizer
Kauppila, Tiina; Östman, Pekka; Mattila, Seppo; Ketola, Raimo; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2004 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist
Tuomikoski, S.; Franssila, S.2004 in PHYSICA SCRIPTA (IOP Publishing Ltd.)Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectrometry
Östman, Pekka; Marttila, Seppo J.; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2004 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)Poly(Dimethylsiloxane) Electrospray Devices Fabricated With Diamond-Like Carbon-Poly(Dimethylsiloxane) Coated SU-8 Masters
Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V-M.; Soininen, A.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2003 in Lab Chip (AMER CHEMICAL SOC)Feasibility of Atmospheric Pressure Desorption/Ionization on Silicon Mass Spectrometry in Analysis of Drugs
Huikko, K.; Östman, P.; Sauber, C.; Mandel, F.; Grigoras, K.; Franssila, S.; Kotiaho, T.; Kostiainen, R.2003 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)Rapid thermal annealing of Cu/WNx/Si structures
Lipsanen, Antti; Kuivalainen, Pekka; Rauhala, Eero; Franssila, Sami; Seppälä, Anu2003 in JOURNAL OF MATERIALS SCIENCE: MATERIALS IN ELECTRONICS (Springer New York)Luminescence study of silicon nanostructures prepared by ion beam mixing
Ovchinnikov, V.; Sokolov, V.; Franssila, S.2003 in MICROELECTRONICS JOURNAL (ELSEVIER SCI LTD)Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS)
Tuomikoski, S.; Huikko, K.; Grigoras, K; Östman, P.; Kotiaho, T; Kostiainen, R.; Baumann, M.; Franssila, S.2002 in Lab-on-chip (ELSEVIER SCI LTD)Spectrometrie de mass sur silicum poreux: desorption/ionisation sur silicium (DIOS)
Tuomikoski, S.; Huikko, K.; Östman, P.; Grigoras, K.; Baumann, M.; Kostiainen, R.; Franssila, S.; Kotiaho, T.2002 in Bio Forum International, Edition Francaise (ELSEVIER SCI LTD)Mass spectrometry on porous silicon: Desorption/Ionization on Silicon (DIOS)
Tuomikoski, S.; Huikko, K.; Östman, P.; Grigoras, K.; Baumann, M.; Kostiainen, R.; Franssila, S.; Kotiaho, T.2002 in Bio Forum International (ELSEVIER SCI LTD)PLASMA ETCHED INITIAL PITS FOR MACROPOROUS SILICON STRUCTURES
Grigoras, Kestutis; Niskanen, Antti J.; Franssila, Sami2001 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)Plasma etched initial pits for electrochemically etched macroporous silicon structures
Grigoras, Kestutis; Niskanen, Antti; Franssila, Sami2001 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)Submicron image reversal by liquid phase deposition of oxide
Niskanen, Antti; Franssila, Sami2001 in MICROELECTRONIC ENGINEERING (Elsevier)Improved neuron MOS-transistor structures for integrated neural network circuits
Rantala, A.; Franssila, S.; Kaski, K.; Lampinen, J.; Åberg, M.; Kuivalainen, P.2001 in IEE Proceedings - Circuits, Devices and Systems (Institute of Electrical Engineers)ISSN: 1350-2409Etching through silicon wafer in inductively coupled plasma
Franssila, S.; Kiihamäki, J.; Karttunen, J.2000 in Microsystems Technologies (Institute of Electrical Engineers)Depth and profile control in plasma etched MEMS structures
Kiihamäki, J.; Kattelus, H.; Karttunen, J.; Franssila, S.2000 in Sensors & Actuators (Institute of Electrical Engineers)Pattern shape effects and artefacts in deep silicon etching
Kiihamäki, J.; Franssila, Sami1999 in Journal of Vacuum Science and Technology (Institute of Electrical Engineers)Deep silicon etching in inductively coupled plasma reactor for MEMS
Kiihamäki, J.; Franssila, Sami1999 in PHYSICA SCRIPTA (IOP Publishing Ltd.)High-precision neuron MOSFET structures
Rantala, A.; Franssila, S.; Kaski, K.; Lampinen, J.; Åberg, M.; Kuivalainen, P.1999 in ELECTRONICS LETTERS (Institution of Engineering and Technology)ISSN: 0013-5194Reduction of molybdenum resistivity by a seed layer of Ti-W
Franssila, Sami; Kattelus, H.; Nykänen, E.1997 in MICROELECTRONIC ENGINEERING (Elsevier)Hospital mouth cleaning aids may cause dental erosion
Meuman, J.H.; Sorva, R.; Pelttari, A.; Rytömaa, I.; Franssila, Sami; Kroon, L.1996 in Special Car in Dentistry (Elsevier)Plasma etching in microdevice fabrication: thin film and process integration aspects.
Franssila, S.1995 in Acta Polytechnica Scandinavica (Elsevier)Linewidth uniformity and etch rate uniformity in refractory metal plasma etching
Franssila, Sami1994 in Journal of Vacuum Science and Technology (Elsevier)Tungsten silicide formation from sequentially sputtered tungsten and silicon films
Molarius, J.M.; Franssila, S.; Drozdy, G.; Saarilahti, J.1991 in APPLIED SURFACE SCIENCE (Elsevier Science B.V.)Review article, Literature review, Systematic reviewMicrotechnologies to fuel neurobiological research with nanometer precision
Brunello, Cecilia A.; Jokinen, Ville; Sakha, Prasanna; Terazono, Hideyuki; Nomura, Fumimasa; Kaneko, Tomoyuki; Lauri, Sari E.; Franssila, Sami; Rivera, Claudio; Yasuda, Kenji; Huttunen, Henri J.2013 in JOURNAL OF NANOBIOTECHNOLOGY (Elsevier Science B.V.)Analysis of selective androgen receptor modulators by gas chromatography-microchip atmospheric pressure photoionization-mass spectrometry
Luosujärvi, Laura; Haapala, Markus; Thevis, Mario; Saarela, Ville; Franssila, Sami; Ketola, Raimo A; Kostiainen, Risto; Kotiaho, Tapio2010 in JOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY (Springer New York)ISSN: 1044-0305Microchip technology in mass spectrometry
Sikanen, Tiina; Franssila, Sami; Kauppila, Tiina J.; Kostiainen, Risto; Kotiaho, Tapio; Ketola, Raimo A.2010 in MASS SPECTROMETRY REVIEWS (John Wiley and Sons Inc.)ISSN: 0277-7037Book section, Chapters in research booksEtching Techniques for Superhydrophobic Surface Fabrication
Franssila, Sami2017 in RSC Soft Matter (ROYAL SOCIETY OF CHEMISTRY)ISBN: 978-1-78262-154-6MEMS lithography
Franssila, Sami; Tuomikoski, Santeri2015 ISBN: 9780323299657Microfluidics and BioMEMS in silicon
Franssila, Sami; Davis, Cristina; LeVasseur, Michael K.; Cao, Zhu; Yobas, Levent2015 ISBN: 978-0-323-29965-7Deep Reactive Ion Etching
Lärmer, Franz; Franssila, Sami; Sainiemi, Lauri; Kolari, Kai2015 ISBN: 978-0-323-29965-7Deep Reactive Ion Etching
Lärmer, Franz; Franssila, Sami; Sainiemi, Lauri; Kolari, Kai2010 ISBN: 978-081551594-4an entry in Encyclopedia of Micro-and nanofluidics
Franssila, Sami; Sainiemi, Lauri2008 Conference proceedingsNovel nanostructure replication process for robust superhydrophobic surfaces
Hoshian, Sasha; Jokinen, Ville; Franssila, Sami2016 ISBN: 9781509019731ISSN: 1084-6999Microfluidics with on-line mass spectrometric methods for investigation of reaction mechanisms
Nilsson, Sofia M E; Aumüller, Ingo; Kiriazis, Alexandros; Boije af Gennäs, Gustav; Haapala, Markus; Scotti, Gianmario; Franssila, Sami; Yli-Kauhaluoma, Jari; Kotiaho, Tapio2015 ISBN: 9780979806483Piezoelectric sensitivity measurement for nanofibrillated cellulose film sensors
Rajala, Satu; Vuoriluoto, Maija; Rojas, Orlando; Franssila, Sami; Tuukkanen, Sampo2015 ISSN: 0000-0000Micro-writing under water droplet using photo-switchable titanium oxide on nanocellulose coated micro-hoodoos
Hoshian, Sasha; Jokinen, Ville; Hjort, Klas; Ras, Robin H A; Franssila, Sami2014 ISBN: 9780979806476Characterization of nano-coated micro- and nanostructures by pushing
Liimatainen, Ville; Venäläinen, Janne; Koverola, Mikko; Lyytinen, Jussi; Rontu, Ville; Berdova, Maria; Koskinen, Jari; Franssila, Sami; Zhou, Quan2014 A micro heat exchanger microfabricated from bulk aluminium Journal of Physics
Scotti, Gianmario; Franssila, Sami2014 Printable and disposable supercapacitor from nanocellulose and carbon nanotubes
Tuukkanen, S.; Lehtimäki, S.; Jahangir, F.; Eskelinen, A.-P.; Lupo, D.; Franssila, S.2014 ISBN: 9781479940264Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry
Heikkinen, V.; Hanhijärvi, K.; Aaltonen, J.; Grigoras, K.; Kassamakov, I.; Franssila, S.; Haeggstrom, E.2012 ISBN: 978-0-8194-8893-0ISSN: 0277-786XNon-destructive 3D measurement of microchannels
Heikkinen, V.; Nolvi, A.; Kassamakov, I.; Grigoras, K.; Franssila, S.; Haeggstrom, E.2012 ISBN: 978-0-8194-9183-1ISSN: 0277-786XIR-SWLI for subsurface imaging of large MEMS structures
Nolvi, A.; Heikkinen, V.; Kassamakov, I.; Aaltonen, J.; Ylitalo, T.; Saresoja, O.; Berdova, M.; Franssila, S.; Haeggstrom, E.2012 ISBN: 978-0-8194-9122-0ISSN: 0277-786XSIMULTANEOUS TIRF MICROSCOPY AND OPTICAL TRAPPING FOR SINGLE MOLECULE EXPERIMENTS
Hanhijärvi, Kalle; Ojala, Heikki; Wallin, Anders E.; Ziedaite, Gabija; Aura, Susanna; Franssila, Sami; Bamford, Dennis H.; Hæggström, Edward2011 Infrared Scanning White Light Interferometry Using a Solid State Light Source
Heikkinen, V.; Aaltonen, J.; Wälchli, B.; Räikkönen, H.; Kassamakov, I; Cholakova, T.; Grigorias, K.; Franssila, S.; Kakanakov, R.; Hæggström, E.2011 Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control
Heikkinen, V.; Hanhijärvi, K.; Aaltonen, J.; Räikkönen, H.; Wälchli, B.; Paulin, T.; Kassamakov, I.; Grigoras, K.; Franssila, S.; Hæggström, E.2011 MINIATURIZED LIQUID-LIQUID EXTRACTION SYSTEM BASED ON CONTROLLED AQUEOUS AND ORGANIC DROPLETS
Jokinen, V.; Sikanen, T.; Kostiainen, R.; Franssila, Sami2011 RAPID BIOMOLECULE ANALYSIS USING TWO-DIMENSIONAL ELECTROPHORESIS-ELECTROSPRAY IONIZATION MICROCHIP
Nordman, Nina; Sikanen, Tiina; Aura, Susanna; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2011 INTEGRATED MULTI-TIP PHOTOCATALYTIC NANOREACTOR ELECTROSPRAY CHIP FOR PHOSPHOPEPTIDE ENRICHMENT AND OXIDATION
Ruokolainen, Miina; Sikanen, Tiina; Sainiemi, Lauri; Nissilä, Teemu; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio2011 MICROFABRICATED ELECTROSPRAY IONIZATION PLATFORM WITH 60 TIPS FOR HIGH THROUGHPUT MASS SPECTROMETRIC ANALYSES
Sainiemi, Lauri; Nissilä, Teemu; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto2011 Velcro-type attachment of black silicon and carbon cloth for improved galvanic contact in micro fuel cells
Scotti, Gianmario; Mäkinen, M.; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2011 Refractive index of silicon with various doping levels at high temperatures
Shpak, M.; Sainiemi, L.; Kärhä, P.; Heinonen, M.; Franssila, S.; Ikonen, E.2011 INTACT PROTEIN SEPARATIONS WITH INHERENTLY BIOCOMPATIBLE ORMOCOMP SEPARATION CHIP WITH INTEGRATED ELECTROSPRAY IONIZATION EMITTER
Sikanen, Tiina; Aura, Susanna; Barrios-Lopez, Brianda; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2011 SUPERHYDROPHOBIC PERFLUOROPOLYMER MICRO- AND NANOSTRUCTURES BY EMBOSSING
Suvanto, P.; Jokinen, V.; Franssila, Sami2011 Combined photolithography and embossing for fabrication of multilevel, free standing microfluidic structures
Aura, Susanna; Franssila, Sami2010 Applications of focused ion beam in nanofabrications
Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka2009 Localized gallium doping and cryogenic deep reactive ion etching in fabrication of silicon nanostructures
Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka2009 in Materials Research Society Symposium Proceedings (SPIE)ISBN: 978-1-60511-154-4ISSN: 0272-9172Electronic cooling of submicron-sized metallic beams
Muhonen, Juha; Niskanen, Antti; Meschke, Matthias; Pashkin, Yu.A.; Tsai, J.S.; Sainiemi, L.; Franssila, S.; Pekola, Jukka2009 ISBN: 978-951-22-9793-1ISSN: 1254-5667Symmetric silicon micro fuel cell with porous eletrodes
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2009 Fully microfabricated polymer-based microfludic chips for bioanalysis
Sikanen, T.; Franssila, S.; Aura, S.; Tuomikoski, S.; Kotiaho, T.; Kostiainen, R.2009 Application of polymer microfluidic chips to the characterization of recombinant human erytropoietin by electrospray ionization mass spectrometry
Sikanen, Tiina; Aura, Susanna; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2009 Materials and technologies foe analitical microsystems
Franssila, Sami2008 Desorption atmospheric pressure photoionization-mass spectrometry in drug analysis
Luosujärvi, L.; Arvola, V; Haapala, M; Pol, J.; Saarela, V.; Franssila, S.; Kostiainen, R.; Kotiaho, T.; Kauppila, T.2008 Lidless SU-8 polymer electrospray ionization chip
Sainiemi, L.; Ketola, R.; Franssila, S.2008 Microchip-based CE-ESI/MS analysis of biological molecules
Sikanen, T.; Tuomikoski, S.; Ketola, R.A; Kostianen, R.; Franssila, S.; Kotiaho, T.2008 Novel hybrid material for microfluidic devices
Aura, Susanna; Sikanen, Tiina; Kotiaho, Tapio; Franssila, Sami2007 ISBN: 1-4244-0842-3Coating of nanoporous membranes atomic layer deposition versus sputtering
Grigoras, K.; Sirviö, S.; Airaksinen, V-M; Franssila, S.2007 Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask
Mäkelä, J.M.; Keskinen, H.; Aromaa, M.; Sainiemi, L.; Luosujärvi, L.; Kotiaho, T.; Franssila, S.2007 Atomic layer deposition of Al2O3, TiO2 and ZnO films into high aspect ratio pores
Sirviö, Sari; Sainiemi, L.; Franssila, S.; Grigoras, K.2007 Microfluidic channels from photoactive hybrid material ORMOCER[R]
Aura, Susanna; Franssila, Sami2006 Development of analytical methods for analysis of drug and environmental compounds using gas chromatography-microchip APCI-MS
Franssila, Sami; Luosujärvi, Laura; Haapala, Markus; Östman, Pekka; Kostiainen, Risto; Grigoras, Kestutis; Ketola, Raimo; Kotiaho, Tapio2006 Automated 2D analysis on a proteome microchip
Franssila, Sami; Demianova, Zuzana; Shimmo, Masahiko; Pöysä, Eemeli; Kotiaho, Tapio; Kostiainen, Risto; Baumann, Marc2006 Application of ultra-thin aluminium oxide mask made by atomic layer deposition technique
Grigoras, kestutis; Airaksinen, Veli-Matti; Franssila, Sami; Sainiemi, Lauri; Tiilikainen, Jouni; Säynätjoki, Antti2006 Spontaneous microflow of micropillar array electrospray electrospray ionization microchip
Nissilä, T.; Sainiemi, L.; Sikanen, T.; Kotiaho, T.; Franssila, S.; Kostiainen, R.; Ketola, R.A.2006 Thermal characterization of a microfluidic nebulizer
Saarela, Ville; Haapala, Markus; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2006 Mask material effects in cryogenic DRIE
Sainiemi, Lauri; Franssila, Sami2006 Developed of a microdevice for 2-dimensional gel electrophoresis
Demianova, Zuzana; Shimmo, Masahiko; Pöysä, Eemeli; Kotiaho, Tapani; Kostiainen, Risto; Franssila, Sami; Bauman, Marc2005 The effect of physical properties of selected molecules on desorption/ionization on porous silicon-mass spectrometry
Franssila, Sami; Östman, Pekka; Kostiainen, Risto; Ketola, Raimo; Kotiaho, Tapio2005 Infrared thermal imaging of microfluidic chips
Franssila, Sami; Grigoras, Kestutis; Marttila, Seppo; Lehtiniemi, Reijo; Fager, Carl-Magnus; Manninen, Jorma2005 Characterization of SU-8 polymer for electrophoretic separaions
Sikanen, T.; Korpisalo, S.; Tuomikoski, S.; Ketola, R.A.; Kostiainen, R.; Franssila, Sami; Kotiaho, T.2005 Fabrication and optimization of enclosed SU-8 tips for electrospray ionization mass spectrometry
Tuomikoski, Santeri; Sikanen, Tiina; Kostiainen, Risto; Franssila, Sami2005 Electrophoretic separations of pharmaceutical compounds in microchannels composed of SU-8 polymer
Zwinger, T.; Sikanen, T.; Tuomikoski, S.; Ketola, R.A.; Kostiainen, R.; Franssila, S.; Kotiaho, T.2005 Microfluidic Nebulizer Chip for Mass Spectrometry
Franssila, S.; Östman, P.; Marttila, S.; Kotiaho, T.; Kostiainen, R.2004 Fabrication of porous membrane filter from p-type silicon
Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.2004 Fabrication of microfluidic devices from SU-8
Tuomikoski, Santeri; Franssila, Sami2004 Droplet based self-assembly of SU-8 microparts
del Corral, Carlos; Zhou, Quan; Albut, Aurelian; Chang, Bo; Franssila, Sami; Tuomikoski, Santeri; Koivo, Heikki N.2003 Microglow: a microsystems laboratory course
Franssila, S.; Tittonen, I.; Grigoras, K.; Juvonen, T.; Nera, K.; Heikkilä, P.2002 Microsystems and nanotechnology in the Nordic region
Franssila, S.; Furuberg, L.; Enoksson, P.; Grey, F.; Larsen, A.2002 Silicon devices for chemistry and lifesciences
Franssila, Sami2002 Micromechanics in silicon
Juvonen, T.; Poulsen, J.; Franssila, S.2002 Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS MS)
Tuomikoski, S.; Huikko, K.; Grigoras, K.; Niskanen, A.; Kotiaho, T.; Kostiainen, R.; Franssila, S.; Baumann, M.2001 Loading effects in deep silicon etching
Karttunen, J.; Kiihamäki, J.; Franssila, S.2000 Etching through silicon wafer in inductively coupled plasma
Franssila, S.; Kiihamäki, J.; Karttunen, J.1999 Depth and profile control in plasma etched MEMS structures
Kiihamäki, J.; Kattelus, H.; Franssila, S.1999 Variable Threshold (MOS) - Transistor for Integrated Neural Network Circuits
Rantala, A.; Franssila, S.; Kaski, K.; Lampinen, J.; Åberg, M.1997 Non-refereed scientific articles
Unrefereed conference proceedingsSilicon Micropillar Electrospray Ionization Chip Platform for Biomolecular Analysis in the Aqueous Phase
Hirvonen, Saara; Lipponen, Katriina; Jokinen, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio2015 ISBN: 978-0-9798064-8-3ISSN: 1556-5904Scientific books (monographs)
BookIntroduction to Microfabrication
Franssila, Sami2004 ISBN: 0-470-85105-8Publications intended for professional communities
Article in professional journalSähköä metanolipatruunasta
Ranta, Anja; Noponen, Tuula; Granström, Tom; Scotti, Gianmario; Kanninen, Petri; Franssila, Sami; Halme, Aarne2010 in Prosessori (John Wiley&Sons)ISSN: 0357-4121Mikrokanavia biosiruihin
Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto; Baumann, Marc; Leppihalme, Matti; Hokkanen, Ari; Grigoras, Kestutis2004 in Prosessori (John Wiley&Sons)ISSN: 0357-4121Pisaroita piikiekolla
Franssila, Sami2004 in Helsingin Sanomat (John Wiley&Sons)ISSN: 0355-2047Atmospheric pressure photoionization with a microchip heated nebulizer
Kauppila, T.; Östman, P.; Marttila, S.; Ketola, R.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 in Proceedings MicroTAS (John Wiley&Sons)DLC-PDMS-hybrid patterning and surface treatment
Laakso, T.; Soininen, A.; Franssila, S.2004 in Prooceedings MicroTAS (John Wiley&Sons)Microchip atmospheric pressure chemical ionisation-mass spectrometry
Östman, Pekka; Marttila, Seppo; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2004 in Proceedings MicroTAS (John Wiley&Sons)Valtaavatko mikropiirit elektroniikan?
Franssila, Sami1998 in Tiede 2000 (John Wiley&Sons)Tekniikka kuin luonto
Franssila, Sami1996 in Tiede 2000 (John Wiley&Sons)Kuinka pieneksi pii-transistori voidaan kutistaa?
Franssila, Sami; Kuivalainen, Pekka1994 in Fysiikka tänään (John Wiley&Sons)Mikroelektroniikan rajat ja reunaehdot
Franssila, Sami1990 in Tekniikan Tekijät (John Wiley&Sons)Article in professional conference proceedingsCharacterization of Micro Fuel Cells with Black Silicon Gas Diffusion Layer, International Session on Nanomaterials: fabrication, characterisation and applications
Scotti, Gianmario; Kanninen, Petri; Mäkinen, M.; Kallio, Tanja; Franssila, Sami2010 A micro fuel cell stack without interconnect overhead - macro world-like stacks in MEMS, 21st Micromechanics and Micro systems Europe Workshop
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2010 Published development or research reportDetermination of C-reactive protein by hot electron induced electrochemiluminescence on integrated electrode chips
Ylinen-Hinkka, Tiina; Niskanen, Antti J.; Franssila, Sami; Kulmala, Sakari2011 Bioresorbable Polymer Scaffolds by Micromolding in Capillaries
Malin, Minna; Korhonen, Harri; Jokinen, Ville; Aura, Susanna; Leinikka, M.; Franssila, Sami; Seppälä, Jukka2010 Pore formation in inorganic-organic hydrid material by oxygen plasma treatment
Aura, Susanna; Jokinen, Ville; Baumann, Marc; Franssila, Sami2009 SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips for high resolution quadrupole time-of-flight mass spectrometry
Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2009 Fabrication of SOI micro- and nanoelectromechanical devices by focused ion beam doping and deep reactive ion etching
Chekurov, Nikolai; Sainiemi, Lauri; Peltonen, Antti; Tittonen, Ilkka; Franssila, Sami2009 Silicon nanostructere fabrication by focused ion beam doping and cryogenic deep reactive ion etching
Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka2009 Atomic layer deposition on single-walled carbon nanotubes for device application
Grigoras, Kestutis; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.2009 Integrated liquid chomatography-heated nebulizer microchip for mass spectrometry
Haapala, M.; Saarela, S.; Pol, J.; Franssila, S.; Kotiaho, T.; Kostiainen, R.2009 Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices
Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, S.; Haeggström, E.2009 Microchip atmospheric pressure photoionization-mass spectrometry of underivatizeed anabolic steroids
Hintikka, Laura; Haapala, Markus; kuuranne, Tiia; Leinonen, Antti; Saarela, Ville; Franssila, Sami; Kostiainen, Risto2009 New sampling surfaces for desorption atmospheric pressure photoionization-mass spectrometry
Luosujärvi, Laura; Vähänissi, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Kauppila, Tiina2009 Ti02-microchip combined to mass spectrometer for mimcking phase I metabolic reactions
Nissilä, Teemu; Sainiemi, Lauri; Karikko, Mika-Matti; Kemell, Marianna; Ritala, Mikko; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.2009 Electrospray photoionization microchip for mass spectrometry
Nissilä, Teemu; Sainiemi, Lauri; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo2009 TiO2 microreactoe/electrospray ionization/MS for mimcking metabolic phase I reactions
Nissilä, T.; Sainiemi, L.; Karikko, M-M.; Kemell, M.; Ritala, M.; Franssila, S.; Kostiainen, R.; Ketola, R.A.2009 Integrated chip for liquid chromatography separation and atmospheric pressure ionization for mass spectrometry
Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kolari, Kai; Kostiainen, Risto; Franssila, Sami2009 Fabrication of nanoperforated silicon membranes with tunalbe sized high aspect ratio perforations
Sainiemi, Lauri; Viheriälä, Jukka; Laukkanen, Janne; Niemi, Tapio; Franssila, Sami2009 Transparent, flexible and superhydrophobic material based on three-dimesional mushroom-shaped PDMS microstructures
Sainiemi, L.; Jokinen, V.; Aura, S.; Franssila, S.2009 Micro fuel cell with lithographically defined flowfield channels and random patterns for gas diffusion layer
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2009 Dynamic coating of SU-8 microchannels by phospholipid disks to study cell membrane associated interactions
Sikanen, Tiina; Wiedmer, Susanne; Heikkilä, Liisa; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio2009 Fabrication silicon nanoclusters with electric discharge
Suni, Niina; Haapala, Markus; Färm, Elina; Ritala, Mikko; Sainiemi, Lauri; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2009 Fabrication of nanoclustered silicon surface with electric discharge
Suni, N.; Haapala, M.; Färm, E.; Ritala, M.; Sainiemi, L.; Franssila, Sami; Kotiaho, T.; Kostiainen, R.2009 Optical tweezers experiments with a microfluidic laminar flow channel device
Wallin, Anders; Ojala, Heikki; Rahikkala, Antti; Aura, Susanna; Franssila, Sami; Haeggström, Edward; Tuma, Roman2009 Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors
Zavodchikova, M.Y; Nasibulin, A.G; Grigoras, K.; Kauppinen, E.I; Ermolov, V.; Franssila, S.2009 Rapid separation of protein digests on SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips
Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto2008 Suppression of current hysteresis in Carbon Nanotube Network transistors by ALD passivation
Grigoras, Kestutis; Kulmala, Tero; Zavodchikova, Marina; Nasibulin, Albert; Kauppinen, Esko; Ermolov, Vladimir; Franssila, Sami2008 Etching undr the corner, inclined macropores by ICP-RIE
Grigoras, Kestutis; Franssila, Sami2008 Analysis of selective androgen receptor modulators by gas chromatograpgy-microchip atmospheric pressure ionizationmass spectrometry
Haapala, M.; Luosujärvi, L.; Saarela, V.; Franssila, S.; Thevis, M.; Kostiainen, R.2008 Effect of LED spectral shift on vertical resolution in stroboscopic white lifht interferometry
Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, Sami; Häggström, E.2008 Stroboscopic White Light Interferometry for Dynamic Characterization of Capacitive Pressure Sensors
Kassamakov, I.; Hanhijärvi, K.; Aaltonen, J.; Sainiemi, L.; Grigoras, K.; Franssila, S.; Häggström, E.2008 Microchip heated nebulizer as an atmospheric pressure thermospray ionozation source for mass spectrometry
Keski-Rahkonen, P.; Haapala, M; Saarela, V.; Franssila, S.; Kotiaho, T.; Kostiainen, R.; Auriola, S.2008 Pattering of as-deposited, random SWNT network for FET channel application by optical lithography
Kulmala, T.; Grigoras, K.; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.2008 Microfluidic nozzle chips as ionozation sources fof mass spectrometry
Saarela, Ville; Franssila, Sami2008 Fabrication of freestending Al2o3 nanomembranes and bridges
Sainiemi, L.; Grigoras, K.; Franssila, S.2008 High-tempereture silicon microbridge actuator
Sainiemi, Lauri; Grigoras, Kestutis; Fan, Ji; Saarela, Ville; Vähänissi, Ville; Laakso, Aki; Franssila, Sami2008 Hybrid ceramic-polymer microfluidics chips for amino acid, peptide and protein CE separations
Sikanen, Tiina; Aura, Susanna; Heikkilä, Liisa; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2008 Selective surface patterning with electric discharge
Suni, N.; Haapala, M.; Mäkinen, A.; Sainiemi, L.; Franssila, S.; Färm, E.; Puukilainen, E.; Ritala, M.; Yli-Kauhaluoma, J.; Kostiainen, R.2008 Towards High-Throughput Optical Tweezers Experiments
Wallin, A.E; Ojala, H.; Aura, S.; Franssila, S.; Häggström, E.; Tuma, R.2008 Disposable Electrochemiluminescence Sensors of Bacterial Spores
Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Ala-Kleme, Timo; Kulmala, Sakari2008 Detection of bacterial spores on the basis of electrochemiluminescence
Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Kulmala, Sakari; Ala-Kleme, Timo2008 Novel carbon nanotube network deposition techniques for electronic device fabrication
Zavodchikova, M.; Kulmala, T.; Grigoras, K.; Nasibulin, A.G; Anisimov, A.S; Franssila, S.; Ermolov, V.; Kauppinen, E.I2008 High efficiency sample transfer between IEF and SDS-PASGE separations on a miniaturized proteomics chips
Demianova, Z.; Pöysä, Eemeli; Franssila, Sami; Baumann, Marc2007 Microfaricated nebulizer chips for atmospheric pressure photoionization mass spectrometry
Haapala, Markus; Pol, Jaroslav; Kauppila, Tiina; Luosujärvi, Laura; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kotiaho, Tapio; Kostiainen, Risto2007 Microchip APPI Device for Combining GC or LC with MS
Haapala, Markus; Luosujärvi, Laura; Saarela, Ville; Kotiaho, Tapio; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto2007 Conditions for capillary filling in microfabricated channels with hydrophilic and hydrophobic walls
Jokinen, Ville; Franssila, Sami2007 Desorption Atmospheric Pressure Photoionozation
Kauppila, Tiina; Haapala, Markus; Pol, Jaroslav; Arvola, Ville; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kostiainen, Risto2007 Deep plasme etching of glass for fluidic devices
Kolari, K.; Saarela, V.; Franssila, S.2007 Miniature Tunnel Oxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminescence Studies
Niskanen, Antti J.; Ylinen-Hinkka, Tiina; Håkansson, Markus; Suomi, Johanna; Ala-Kleme, Timo; Kulmala, Sakari; Franssila, Sami2007 Micropillar array electrospray chip for analysis of biomolecules
Nissilä, Teemu; Sainiemi, Lauri; Sikanen, Tiina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.2007 On-chip liquid cromatography-atmospheric pressure ionization mass spectrometry
Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kalkkinen, Nisse; Hukka, Marko; Kolari, Kai; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2007 High sensitivity micropillar electrospray ionization chip fabricated of silicon
Sainiemi, Lauri; Nissilä, T.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.; Ketola, R.; Franssila, S.2007 Fully integrated, polymer-based CZE-ESI microchip for high throughput MS analysis
Sikanen, T.; Tuomikoski, S.; Ketola, R.A; Kostiainen, R.; Franssila, S.; Kotiaho, T.2007 Monolithically integrated electrophoresis microchip with electrospray ionization mass spectrometry detection
Tuomikoski, Santeri; Sikanen, Tiina; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2007 Characterization of SU-8 microchannels for electrophoretic separations
Sikanen, Tiina; Korpisalo, Iiro; Tuomikoski, Santeri; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2005 Design and fabrication of integrated SPE-CE device for testosterone detection
Tuomikoski, Santeri; Rovio, Stella; Hokkanen, Ari; Siren, Heli; Franssila, Sami2005 SPE/CE chip in SU-8
Tuomikoski, S.; Franssila, S.; Siren, H.; Rovio, S.; Hokkanen, A.2005 Fabrication of porous membrane filter from p-type silicon
Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.2004 Atmospheric pressure photoionization with a microchip heated nebulizer
Kauppila, T.; Östman, P.; Marttila, S.; Ketola, R.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 DLC-PDMS-hyprid patterning and surface treatment
Laakso, T.; Soininen, A.; Franssila, S.2004 Reusable multi-inlet PDMS fluidic connector
Saarela, Ville; Franssila, Sami2004 Fabrication of 3D SU-8 tips for electrospray ionization mass spectrometry
Tuomikoski, Santeri; Sikanen, Tiina; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2004 Microchip atmospheric pressure chemical ionisation-mass spectrometry
Östman, P.; Marttila, S.; Kotiaho, S.; Franssila, s.; Kostiainen, R.2004 Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectromerty
Östman, P.; Marttila, S.J.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 Droplet based self-assembly of SU-8 microparts
Corral, S.; Zhou, Q.; Albut, A.; Franssila, S.; Tuomikoski, S.; Koivo, H.2003 Microfluidic-to-mass spectrometry interfacing with atmospheric pressure chemical ionization (APCI) microchip
Franssila, S.; Marttila, S.; Östman, P.; Kotiaho, T.; Kostiainen, R.2003 Formation of nanoporous glass layer
Grigoras, K.; Franssila, S.2003 Thickness Evaluation of Si/SiO2 Multilayers by Ellipsometry and Reflection Spectrometry
Ovchinnikov, V.; Franssila, Sami; Jiang, H.; Nasibulin, A.G.; Kauppinen, E.I.2003 Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist
Tuomikoski, S.; Franssila, S.2003 SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot
Tuomikoski, S.; del Corral, C.; Zhou, Q.; Franssila, S.2003 PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters
Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Puolanne, K.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2002 PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters
Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2002 Optical interferometric detection of a mechanical silicon oscillator
Nera, Kaisa; Hahtela, Ossi; Franssila, Sami; Tittonen, Ilkka2002 Luminescence Study of Silicon Nanostructures Prepared by Ion Beam mixing
Ovchinnikov, V.; Sokolov, V.; Franssila, Sami2002 Electrochemiluminoimmunoassay of 2-microglobulin at disposable planar oxide-coated silicon electrodes
Spehar, Anna-Maria; Vainio, Piia; Eskola, J.; Nyman, Annika; Håkansson, Markus; Jiang, Qinghong; Franssila, Sami; Kulmala, Sakari2002 Modified porous silicon surfaces as DIOS-MS sample plates
Tuomikoski, S.; Huikko, K.; Östman, P.; Grigoras, K.; Baumann, M.; Kostiainen, R.; Franssila, S.; Kotiaho, T.2002 Microsystems education in the Nordic region
Grey, F.; Franssila, S.; Furuberg, L.; Hjort, K.2001 Bulk-Micromachined Silicon Microbridges for Infrared Emitters
Grigoras, Kestutis; Juvonen, Tuuli; Nera, Kaisa; Heikkilä, Paula; Franssila, Sami2001 Time resolved electrochemiluminoimmunoassay of hCRP at oxide-coated p-type silicon electrodes
Vainio, P.; Ala-Kleme, Timo; Väre, Leif; Håkansson, Markus; Canty, Philip; Eskola, J.; Franssila, S.; Kulmala, Sakari2001 Deep Silicon Structures by Electrochemical Etching
Grigoras, Kestutis; Niskanen, A.J.; Franssila, Sami2000 Submicron image reversal by liquid phase deposition of oxide
Niskanen, A.J.; Franssila, S.2000 Mikroelektroniikan trendit, teoksessa Elektroniikka- ja sähköalan osaamistarpeet 1997-2002
Franssila, S.1999 Text book or professional handbook or guidebook or dictionaryHandbook of silicon based MEMS materials and technologies
Tilli, Markku; Motooka, Teruaki; Airaksinen, Veli-Matti; Franssila, Sami; Paulasto-Kröckel, Mervi; Lindroos, Veikko2015 ISBN: 978-0-323-29965-7“MEMS lithography” in Handbook of silicon based MEMS materials and technologies
Franssila, Sami; Tuomikoski, Santeri; Lindroos, Veikko; Tilli, Markku; Lehto, Ari; Motooka, Teruaki2010 Mechanical properties of ultrathin ALD Al2O3 films
Rontu, Ville; Hokkanen, Ari; Franssila, Sami2017 Fabrication of superomniphobic nanoserif surfaces
Rontu, Ville; Hoshian, Sasha; Shah, Syed; Jokinen, Ville; Franssila, Sami2016 Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition
Rontu, Ville; Pitkänen, Olli; Heikkinen, Joonas; Ge, Yanling; Kordas, Krisztian; Franssila, Sami; Tuukkanen, Sampo2015 Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water
Berdova, Maria; Rontu, Ville; Sajavaara, Timo; Eskelinen, Antti-Pekka; Franssila, Sami2014
Friction and Wetting Transitions of Magnetic Droplets on Micropillared Superhydrophobic Surfaces
Thiol-ene micropillar array electrospray ionization platform for zeptomole level bioanalysis
Electrochemical Characterization of the Microfabricated Electrochemical Sensor-Array System
Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications
Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition
Inkjet printed silver electrodes on macroporous paper for a paper-based isoelectric focusing device
Robust hybrid elastomer/metal-oxide superhydrophobic surfaces
Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching
UV-ozone patterning of micro-nano fibrillated cellulose (MNFC) with alkylsilane self-assembled monolayers
Cellulose Nanofibril Film as a Piezoelectric Sensor Material
Axonal Kainate Receptors Modulate the Strength of Efferent Connectivity by Regulating Presynaptic Differentiation
Fracture properties of atomic layer deposited aluminum oxide free-standing membranes
Amplified and Localized Photoswitching of TiO2 by Micro- and Nanostructuring
Robust Superhydrophobic Silicon Without a Low Surface-Energy Hydrophobic Coating
Making porous conductive carbon films with unbalanced magnetron sputtering
Interfacing microchip isoelectric focusing with on-chip electrospray ionization mass spectrometry
Shape-Anchored Porous Polymer Monoliths for Integrated Online Solid-Phase Extraction-Microchip Electrophoresis-Electrospray Ionization Mass Spectrometry
Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques
Exceptionally strong and robust millimeter-scale graphenealumina composite membranes
Corrigendum Exceptionally strong and robust millimeterscale graphene-alumina composite (Nanotechnology (2014) 25, (355701))
Enhanced performance of a silicon microfabricated direct methanol fuel cell with PtRu catalysts supported on few-walled carbon nanotubes
MME 2013 Editorial Preface
Calibrating an optical scanner for quality assurance of large area radiation detectors
Self-Propelling and Positioning of Droplets Using Continuous Topography Gradient Surface
Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres
Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres
Simple Stacking Methods for Silicon Micro Fuel Cells
Bulk-Aluminum Microfabrication for Micro Fuel Cells
A micro heat exchanger microfabricated from bulk aluminium
Laser Additive Manufacturing of Stainless Steel Micro Fuel Cells
Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips
Lab-on-a-Chip Reactor Imaging with Unprecedented Chemical Resolution by Hadamard-Encoded Remote Detection NMR
Characterization of thin film adhesion by MEMS shaft-loading blister testing
Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry
Durable superhydrophobicity in embossed CYTOP fluoropolymer micro and nanostructures
A Microfluidic Chip for Axonal Isolation and Electrophysiological Measurements
Cell adhesion and osteogenic differentiation on three-dimensional pillar surfaces
Non-destructive inspection of buried channels and cavities in silicon
Picosecond laser ablation for silicon micro fuel cell fabrication
Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry
Remote detection NMR imaging of gas phase hydrogenation in microfluidic chips
Stroboscopic supercontinuum white-light interferometer for MEMS characterization
A practical guide for the fabrication of microfluidic devices using glass and silicon
Oxygen and nitrogen plasma hydrophilization and hydrophobic recovery of polymers
Rotating multitip micropillar array electrospray ionization-mass spectrometry for rapid analysis and high-throughput screening
A microfabricated micropillar liquid chromatographic chip monolithically integrated with electrospray ionization tip
Integration of carbon felt gas diffusion layers in silicon micro fuel cells
Microchip capillary electrophoresis-electrospray ionization-mass spectrometry of intact proteins using uncoated Ormocomp microchips
Reversible Switching between Superhydrophobic States on a Hierarchically Structured Surface
Porous inorganic-organic hybrid material by oxygen plasma treatment
Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation
Controlled Lateral Spreading and Pinning of Oil Droplets Based on Topography and Chemical Patterning
Engineered droplets for dried droplet solute deposition by mass spectrometric imaging
Feasibility of capillary liquid chromatography-microchip-atmospheric pressure photoionization-mass spectrometry for pesticide analysis in tomato
Superhydrophobic Tracks for Low-Friction, Guided Transport of Water Droplets
Integrated microelectrode hot electron electrochemiluminescent sensor for microfluidic applications
Integrated photocatalytic micropillar nanoreactor electrospray ionization chip for mimicking phase I metabolic reactions
Rapid and sensitive drug metabolism studies by SU-8 microchip capillary electrophoresis-electrospray ionization mass spectrometry
Non-Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication
Microfabricated silicon platform with 60 microfluidic chips for rapid mass spectrometric analysis
Lithography-free fabrication of carbon nanotube network transistors
Mechanically Durable Superhydrophobic Surfaces
Immunoassay of C-reactive protein by hot electron induced electrochemiluminescence using integrated electrodes with hydrophobic sample confinement
Feasibility of capillary liquid chromatography/microchip atmospheric pressure photoionization mass spectrometry in analyzing anabolic steroids in urine samples
Feasability of SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microfluidic chips in the analysis of the human cell lysates
Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching
Integrated liquid chromatography - heated nebulizer microchip for mass spectrometry
Feasibility of gas chromatography-microchip atmospheric pressure photoionization-mass spectrometry in analysis of anabolic steroids
Environmental and food analysis by desorption atmospheric pressure photoionizationmass spectrometry
Deposited dielectrics on metal thin films using silicon and glass substrates for hot electron-induced electrochemiluminescence
Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors
Ionspray Microchip
Silicon nanograss as micro fuel cell gas diffusion layer
Temperature measurements of a glowing microbridge
Optical Temperature Measurements of Silicon Microbridge Emitters
Hybrid Ceramic-Polymers New, Non-Biofouling and Optically Transparent Materials for Microfluidics
Dynamic coating of SU-8 microfluidic chips with phospholipid disks
Fabrication of nanocluster silicon surface with electric discharge and the application in desorption/ionization on silicon-mass spectrometry (DIOS-MS)
UV-enbossed inorganic-organic hybrid nanopillars for bioapplications
The fabrication of silicon nanostructures by local gallium implantation and cryogenic deep reactive ion etching Ion Etching
Etching under the corner-inclined macropores by reactive ion etching
Microchip atmospheric pressure photoionization for analysis of pertoleum by FT-IVR mass spectrometry
Silicon-glass instrumented solid-phase extraction-zone electrophoresis microchip with thin amorphous silicon filn electrodes: perfomance in immunoaffinity analysis
Microstructured surfaces for directional wetting
Surface assisted laser desorption/ionization on two-layered amorhous silicon coated hydrid nanostructures
Microchip heated nebulizer as an atmospheric pressure thermospray ionization source for mass spectrometry
Electronic cooling a submicron-sized metallic beam
Ultrathin tunnel insulator films on silicon for electrochemiluminescence studies
Ultrathin insulating films on silicon foe electrochemiluminescence
Fully polymeric integrated microreactor/electrospray ionozation chip for on-chip digestion and mass spectrometric analysis
Microflidic heated gas jet shape analysis by temperature scanning
Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses
Suspended nanostructured alumina membranes
Carbon nanotube thin film transistors based on aerosol methods
Development and application of a miniaturised gel eletrophoresis device for protein analysis
Investigation of sub-nm ALD aluminum oxide films by plasma assisted etch-through
Coating of nanoporous membranes: atomic layer deposition versus sputtering
Capillary filling conditions of square-shaped microfluidic channels
Complex droplets on chemically modified silicon nanograss
Direct Analysis of Illicit Drugs by Desorption Atmospheric Pressure Photoionization
Deep plasma etching of glass for fluidic devices with different mask materials
Desorption and Ionization Mechanisms in Desorption Atmospheric Pressure Photoionization
Gas chromatography-mass spectrometry of polychlorinated biphenyls using atmospheric pressure chemical ionization and atmospheric pressure photoionization microchip
Fabrication and electrical, mechanical and optical characterization of SOI thermal microbridge actuators
Fabrication and characterization of silicon micropillar array electrospray ionization chip
Fabrication and fluidic characterization of silicon micropillar array electrospray ionization chip
Temperature modeling and measurement of an electrokinetic separation chip
Analytical characterization of microfabricated SU-8 emitters for electrospray ionization mass spectrometry
Selective Surface Patterning with an Electric Discharge in the Fabrication of Microfluidic Structures
Novel carbon nanotube network deposition technique for electronic device fabrication
Thin film transistors based on carbon nanotubes prepared by aerosol technique
Novel hybrid material for microfluidic devices
Mask material effects in cryogenic deep reactive ion etching
Application of ultra-thin aluminum oxide etch mask made by atomic layer deposition technique
Microchip for combining gas chromatography or capillary liquic chromatography with Atmospheric Pressure Photoionization Mass Spectrometry
Desorption Atmospheric Pressure Photoionization
Silicon Micropillar Array Electrospray Chip for Drug and Biomolecule Analysis
Glass microfabricated nebulizer chip for mass spectrometry
Rapid fabrication of high aspect ratio silicon nanopillars for Chemical analysis
Fully microfabricated and integrated, SU-8-based capillary electrophoresis-electrospray ionization microchips for mass spectrometry
Performance of SU-8 microchips as separation devices and comparison
A microfabricated nebulizer for liquid vaporization in chemical analysis
Minimum Proton Affinity for Efficient Ionization with Atmospheric Pressure Desorption /Ionization on Silicon Mass Spectrometry
Design and fabrication of integrated solid-phase extraction-zone electrophoresis microchip
Capillary liquid chromatography-microchip atmospheric pressure chemical ionization-mass spectrometry
Gas Chromatography-Microchip Atmospheric Pressure Chemical Ionization-Mass Spectrometry
Fabrication of porous membrane filter from p-type silicon
Analysis of amphetamines and fentanyls by atmospheric pressure desorption/ionization on silicon mass spectrometry and matrix-assisted laser desorption/ionization mass spectrometry and its application to forensic analysis of drug seizures
Re-usable multi-inlet PDMS fluidic connector
Characterization of SU-8 for electrokinetic microfluidic applications
Fabrication on enclosed SU-8 tips for electrospray ionization spectrometry
Free-standing SU-8 microfluidic chips by adhesive bonding and release etching
Formation of nanoporous glass layer
Atmospheric Pressure Photoionization-Mass Spectrometry with a Microchip Heated Nebulizer
Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist
Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectrometry
Poly(Dimethylsiloxane) Electrospray Devices Fabricated With Diamond-Like Carbon-Poly(Dimethylsiloxane) Coated SU-8 Masters
Feasibility of Atmospheric Pressure Desorption/Ionization on Silicon Mass Spectrometry in Analysis of Drugs
Rapid thermal annealing of Cu/WNx/Si structures
Luminescence study of silicon nanostructures prepared by ion beam mixing
Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS)
Spectrometrie de mass sur silicum poreux: desorption/ionisation sur silicium (DIOS)
Mass spectrometry on porous silicon: Desorption/Ionization on Silicon (DIOS)
PLASMA ETCHED INITIAL PITS FOR MACROPOROUS SILICON STRUCTURES
Plasma etched initial pits for electrochemically etched macroporous silicon structures
Submicron image reversal by liquid phase deposition of oxide
Improved neuron MOS-transistor structures for integrated neural network circuits
Etching through silicon wafer in inductively coupled plasma
Depth and profile control in plasma etched MEMS structures
Pattern shape effects and artefacts in deep silicon etching
Deep silicon etching in inductively coupled plasma reactor for MEMS
High-precision neuron MOSFET structures
Reduction of molybdenum resistivity by a seed layer of Ti-W
Hospital mouth cleaning aids may cause dental erosion
Plasma etching in microdevice fabrication: thin film and process integration aspects.
Linewidth uniformity and etch rate uniformity in refractory metal plasma etching
Tungsten silicide formation from sequentially sputtered tungsten and silicon films
Microtechnologies to fuel neurobiological research with nanometer precision
Analysis of selective androgen receptor modulators by gas chromatography-microchip atmospheric pressure photoionization-mass spectrometry
Microchip technology in mass spectrometry
Book section, Chapters in research booksEtching Techniques for Superhydrophobic Surface Fabrication
Franssila, Sami2017 in RSC Soft Matter (ROYAL SOCIETY OF CHEMISTRY)ISBN: 978-1-78262-154-6MEMS lithography
Franssila, Sami; Tuomikoski, Santeri2015 ISBN: 9780323299657Microfluidics and BioMEMS in silicon
Franssila, Sami; Davis, Cristina; LeVasseur, Michael K.; Cao, Zhu; Yobas, Levent2015 ISBN: 978-0-323-29965-7Deep Reactive Ion Etching
Lärmer, Franz; Franssila, Sami; Sainiemi, Lauri; Kolari, Kai2015 ISBN: 978-0-323-29965-7Deep Reactive Ion Etching
Lärmer, Franz; Franssila, Sami; Sainiemi, Lauri; Kolari, Kai2010 ISBN: 978-081551594-4an entry in Encyclopedia of Micro-and nanofluidics
Franssila, Sami; Sainiemi, Lauri2008 Conference proceedingsNovel nanostructure replication process for robust superhydrophobic surfaces
Hoshian, Sasha; Jokinen, Ville; Franssila, Sami2016 ISBN: 9781509019731ISSN: 1084-6999Microfluidics with on-line mass spectrometric methods for investigation of reaction mechanisms
Nilsson, Sofia M E; Aumüller, Ingo; Kiriazis, Alexandros; Boije af Gennäs, Gustav; Haapala, Markus; Scotti, Gianmario; Franssila, Sami; Yli-Kauhaluoma, Jari; Kotiaho, Tapio2015 ISBN: 9780979806483Piezoelectric sensitivity measurement for nanofibrillated cellulose film sensors
Rajala, Satu; Vuoriluoto, Maija; Rojas, Orlando; Franssila, Sami; Tuukkanen, Sampo2015 ISSN: 0000-0000Micro-writing under water droplet using photo-switchable titanium oxide on nanocellulose coated micro-hoodoos
Hoshian, Sasha; Jokinen, Ville; Hjort, Klas; Ras, Robin H A; Franssila, Sami2014 ISBN: 9780979806476Characterization of nano-coated micro- and nanostructures by pushing
Liimatainen, Ville; Venäläinen, Janne; Koverola, Mikko; Lyytinen, Jussi; Rontu, Ville; Berdova, Maria; Koskinen, Jari; Franssila, Sami; Zhou, Quan2014 A micro heat exchanger microfabricated from bulk aluminium Journal of Physics
Scotti, Gianmario; Franssila, Sami2014 Printable and disposable supercapacitor from nanocellulose and carbon nanotubes
Tuukkanen, S.; Lehtimäki, S.; Jahangir, F.; Eskelinen, A.-P.; Lupo, D.; Franssila, S.2014 ISBN: 9781479940264Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry
Heikkinen, V.; Hanhijärvi, K.; Aaltonen, J.; Grigoras, K.; Kassamakov, I.; Franssila, S.; Haeggstrom, E.2012 ISBN: 978-0-8194-8893-0ISSN: 0277-786XNon-destructive 3D measurement of microchannels
Heikkinen, V.; Nolvi, A.; Kassamakov, I.; Grigoras, K.; Franssila, S.; Haeggstrom, E.2012 ISBN: 978-0-8194-9183-1ISSN: 0277-786XIR-SWLI for subsurface imaging of large MEMS structures
Nolvi, A.; Heikkinen, V.; Kassamakov, I.; Aaltonen, J.; Ylitalo, T.; Saresoja, O.; Berdova, M.; Franssila, S.; Haeggstrom, E.2012 ISBN: 978-0-8194-9122-0ISSN: 0277-786XSIMULTANEOUS TIRF MICROSCOPY AND OPTICAL TRAPPING FOR SINGLE MOLECULE EXPERIMENTS
Hanhijärvi, Kalle; Ojala, Heikki; Wallin, Anders E.; Ziedaite, Gabija; Aura, Susanna; Franssila, Sami; Bamford, Dennis H.; Hæggström, Edward2011 Infrared Scanning White Light Interferometry Using a Solid State Light Source
Heikkinen, V.; Aaltonen, J.; Wälchli, B.; Räikkönen, H.; Kassamakov, I; Cholakova, T.; Grigorias, K.; Franssila, S.; Kakanakov, R.; Hæggström, E.2011 Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control
Heikkinen, V.; Hanhijärvi, K.; Aaltonen, J.; Räikkönen, H.; Wälchli, B.; Paulin, T.; Kassamakov, I.; Grigoras, K.; Franssila, S.; Hæggström, E.2011 MINIATURIZED LIQUID-LIQUID EXTRACTION SYSTEM BASED ON CONTROLLED AQUEOUS AND ORGANIC DROPLETS
Jokinen, V.; Sikanen, T.; Kostiainen, R.; Franssila, Sami2011 RAPID BIOMOLECULE ANALYSIS USING TWO-DIMENSIONAL ELECTROPHORESIS-ELECTROSPRAY IONIZATION MICROCHIP
Nordman, Nina; Sikanen, Tiina; Aura, Susanna; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2011 INTEGRATED MULTI-TIP PHOTOCATALYTIC NANOREACTOR ELECTROSPRAY CHIP FOR PHOSPHOPEPTIDE ENRICHMENT AND OXIDATION
Ruokolainen, Miina; Sikanen, Tiina; Sainiemi, Lauri; Nissilä, Teemu; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio2011 MICROFABRICATED ELECTROSPRAY IONIZATION PLATFORM WITH 60 TIPS FOR HIGH THROUGHPUT MASS SPECTROMETRIC ANALYSES
Sainiemi, Lauri; Nissilä, Teemu; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto2011 Velcro-type attachment of black silicon and carbon cloth for improved galvanic contact in micro fuel cells
Scotti, Gianmario; Mäkinen, M.; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2011 Refractive index of silicon with various doping levels at high temperatures
Shpak, M.; Sainiemi, L.; Kärhä, P.; Heinonen, M.; Franssila, S.; Ikonen, E.2011 INTACT PROTEIN SEPARATIONS WITH INHERENTLY BIOCOMPATIBLE ORMOCOMP SEPARATION CHIP WITH INTEGRATED ELECTROSPRAY IONIZATION EMITTER
Sikanen, Tiina; Aura, Susanna; Barrios-Lopez, Brianda; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2011 SUPERHYDROPHOBIC PERFLUOROPOLYMER MICRO- AND NANOSTRUCTURES BY EMBOSSING
Suvanto, P.; Jokinen, V.; Franssila, Sami2011 Combined photolithography and embossing for fabrication of multilevel, free standing microfluidic structures
Aura, Susanna; Franssila, Sami2010 Applications of focused ion beam in nanofabrications
Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka2009 Localized gallium doping and cryogenic deep reactive ion etching in fabrication of silicon nanostructures
Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka2009 in Materials Research Society Symposium Proceedings (SPIE)ISBN: 978-1-60511-154-4ISSN: 0272-9172Electronic cooling of submicron-sized metallic beams
Muhonen, Juha; Niskanen, Antti; Meschke, Matthias; Pashkin, Yu.A.; Tsai, J.S.; Sainiemi, L.; Franssila, S.; Pekola, Jukka2009 ISBN: 978-951-22-9793-1ISSN: 1254-5667Symmetric silicon micro fuel cell with porous eletrodes
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2009 Fully microfabricated polymer-based microfludic chips for bioanalysis
Sikanen, T.; Franssila, S.; Aura, S.; Tuomikoski, S.; Kotiaho, T.; Kostiainen, R.2009 Application of polymer microfluidic chips to the characterization of recombinant human erytropoietin by electrospray ionization mass spectrometry
Sikanen, Tiina; Aura, Susanna; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2009 Materials and technologies foe analitical microsystems
Franssila, Sami2008 Desorption atmospheric pressure photoionization-mass spectrometry in drug analysis
Luosujärvi, L.; Arvola, V; Haapala, M; Pol, J.; Saarela, V.; Franssila, S.; Kostiainen, R.; Kotiaho, T.; Kauppila, T.2008 Lidless SU-8 polymer electrospray ionization chip
Sainiemi, L.; Ketola, R.; Franssila, S.2008 Microchip-based CE-ESI/MS analysis of biological molecules
Sikanen, T.; Tuomikoski, S.; Ketola, R.A; Kostianen, R.; Franssila, S.; Kotiaho, T.2008 Novel hybrid material for microfluidic devices
Aura, Susanna; Sikanen, Tiina; Kotiaho, Tapio; Franssila, Sami2007 ISBN: 1-4244-0842-3Coating of nanoporous membranes atomic layer deposition versus sputtering
Grigoras, K.; Sirviö, S.; Airaksinen, V-M; Franssila, S.2007 Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask
Mäkelä, J.M.; Keskinen, H.; Aromaa, M.; Sainiemi, L.; Luosujärvi, L.; Kotiaho, T.; Franssila, S.2007 Atomic layer deposition of Al2O3, TiO2 and ZnO films into high aspect ratio pores
Sirviö, Sari; Sainiemi, L.; Franssila, S.; Grigoras, K.2007 Microfluidic channels from photoactive hybrid material ORMOCER[R]
Aura, Susanna; Franssila, Sami2006 Development of analytical methods for analysis of drug and environmental compounds using gas chromatography-microchip APCI-MS
Franssila, Sami; Luosujärvi, Laura; Haapala, Markus; Östman, Pekka; Kostiainen, Risto; Grigoras, Kestutis; Ketola, Raimo; Kotiaho, Tapio2006 Automated 2D analysis on a proteome microchip
Franssila, Sami; Demianova, Zuzana; Shimmo, Masahiko; Pöysä, Eemeli; Kotiaho, Tapio; Kostiainen, Risto; Baumann, Marc2006 Application of ultra-thin aluminium oxide mask made by atomic layer deposition technique
Grigoras, kestutis; Airaksinen, Veli-Matti; Franssila, Sami; Sainiemi, Lauri; Tiilikainen, Jouni; Säynätjoki, Antti2006 Spontaneous microflow of micropillar array electrospray electrospray ionization microchip
Nissilä, T.; Sainiemi, L.; Sikanen, T.; Kotiaho, T.; Franssila, S.; Kostiainen, R.; Ketola, R.A.2006 Thermal characterization of a microfluidic nebulizer
Saarela, Ville; Haapala, Markus; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2006 Mask material effects in cryogenic DRIE
Sainiemi, Lauri; Franssila, Sami2006 Developed of a microdevice for 2-dimensional gel electrophoresis
Demianova, Zuzana; Shimmo, Masahiko; Pöysä, Eemeli; Kotiaho, Tapani; Kostiainen, Risto; Franssila, Sami; Bauman, Marc2005 The effect of physical properties of selected molecules on desorption/ionization on porous silicon-mass spectrometry
Franssila, Sami; Östman, Pekka; Kostiainen, Risto; Ketola, Raimo; Kotiaho, Tapio2005 Infrared thermal imaging of microfluidic chips
Franssila, Sami; Grigoras, Kestutis; Marttila, Seppo; Lehtiniemi, Reijo; Fager, Carl-Magnus; Manninen, Jorma2005 Characterization of SU-8 polymer for electrophoretic separaions
Sikanen, T.; Korpisalo, S.; Tuomikoski, S.; Ketola, R.A.; Kostiainen, R.; Franssila, Sami; Kotiaho, T.2005 Fabrication and optimization of enclosed SU-8 tips for electrospray ionization mass spectrometry
Tuomikoski, Santeri; Sikanen, Tiina; Kostiainen, Risto; Franssila, Sami2005 Electrophoretic separations of pharmaceutical compounds in microchannels composed of SU-8 polymer
Zwinger, T.; Sikanen, T.; Tuomikoski, S.; Ketola, R.A.; Kostiainen, R.; Franssila, S.; Kotiaho, T.2005 Microfluidic Nebulizer Chip for Mass Spectrometry
Franssila, S.; Östman, P.; Marttila, S.; Kotiaho, T.; Kostiainen, R.2004 Fabrication of porous membrane filter from p-type silicon
Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.2004 Fabrication of microfluidic devices from SU-8
Tuomikoski, Santeri; Franssila, Sami2004 Droplet based self-assembly of SU-8 microparts
del Corral, Carlos; Zhou, Quan; Albut, Aurelian; Chang, Bo; Franssila, Sami; Tuomikoski, Santeri; Koivo, Heikki N.2003 Microglow: a microsystems laboratory course
Franssila, S.; Tittonen, I.; Grigoras, K.; Juvonen, T.; Nera, K.; Heikkilä, P.2002 Microsystems and nanotechnology in the Nordic region
Franssila, S.; Furuberg, L.; Enoksson, P.; Grey, F.; Larsen, A.2002 Silicon devices for chemistry and lifesciences
Franssila, Sami2002 Micromechanics in silicon
Juvonen, T.; Poulsen, J.; Franssila, S.2002 Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS MS)
Tuomikoski, S.; Huikko, K.; Grigoras, K.; Niskanen, A.; Kotiaho, T.; Kostiainen, R.; Franssila, S.; Baumann, M.2001 Loading effects in deep silicon etching
Karttunen, J.; Kiihamäki, J.; Franssila, S.2000 Etching through silicon wafer in inductively coupled plasma
Franssila, S.; Kiihamäki, J.; Karttunen, J.1999 Depth and profile control in plasma etched MEMS structures
Kiihamäki, J.; Kattelus, H.; Franssila, S.1999 Variable Threshold (MOS) - Transistor for Integrated Neural Network Circuits
Rantala, A.; Franssila, S.; Kaski, K.; Lampinen, J.; Åberg, M.1997 Non-refereed scientific articles
Unrefereed conference proceedingsSilicon Micropillar Electrospray Ionization Chip Platform for Biomolecular Analysis in the Aqueous Phase
Hirvonen, Saara; Lipponen, Katriina; Jokinen, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio2015 ISBN: 978-0-9798064-8-3ISSN: 1556-5904Scientific books (monographs)
BookIntroduction to Microfabrication
Franssila, Sami2004 ISBN: 0-470-85105-8Publications intended for professional communities
Article in professional journalSähköä metanolipatruunasta
Ranta, Anja; Noponen, Tuula; Granström, Tom; Scotti, Gianmario; Kanninen, Petri; Franssila, Sami; Halme, Aarne2010 in Prosessori (John Wiley&Sons)ISSN: 0357-4121Mikrokanavia biosiruihin
Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto; Baumann, Marc; Leppihalme, Matti; Hokkanen, Ari; Grigoras, Kestutis2004 in Prosessori (John Wiley&Sons)ISSN: 0357-4121Pisaroita piikiekolla
Franssila, Sami2004 in Helsingin Sanomat (John Wiley&Sons)ISSN: 0355-2047Atmospheric pressure photoionization with a microchip heated nebulizer
Kauppila, T.; Östman, P.; Marttila, S.; Ketola, R.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 in Proceedings MicroTAS (John Wiley&Sons)DLC-PDMS-hybrid patterning and surface treatment
Laakso, T.; Soininen, A.; Franssila, S.2004 in Prooceedings MicroTAS (John Wiley&Sons)Microchip atmospheric pressure chemical ionisation-mass spectrometry
Östman, Pekka; Marttila, Seppo; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2004 in Proceedings MicroTAS (John Wiley&Sons)Valtaavatko mikropiirit elektroniikan?
Franssila, Sami1998 in Tiede 2000 (John Wiley&Sons)Tekniikka kuin luonto
Franssila, Sami1996 in Tiede 2000 (John Wiley&Sons)Kuinka pieneksi pii-transistori voidaan kutistaa?
Franssila, Sami; Kuivalainen, Pekka1994 in Fysiikka tänään (John Wiley&Sons)Mikroelektroniikan rajat ja reunaehdot
Franssila, Sami1990 in Tekniikan Tekijät (John Wiley&Sons)Article in professional conference proceedingsCharacterization of Micro Fuel Cells with Black Silicon Gas Diffusion Layer, International Session on Nanomaterials: fabrication, characterisation and applications
Scotti, Gianmario; Kanninen, Petri; Mäkinen, M.; Kallio, Tanja; Franssila, Sami2010 A micro fuel cell stack without interconnect overhead - macro world-like stacks in MEMS, 21st Micromechanics and Micro systems Europe Workshop
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2010 Published development or research reportDetermination of C-reactive protein by hot electron induced electrochemiluminescence on integrated electrode chips
Ylinen-Hinkka, Tiina; Niskanen, Antti J.; Franssila, Sami; Kulmala, Sakari2011 Bioresorbable Polymer Scaffolds by Micromolding in Capillaries
Malin, Minna; Korhonen, Harri; Jokinen, Ville; Aura, Susanna; Leinikka, M.; Franssila, Sami; Seppälä, Jukka2010 Pore formation in inorganic-organic hydrid material by oxygen plasma treatment
Aura, Susanna; Jokinen, Ville; Baumann, Marc; Franssila, Sami2009 SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips for high resolution quadrupole time-of-flight mass spectrometry
Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2009 Fabrication of SOI micro- and nanoelectromechanical devices by focused ion beam doping and deep reactive ion etching
Chekurov, Nikolai; Sainiemi, Lauri; Peltonen, Antti; Tittonen, Ilkka; Franssila, Sami2009 Silicon nanostructere fabrication by focused ion beam doping and cryogenic deep reactive ion etching
Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka2009 Atomic layer deposition on single-walled carbon nanotubes for device application
Grigoras, Kestutis; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.2009 Integrated liquid chomatography-heated nebulizer microchip for mass spectrometry
Haapala, M.; Saarela, S.; Pol, J.; Franssila, S.; Kotiaho, T.; Kostiainen, R.2009 Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices
Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, S.; Haeggström, E.2009 Microchip atmospheric pressure photoionization-mass spectrometry of underivatizeed anabolic steroids
Hintikka, Laura; Haapala, Markus; kuuranne, Tiia; Leinonen, Antti; Saarela, Ville; Franssila, Sami; Kostiainen, Risto2009 New sampling surfaces for desorption atmospheric pressure photoionization-mass spectrometry
Luosujärvi, Laura; Vähänissi, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Kauppila, Tiina2009 Ti02-microchip combined to mass spectrometer for mimcking phase I metabolic reactions
Nissilä, Teemu; Sainiemi, Lauri; Karikko, Mika-Matti; Kemell, Marianna; Ritala, Mikko; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.2009 Electrospray photoionization microchip for mass spectrometry
Nissilä, Teemu; Sainiemi, Lauri; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo2009 TiO2 microreactoe/electrospray ionization/MS for mimcking metabolic phase I reactions
Nissilä, T.; Sainiemi, L.; Karikko, M-M.; Kemell, M.; Ritala, M.; Franssila, S.; Kostiainen, R.; Ketola, R.A.2009 Integrated chip for liquid chromatography separation and atmospheric pressure ionization for mass spectrometry
Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kolari, Kai; Kostiainen, Risto; Franssila, Sami2009 Fabrication of nanoperforated silicon membranes with tunalbe sized high aspect ratio perforations
Sainiemi, Lauri; Viheriälä, Jukka; Laukkanen, Janne; Niemi, Tapio; Franssila, Sami2009 Transparent, flexible and superhydrophobic material based on three-dimesional mushroom-shaped PDMS microstructures
Sainiemi, L.; Jokinen, V.; Aura, S.; Franssila, S.2009 Micro fuel cell with lithographically defined flowfield channels and random patterns for gas diffusion layer
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2009 Dynamic coating of SU-8 microchannels by phospholipid disks to study cell membrane associated interactions
Sikanen, Tiina; Wiedmer, Susanne; Heikkilä, Liisa; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio2009 Fabrication silicon nanoclusters with electric discharge
Suni, Niina; Haapala, Markus; Färm, Elina; Ritala, Mikko; Sainiemi, Lauri; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2009 Fabrication of nanoclustered silicon surface with electric discharge
Suni, N.; Haapala, M.; Färm, E.; Ritala, M.; Sainiemi, L.; Franssila, Sami; Kotiaho, T.; Kostiainen, R.2009 Optical tweezers experiments with a microfluidic laminar flow channel device
Wallin, Anders; Ojala, Heikki; Rahikkala, Antti; Aura, Susanna; Franssila, Sami; Haeggström, Edward; Tuma, Roman2009 Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors
Zavodchikova, M.Y; Nasibulin, A.G; Grigoras, K.; Kauppinen, E.I; Ermolov, V.; Franssila, S.2009 Rapid separation of protein digests on SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips
Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto2008 Suppression of current hysteresis in Carbon Nanotube Network transistors by ALD passivation
Grigoras, Kestutis; Kulmala, Tero; Zavodchikova, Marina; Nasibulin, Albert; Kauppinen, Esko; Ermolov, Vladimir; Franssila, Sami2008 Etching undr the corner, inclined macropores by ICP-RIE
Grigoras, Kestutis; Franssila, Sami2008 Analysis of selective androgen receptor modulators by gas chromatograpgy-microchip atmospheric pressure ionizationmass spectrometry
Haapala, M.; Luosujärvi, L.; Saarela, V.; Franssila, S.; Thevis, M.; Kostiainen, R.2008 Effect of LED spectral shift on vertical resolution in stroboscopic white lifht interferometry
Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, Sami; Häggström, E.2008 Stroboscopic White Light Interferometry for Dynamic Characterization of Capacitive Pressure Sensors
Kassamakov, I.; Hanhijärvi, K.; Aaltonen, J.; Sainiemi, L.; Grigoras, K.; Franssila, S.; Häggström, E.2008 Microchip heated nebulizer as an atmospheric pressure thermospray ionozation source for mass spectrometry
Keski-Rahkonen, P.; Haapala, M; Saarela, V.; Franssila, S.; Kotiaho, T.; Kostiainen, R.; Auriola, S.2008 Pattering of as-deposited, random SWNT network for FET channel application by optical lithography
Kulmala, T.; Grigoras, K.; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.2008 Microfluidic nozzle chips as ionozation sources fof mass spectrometry
Saarela, Ville; Franssila, Sami2008 Fabrication of freestending Al2o3 nanomembranes and bridges
Sainiemi, L.; Grigoras, K.; Franssila, S.2008 High-tempereture silicon microbridge actuator
Sainiemi, Lauri; Grigoras, Kestutis; Fan, Ji; Saarela, Ville; Vähänissi, Ville; Laakso, Aki; Franssila, Sami2008 Hybrid ceramic-polymer microfluidics chips for amino acid, peptide and protein CE separations
Sikanen, Tiina; Aura, Susanna; Heikkilä, Liisa; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2008 Selective surface patterning with electric discharge
Suni, N.; Haapala, M.; Mäkinen, A.; Sainiemi, L.; Franssila, S.; Färm, E.; Puukilainen, E.; Ritala, M.; Yli-Kauhaluoma, J.; Kostiainen, R.2008 Towards High-Throughput Optical Tweezers Experiments
Wallin, A.E; Ojala, H.; Aura, S.; Franssila, S.; Häggström, E.; Tuma, R.2008 Disposable Electrochemiluminescence Sensors of Bacterial Spores
Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Ala-Kleme, Timo; Kulmala, Sakari2008 Detection of bacterial spores on the basis of electrochemiluminescence
Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Kulmala, Sakari; Ala-Kleme, Timo2008 Novel carbon nanotube network deposition techniques for electronic device fabrication
Zavodchikova, M.; Kulmala, T.; Grigoras, K.; Nasibulin, A.G; Anisimov, A.S; Franssila, S.; Ermolov, V.; Kauppinen, E.I2008 High efficiency sample transfer between IEF and SDS-PASGE separations on a miniaturized proteomics chips
Demianova, Z.; Pöysä, Eemeli; Franssila, Sami; Baumann, Marc2007 Microfaricated nebulizer chips for atmospheric pressure photoionization mass spectrometry
Haapala, Markus; Pol, Jaroslav; Kauppila, Tiina; Luosujärvi, Laura; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kotiaho, Tapio; Kostiainen, Risto2007 Microchip APPI Device for Combining GC or LC with MS
Haapala, Markus; Luosujärvi, Laura; Saarela, Ville; Kotiaho, Tapio; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto2007 Conditions for capillary filling in microfabricated channels with hydrophilic and hydrophobic walls
Jokinen, Ville; Franssila, Sami2007 Desorption Atmospheric Pressure Photoionozation
Kauppila, Tiina; Haapala, Markus; Pol, Jaroslav; Arvola, Ville; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kostiainen, Risto2007 Deep plasme etching of glass for fluidic devices
Kolari, K.; Saarela, V.; Franssila, S.2007 Miniature Tunnel Oxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminescence Studies
Niskanen, Antti J.; Ylinen-Hinkka, Tiina; Håkansson, Markus; Suomi, Johanna; Ala-Kleme, Timo; Kulmala, Sakari; Franssila, Sami2007 Micropillar array electrospray chip for analysis of biomolecules
Nissilä, Teemu; Sainiemi, Lauri; Sikanen, Tiina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.2007 On-chip liquid cromatography-atmospheric pressure ionization mass spectrometry
Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kalkkinen, Nisse; Hukka, Marko; Kolari, Kai; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2007 High sensitivity micropillar electrospray ionization chip fabricated of silicon
Sainiemi, Lauri; Nissilä, T.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.; Ketola, R.; Franssila, S.2007 Fully integrated, polymer-based CZE-ESI microchip for high throughput MS analysis
Sikanen, T.; Tuomikoski, S.; Ketola, R.A; Kostiainen, R.; Franssila, S.; Kotiaho, T.2007 Monolithically integrated electrophoresis microchip with electrospray ionization mass spectrometry detection
Tuomikoski, Santeri; Sikanen, Tiina; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2007 Characterization of SU-8 microchannels for electrophoretic separations
Sikanen, Tiina; Korpisalo, Iiro; Tuomikoski, Santeri; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2005 Design and fabrication of integrated SPE-CE device for testosterone detection
Tuomikoski, Santeri; Rovio, Stella; Hokkanen, Ari; Siren, Heli; Franssila, Sami2005 SPE/CE chip in SU-8
Tuomikoski, S.; Franssila, S.; Siren, H.; Rovio, S.; Hokkanen, A.2005 Fabrication of porous membrane filter from p-type silicon
Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.2004 Atmospheric pressure photoionization with a microchip heated nebulizer
Kauppila, T.; Östman, P.; Marttila, S.; Ketola, R.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 DLC-PDMS-hyprid patterning and surface treatment
Laakso, T.; Soininen, A.; Franssila, S.2004 Reusable multi-inlet PDMS fluidic connector
Saarela, Ville; Franssila, Sami2004 Fabrication of 3D SU-8 tips for electrospray ionization mass spectrometry
Tuomikoski, Santeri; Sikanen, Tiina; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2004 Microchip atmospheric pressure chemical ionisation-mass spectrometry
Östman, P.; Marttila, S.; Kotiaho, S.; Franssila, s.; Kostiainen, R.2004 Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectromerty
Östman, P.; Marttila, S.J.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 Droplet based self-assembly of SU-8 microparts
Corral, S.; Zhou, Q.; Albut, A.; Franssila, S.; Tuomikoski, S.; Koivo, H.2003 Microfluidic-to-mass spectrometry interfacing with atmospheric pressure chemical ionization (APCI) microchip
Franssila, S.; Marttila, S.; Östman, P.; Kotiaho, T.; Kostiainen, R.2003 Formation of nanoporous glass layer
Grigoras, K.; Franssila, S.2003 Thickness Evaluation of Si/SiO2 Multilayers by Ellipsometry and Reflection Spectrometry
Ovchinnikov, V.; Franssila, Sami; Jiang, H.; Nasibulin, A.G.; Kauppinen, E.I.2003 Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist
Tuomikoski, S.; Franssila, S.2003 SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot
Tuomikoski, S.; del Corral, C.; Zhou, Q.; Franssila, S.2003 PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters
Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Puolanne, K.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2002 PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters
Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2002 Optical interferometric detection of a mechanical silicon oscillator
Nera, Kaisa; Hahtela, Ossi; Franssila, Sami; Tittonen, Ilkka2002 Luminescence Study of Silicon Nanostructures Prepared by Ion Beam mixing
Ovchinnikov, V.; Sokolov, V.; Franssila, Sami2002 Electrochemiluminoimmunoassay of 2-microglobulin at disposable planar oxide-coated silicon electrodes
Spehar, Anna-Maria; Vainio, Piia; Eskola, J.; Nyman, Annika; Håkansson, Markus; Jiang, Qinghong; Franssila, Sami; Kulmala, Sakari2002 Modified porous silicon surfaces as DIOS-MS sample plates
Tuomikoski, S.; Huikko, K.; Östman, P.; Grigoras, K.; Baumann, M.; Kostiainen, R.; Franssila, S.; Kotiaho, T.2002 Microsystems education in the Nordic region
Grey, F.; Franssila, S.; Furuberg, L.; Hjort, K.2001 Bulk-Micromachined Silicon Microbridges for Infrared Emitters
Grigoras, Kestutis; Juvonen, Tuuli; Nera, Kaisa; Heikkilä, Paula; Franssila, Sami2001 Time resolved electrochemiluminoimmunoassay of hCRP at oxide-coated p-type silicon electrodes
Vainio, P.; Ala-Kleme, Timo; Väre, Leif; Håkansson, Markus; Canty, Philip; Eskola, J.; Franssila, S.; Kulmala, Sakari2001 Deep Silicon Structures by Electrochemical Etching
Grigoras, Kestutis; Niskanen, A.J.; Franssila, Sami2000 Submicron image reversal by liquid phase deposition of oxide
Niskanen, A.J.; Franssila, S.2000 Mikroelektroniikan trendit, teoksessa Elektroniikka- ja sähköalan osaamistarpeet 1997-2002
Franssila, S.1999 Text book or professional handbook or guidebook or dictionaryHandbook of silicon based MEMS materials and technologies
Tilli, Markku; Motooka, Teruaki; Airaksinen, Veli-Matti; Franssila, Sami; Paulasto-Kröckel, Mervi; Lindroos, Veikko2015 ISBN: 978-0-323-29965-7“MEMS lithography” in Handbook of silicon based MEMS materials and technologies
Franssila, Sami; Tuomikoski, Santeri; Lindroos, Veikko; Tilli, Markku; Lehto, Ari; Motooka, Teruaki2010 Mechanical properties of ultrathin ALD Al2O3 films
Rontu, Ville; Hokkanen, Ari; Franssila, Sami2017 Fabrication of superomniphobic nanoserif surfaces
Rontu, Ville; Hoshian, Sasha; Shah, Syed; Jokinen, Ville; Franssila, Sami2016 Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition
Rontu, Ville; Pitkänen, Olli; Heikkinen, Joonas; Ge, Yanling; Kordas, Krisztian; Franssila, Sami; Tuukkanen, Sampo2015 Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water
Berdova, Maria; Rontu, Ville; Sajavaara, Timo; Eskelinen, Antti-Pekka; Franssila, Sami2014
Etching Techniques for Superhydrophobic Surface Fabrication
MEMS lithography
Microfluidics and BioMEMS in silicon
Deep Reactive Ion Etching
Deep Reactive Ion Etching
an entry in Encyclopedia of Micro-and nanofluidics
Novel nanostructure replication process for robust superhydrophobic surfaces
Microfluidics with on-line mass spectrometric methods for investigation of reaction mechanisms
Piezoelectric sensitivity measurement for nanofibrillated cellulose film sensors
Micro-writing under water droplet using photo-switchable titanium oxide on nanocellulose coated micro-hoodoos
Characterization of nano-coated micro- and nanostructures by pushing
A micro heat exchanger microfabricated from bulk aluminium Journal of Physics
Printable and disposable supercapacitor from nanocellulose and carbon nanotubes
Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry
Non-destructive 3D measurement of microchannels
IR-SWLI for subsurface imaging of large MEMS structures
SIMULTANEOUS TIRF MICROSCOPY AND OPTICAL TRAPPING FOR SINGLE MOLECULE EXPERIMENTS
Infrared Scanning White Light Interferometry Using a Solid State Light Source
Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control
MINIATURIZED LIQUID-LIQUID EXTRACTION SYSTEM BASED ON CONTROLLED AQUEOUS AND ORGANIC DROPLETS
RAPID BIOMOLECULE ANALYSIS USING TWO-DIMENSIONAL ELECTROPHORESIS-ELECTROSPRAY IONIZATION MICROCHIP
INTEGRATED MULTI-TIP PHOTOCATALYTIC NANOREACTOR ELECTROSPRAY CHIP FOR PHOSPHOPEPTIDE ENRICHMENT AND OXIDATION
MICROFABRICATED ELECTROSPRAY IONIZATION PLATFORM WITH 60 TIPS FOR HIGH THROUGHPUT MASS SPECTROMETRIC ANALYSES
Velcro-type attachment of black silicon and carbon cloth for improved galvanic contact in micro fuel cells
Refractive index of silicon with various doping levels at high temperatures
INTACT PROTEIN SEPARATIONS WITH INHERENTLY BIOCOMPATIBLE ORMOCOMP SEPARATION CHIP WITH INTEGRATED ELECTROSPRAY IONIZATION EMITTER
SUPERHYDROPHOBIC PERFLUOROPOLYMER MICRO- AND NANOSTRUCTURES BY EMBOSSING
Combined photolithography and embossing for fabrication of multilevel, free standing microfluidic structures
Applications of focused ion beam in nanofabrications
Localized gallium doping and cryogenic deep reactive ion etching in fabrication of silicon nanostructures
Electronic cooling of submicron-sized metallic beams
Symmetric silicon micro fuel cell with porous eletrodes
Fully microfabricated polymer-based microfludic chips for bioanalysis
Application of polymer microfluidic chips to the characterization of recombinant human erytropoietin by electrospray ionization mass spectrometry
Materials and technologies foe analitical microsystems
Desorption atmospheric pressure photoionization-mass spectrometry in drug analysis
Lidless SU-8 polymer electrospray ionization chip
Microchip-based CE-ESI/MS analysis of biological molecules
Novel hybrid material for microfluidic devices
Coating of nanoporous membranes atomic layer deposition versus sputtering
Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask
Atomic layer deposition of Al2O3, TiO2 and ZnO films into high aspect ratio pores
Microfluidic channels from photoactive hybrid material ORMOCER[R]
Development of analytical methods for analysis of drug and environmental compounds using gas chromatography-microchip APCI-MS
Automated 2D analysis on a proteome microchip
Application of ultra-thin aluminium oxide mask made by atomic layer deposition technique
Spontaneous microflow of micropillar array electrospray electrospray ionization microchip
Thermal characterization of a microfluidic nebulizer
Mask material effects in cryogenic DRIE
Developed of a microdevice for 2-dimensional gel electrophoresis
The effect of physical properties of selected molecules on desorption/ionization on porous silicon-mass spectrometry
Infrared thermal imaging of microfluidic chips
Characterization of SU-8 polymer for electrophoretic separaions
Fabrication and optimization of enclosed SU-8 tips for electrospray ionization mass spectrometry
Electrophoretic separations of pharmaceutical compounds in microchannels composed of SU-8 polymer
Microfluidic Nebulizer Chip for Mass Spectrometry
Fabrication of porous membrane filter from p-type silicon
Fabrication of microfluidic devices from SU-8
Droplet based self-assembly of SU-8 microparts
Microglow: a microsystems laboratory course
Microsystems and nanotechnology in the Nordic region
Silicon devices for chemistry and lifesciences
Micromechanics in silicon
Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS MS)
Loading effects in deep silicon etching
Etching through silicon wafer in inductively coupled plasma
Depth and profile control in plasma etched MEMS structures
Variable Threshold (MOS) - Transistor for Integrated Neural Network Circuits
Non-refereed scientific articles
Unrefereed conference proceedingsSilicon Micropillar Electrospray Ionization Chip Platform for Biomolecular Analysis in the Aqueous Phase
Hirvonen, Saara; Lipponen, Katriina; Jokinen, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio2015 ISBN: 978-0-9798064-8-3ISSN: 1556-5904Scientific books (monographs)
BookIntroduction to Microfabrication
Franssila, Sami2004 ISBN: 0-470-85105-8Publications intended for professional communities
Article in professional journalSähköä metanolipatruunasta
Ranta, Anja; Noponen, Tuula; Granström, Tom; Scotti, Gianmario; Kanninen, Petri; Franssila, Sami; Halme, Aarne2010 in Prosessori (John Wiley&Sons)ISSN: 0357-4121Mikrokanavia biosiruihin
Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto; Baumann, Marc; Leppihalme, Matti; Hokkanen, Ari; Grigoras, Kestutis2004 in Prosessori (John Wiley&Sons)ISSN: 0357-4121Pisaroita piikiekolla
Franssila, Sami2004 in Helsingin Sanomat (John Wiley&Sons)ISSN: 0355-2047Atmospheric pressure photoionization with a microchip heated nebulizer
Kauppila, T.; Östman, P.; Marttila, S.; Ketola, R.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 in Proceedings MicroTAS (John Wiley&Sons)DLC-PDMS-hybrid patterning and surface treatment
Laakso, T.; Soininen, A.; Franssila, S.2004 in Prooceedings MicroTAS (John Wiley&Sons)Microchip atmospheric pressure chemical ionisation-mass spectrometry
Östman, Pekka; Marttila, Seppo; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2004 in Proceedings MicroTAS (John Wiley&Sons)Valtaavatko mikropiirit elektroniikan?
Franssila, Sami1998 in Tiede 2000 (John Wiley&Sons)Tekniikka kuin luonto
Franssila, Sami1996 in Tiede 2000 (John Wiley&Sons)Kuinka pieneksi pii-transistori voidaan kutistaa?
Franssila, Sami; Kuivalainen, Pekka1994 in Fysiikka tänään (John Wiley&Sons)Mikroelektroniikan rajat ja reunaehdot
Franssila, Sami1990 in Tekniikan Tekijät (John Wiley&Sons)Article in professional conference proceedingsCharacterization of Micro Fuel Cells with Black Silicon Gas Diffusion Layer, International Session on Nanomaterials: fabrication, characterisation and applications
Scotti, Gianmario; Kanninen, Petri; Mäkinen, M.; Kallio, Tanja; Franssila, Sami2010 A micro fuel cell stack without interconnect overhead - macro world-like stacks in MEMS, 21st Micromechanics and Micro systems Europe Workshop
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2010 Published development or research reportDetermination of C-reactive protein by hot electron induced electrochemiluminescence on integrated electrode chips
Ylinen-Hinkka, Tiina; Niskanen, Antti J.; Franssila, Sami; Kulmala, Sakari2011 Bioresorbable Polymer Scaffolds by Micromolding in Capillaries
Malin, Minna; Korhonen, Harri; Jokinen, Ville; Aura, Susanna; Leinikka, M.; Franssila, Sami; Seppälä, Jukka2010 Pore formation in inorganic-organic hydrid material by oxygen plasma treatment
Aura, Susanna; Jokinen, Ville; Baumann, Marc; Franssila, Sami2009 SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips for high resolution quadrupole time-of-flight mass spectrometry
Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2009 Fabrication of SOI micro- and nanoelectromechanical devices by focused ion beam doping and deep reactive ion etching
Chekurov, Nikolai; Sainiemi, Lauri; Peltonen, Antti; Tittonen, Ilkka; Franssila, Sami2009 Silicon nanostructere fabrication by focused ion beam doping and cryogenic deep reactive ion etching
Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka2009 Atomic layer deposition on single-walled carbon nanotubes for device application
Grigoras, Kestutis; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.2009 Integrated liquid chomatography-heated nebulizer microchip for mass spectrometry
Haapala, M.; Saarela, S.; Pol, J.; Franssila, S.; Kotiaho, T.; Kostiainen, R.2009 Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices
Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, S.; Haeggström, E.2009 Microchip atmospheric pressure photoionization-mass spectrometry of underivatizeed anabolic steroids
Hintikka, Laura; Haapala, Markus; kuuranne, Tiia; Leinonen, Antti; Saarela, Ville; Franssila, Sami; Kostiainen, Risto2009 New sampling surfaces for desorption atmospheric pressure photoionization-mass spectrometry
Luosujärvi, Laura; Vähänissi, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Kauppila, Tiina2009 Ti02-microchip combined to mass spectrometer for mimcking phase I metabolic reactions
Nissilä, Teemu; Sainiemi, Lauri; Karikko, Mika-Matti; Kemell, Marianna; Ritala, Mikko; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.2009 Electrospray photoionization microchip for mass spectrometry
Nissilä, Teemu; Sainiemi, Lauri; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo2009 TiO2 microreactoe/electrospray ionization/MS for mimcking metabolic phase I reactions
Nissilä, T.; Sainiemi, L.; Karikko, M-M.; Kemell, M.; Ritala, M.; Franssila, S.; Kostiainen, R.; Ketola, R.A.2009 Integrated chip for liquid chromatography separation and atmospheric pressure ionization for mass spectrometry
Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kolari, Kai; Kostiainen, Risto; Franssila, Sami2009 Fabrication of nanoperforated silicon membranes with tunalbe sized high aspect ratio perforations
Sainiemi, Lauri; Viheriälä, Jukka; Laukkanen, Janne; Niemi, Tapio; Franssila, Sami2009 Transparent, flexible and superhydrophobic material based on three-dimesional mushroom-shaped PDMS microstructures
Sainiemi, L.; Jokinen, V.; Aura, S.; Franssila, S.2009 Micro fuel cell with lithographically defined flowfield channels and random patterns for gas diffusion layer
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2009 Dynamic coating of SU-8 microchannels by phospholipid disks to study cell membrane associated interactions
Sikanen, Tiina; Wiedmer, Susanne; Heikkilä, Liisa; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio2009 Fabrication silicon nanoclusters with electric discharge
Suni, Niina; Haapala, Markus; Färm, Elina; Ritala, Mikko; Sainiemi, Lauri; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2009 Fabrication of nanoclustered silicon surface with electric discharge
Suni, N.; Haapala, M.; Färm, E.; Ritala, M.; Sainiemi, L.; Franssila, Sami; Kotiaho, T.; Kostiainen, R.2009 Optical tweezers experiments with a microfluidic laminar flow channel device
Wallin, Anders; Ojala, Heikki; Rahikkala, Antti; Aura, Susanna; Franssila, Sami; Haeggström, Edward; Tuma, Roman2009 Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors
Zavodchikova, M.Y; Nasibulin, A.G; Grigoras, K.; Kauppinen, E.I; Ermolov, V.; Franssila, S.2009 Rapid separation of protein digests on SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips
Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto2008 Suppression of current hysteresis in Carbon Nanotube Network transistors by ALD passivation
Grigoras, Kestutis; Kulmala, Tero; Zavodchikova, Marina; Nasibulin, Albert; Kauppinen, Esko; Ermolov, Vladimir; Franssila, Sami2008 Etching undr the corner, inclined macropores by ICP-RIE
Grigoras, Kestutis; Franssila, Sami2008 Analysis of selective androgen receptor modulators by gas chromatograpgy-microchip atmospheric pressure ionizationmass spectrometry
Haapala, M.; Luosujärvi, L.; Saarela, V.; Franssila, S.; Thevis, M.; Kostiainen, R.2008 Effect of LED spectral shift on vertical resolution in stroboscopic white lifht interferometry
Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, Sami; Häggström, E.2008 Stroboscopic White Light Interferometry for Dynamic Characterization of Capacitive Pressure Sensors
Kassamakov, I.; Hanhijärvi, K.; Aaltonen, J.; Sainiemi, L.; Grigoras, K.; Franssila, S.; Häggström, E.2008 Microchip heated nebulizer as an atmospheric pressure thermospray ionozation source for mass spectrometry
Keski-Rahkonen, P.; Haapala, M; Saarela, V.; Franssila, S.; Kotiaho, T.; Kostiainen, R.; Auriola, S.2008 Pattering of as-deposited, random SWNT network for FET channel application by optical lithography
Kulmala, T.; Grigoras, K.; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.2008 Microfluidic nozzle chips as ionozation sources fof mass spectrometry
Saarela, Ville; Franssila, Sami2008 Fabrication of freestending Al2o3 nanomembranes and bridges
Sainiemi, L.; Grigoras, K.; Franssila, S.2008 High-tempereture silicon microbridge actuator
Sainiemi, Lauri; Grigoras, Kestutis; Fan, Ji; Saarela, Ville; Vähänissi, Ville; Laakso, Aki; Franssila, Sami2008 Hybrid ceramic-polymer microfluidics chips for amino acid, peptide and protein CE separations
Sikanen, Tiina; Aura, Susanna; Heikkilä, Liisa; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2008 Selective surface patterning with electric discharge
Suni, N.; Haapala, M.; Mäkinen, A.; Sainiemi, L.; Franssila, S.; Färm, E.; Puukilainen, E.; Ritala, M.; Yli-Kauhaluoma, J.; Kostiainen, R.2008 Towards High-Throughput Optical Tweezers Experiments
Wallin, A.E; Ojala, H.; Aura, S.; Franssila, S.; Häggström, E.; Tuma, R.2008 Disposable Electrochemiluminescence Sensors of Bacterial Spores
Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Ala-Kleme, Timo; Kulmala, Sakari2008 Detection of bacterial spores on the basis of electrochemiluminescence
Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Kulmala, Sakari; Ala-Kleme, Timo2008 Novel carbon nanotube network deposition techniques for electronic device fabrication
Zavodchikova, M.; Kulmala, T.; Grigoras, K.; Nasibulin, A.G; Anisimov, A.S; Franssila, S.; Ermolov, V.; Kauppinen, E.I2008 High efficiency sample transfer between IEF and SDS-PASGE separations on a miniaturized proteomics chips
Demianova, Z.; Pöysä, Eemeli; Franssila, Sami; Baumann, Marc2007 Microfaricated nebulizer chips for atmospheric pressure photoionization mass spectrometry
Haapala, Markus; Pol, Jaroslav; Kauppila, Tiina; Luosujärvi, Laura; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kotiaho, Tapio; Kostiainen, Risto2007 Microchip APPI Device for Combining GC or LC with MS
Haapala, Markus; Luosujärvi, Laura; Saarela, Ville; Kotiaho, Tapio; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto2007 Conditions for capillary filling in microfabricated channels with hydrophilic and hydrophobic walls
Jokinen, Ville; Franssila, Sami2007 Desorption Atmospheric Pressure Photoionozation
Kauppila, Tiina; Haapala, Markus; Pol, Jaroslav; Arvola, Ville; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kostiainen, Risto2007 Deep plasme etching of glass for fluidic devices
Kolari, K.; Saarela, V.; Franssila, S.2007 Miniature Tunnel Oxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminescence Studies
Niskanen, Antti J.; Ylinen-Hinkka, Tiina; Håkansson, Markus; Suomi, Johanna; Ala-Kleme, Timo; Kulmala, Sakari; Franssila, Sami2007 Micropillar array electrospray chip for analysis of biomolecules
Nissilä, Teemu; Sainiemi, Lauri; Sikanen, Tiina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.2007 On-chip liquid cromatography-atmospheric pressure ionization mass spectrometry
Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kalkkinen, Nisse; Hukka, Marko; Kolari, Kai; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2007 High sensitivity micropillar electrospray ionization chip fabricated of silicon
Sainiemi, Lauri; Nissilä, T.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.; Ketola, R.; Franssila, S.2007 Fully integrated, polymer-based CZE-ESI microchip for high throughput MS analysis
Sikanen, T.; Tuomikoski, S.; Ketola, R.A; Kostiainen, R.; Franssila, S.; Kotiaho, T.2007 Monolithically integrated electrophoresis microchip with electrospray ionization mass spectrometry detection
Tuomikoski, Santeri; Sikanen, Tiina; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2007 Characterization of SU-8 microchannels for electrophoretic separations
Sikanen, Tiina; Korpisalo, Iiro; Tuomikoski, Santeri; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2005 Design and fabrication of integrated SPE-CE device for testosterone detection
Tuomikoski, Santeri; Rovio, Stella; Hokkanen, Ari; Siren, Heli; Franssila, Sami2005 SPE/CE chip in SU-8
Tuomikoski, S.; Franssila, S.; Siren, H.; Rovio, S.; Hokkanen, A.2005 Fabrication of porous membrane filter from p-type silicon
Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.2004 Atmospheric pressure photoionization with a microchip heated nebulizer
Kauppila, T.; Östman, P.; Marttila, S.; Ketola, R.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 DLC-PDMS-hyprid patterning and surface treatment
Laakso, T.; Soininen, A.; Franssila, S.2004 Reusable multi-inlet PDMS fluidic connector
Saarela, Ville; Franssila, Sami2004 Fabrication of 3D SU-8 tips for electrospray ionization mass spectrometry
Tuomikoski, Santeri; Sikanen, Tiina; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2004 Microchip atmospheric pressure chemical ionisation-mass spectrometry
Östman, P.; Marttila, S.; Kotiaho, S.; Franssila, s.; Kostiainen, R.2004 Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectromerty
Östman, P.; Marttila, S.J.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 Droplet based self-assembly of SU-8 microparts
Corral, S.; Zhou, Q.; Albut, A.; Franssila, S.; Tuomikoski, S.; Koivo, H.2003 Microfluidic-to-mass spectrometry interfacing with atmospheric pressure chemical ionization (APCI) microchip
Franssila, S.; Marttila, S.; Östman, P.; Kotiaho, T.; Kostiainen, R.2003 Formation of nanoporous glass layer
Grigoras, K.; Franssila, S.2003 Thickness Evaluation of Si/SiO2 Multilayers by Ellipsometry and Reflection Spectrometry
Ovchinnikov, V.; Franssila, Sami; Jiang, H.; Nasibulin, A.G.; Kauppinen, E.I.2003 Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist
Tuomikoski, S.; Franssila, S.2003 SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot
Tuomikoski, S.; del Corral, C.; Zhou, Q.; Franssila, S.2003 PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters
Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Puolanne, K.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2002 PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters
Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2002 Optical interferometric detection of a mechanical silicon oscillator
Nera, Kaisa; Hahtela, Ossi; Franssila, Sami; Tittonen, Ilkka2002 Luminescence Study of Silicon Nanostructures Prepared by Ion Beam mixing
Ovchinnikov, V.; Sokolov, V.; Franssila, Sami2002 Electrochemiluminoimmunoassay of 2-microglobulin at disposable planar oxide-coated silicon electrodes
Spehar, Anna-Maria; Vainio, Piia; Eskola, J.; Nyman, Annika; Håkansson, Markus; Jiang, Qinghong; Franssila, Sami; Kulmala, Sakari2002 Modified porous silicon surfaces as DIOS-MS sample plates
Tuomikoski, S.; Huikko, K.; Östman, P.; Grigoras, K.; Baumann, M.; Kostiainen, R.; Franssila, S.; Kotiaho, T.2002 Microsystems education in the Nordic region
Grey, F.; Franssila, S.; Furuberg, L.; Hjort, K.2001 Bulk-Micromachined Silicon Microbridges for Infrared Emitters
Grigoras, Kestutis; Juvonen, Tuuli; Nera, Kaisa; Heikkilä, Paula; Franssila, Sami2001 Time resolved electrochemiluminoimmunoassay of hCRP at oxide-coated p-type silicon electrodes
Vainio, P.; Ala-Kleme, Timo; Väre, Leif; Håkansson, Markus; Canty, Philip; Eskola, J.; Franssila, S.; Kulmala, Sakari2001 Deep Silicon Structures by Electrochemical Etching
Grigoras, Kestutis; Niskanen, A.J.; Franssila, Sami2000 Submicron image reversal by liquid phase deposition of oxide
Niskanen, A.J.; Franssila, S.2000 Mikroelektroniikan trendit, teoksessa Elektroniikka- ja sähköalan osaamistarpeet 1997-2002
Franssila, S.1999 Text book or professional handbook or guidebook or dictionaryHandbook of silicon based MEMS materials and technologies
Tilli, Markku; Motooka, Teruaki; Airaksinen, Veli-Matti; Franssila, Sami; Paulasto-Kröckel, Mervi; Lindroos, Veikko2015 ISBN: 978-0-323-29965-7“MEMS lithography” in Handbook of silicon based MEMS materials and technologies
Franssila, Sami; Tuomikoski, Santeri; Lindroos, Veikko; Tilli, Markku; Lehto, Ari; Motooka, Teruaki2010 Mechanical properties of ultrathin ALD Al2O3 films
Rontu, Ville; Hokkanen, Ari; Franssila, Sami2017 Fabrication of superomniphobic nanoserif surfaces
Rontu, Ville; Hoshian, Sasha; Shah, Syed; Jokinen, Ville; Franssila, Sami2016 Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition
Rontu, Ville; Pitkänen, Olli; Heikkinen, Joonas; Ge, Yanling; Kordas, Krisztian; Franssila, Sami; Tuukkanen, Sampo2015 Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water
Berdova, Maria; Rontu, Ville; Sajavaara, Timo; Eskelinen, Antti-Pekka; Franssila, Sami2014
Silicon Micropillar Electrospray Ionization Chip Platform for Biomolecular Analysis in the Aqueous Phase
Introduction to Microfabrication
Publications intended for professional communities
Article in professional journalSähköä metanolipatruunasta
Ranta, Anja; Noponen, Tuula; Granström, Tom; Scotti, Gianmario; Kanninen, Petri; Franssila, Sami; Halme, Aarne2010 in Prosessori (John Wiley&Sons)ISSN: 0357-4121Mikrokanavia biosiruihin
Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto; Baumann, Marc; Leppihalme, Matti; Hokkanen, Ari; Grigoras, Kestutis2004 in Prosessori (John Wiley&Sons)ISSN: 0357-4121Pisaroita piikiekolla
Franssila, Sami2004 in Helsingin Sanomat (John Wiley&Sons)ISSN: 0355-2047Atmospheric pressure photoionization with a microchip heated nebulizer
Kauppila, T.; Östman, P.; Marttila, S.; Ketola, R.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 in Proceedings MicroTAS (John Wiley&Sons)DLC-PDMS-hybrid patterning and surface treatment
Laakso, T.; Soininen, A.; Franssila, S.2004 in Prooceedings MicroTAS (John Wiley&Sons)Microchip atmospheric pressure chemical ionisation-mass spectrometry
Östman, Pekka; Marttila, Seppo; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2004 in Proceedings MicroTAS (John Wiley&Sons)Valtaavatko mikropiirit elektroniikan?
Franssila, Sami1998 in Tiede 2000 (John Wiley&Sons)Tekniikka kuin luonto
Franssila, Sami1996 in Tiede 2000 (John Wiley&Sons)Kuinka pieneksi pii-transistori voidaan kutistaa?
Franssila, Sami; Kuivalainen, Pekka1994 in Fysiikka tänään (John Wiley&Sons)Mikroelektroniikan rajat ja reunaehdot
Franssila, Sami1990 in Tekniikan Tekijät (John Wiley&Sons)Article in professional conference proceedingsCharacterization of Micro Fuel Cells with Black Silicon Gas Diffusion Layer, International Session on Nanomaterials: fabrication, characterisation and applications
Scotti, Gianmario; Kanninen, Petri; Mäkinen, M.; Kallio, Tanja; Franssila, Sami2010 A micro fuel cell stack without interconnect overhead - macro world-like stacks in MEMS, 21st Micromechanics and Micro systems Europe Workshop
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2010 Published development or research reportDetermination of C-reactive protein by hot electron induced electrochemiluminescence on integrated electrode chips
Ylinen-Hinkka, Tiina; Niskanen, Antti J.; Franssila, Sami; Kulmala, Sakari2011 Bioresorbable Polymer Scaffolds by Micromolding in Capillaries
Malin, Minna; Korhonen, Harri; Jokinen, Ville; Aura, Susanna; Leinikka, M.; Franssila, Sami; Seppälä, Jukka2010 Pore formation in inorganic-organic hydrid material by oxygen plasma treatment
Aura, Susanna; Jokinen, Ville; Baumann, Marc; Franssila, Sami2009 SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips for high resolution quadrupole time-of-flight mass spectrometry
Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2009 Fabrication of SOI micro- and nanoelectromechanical devices by focused ion beam doping and deep reactive ion etching
Chekurov, Nikolai; Sainiemi, Lauri; Peltonen, Antti; Tittonen, Ilkka; Franssila, Sami2009 Silicon nanostructere fabrication by focused ion beam doping and cryogenic deep reactive ion etching
Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka2009 Atomic layer deposition on single-walled carbon nanotubes for device application
Grigoras, Kestutis; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.2009 Integrated liquid chomatography-heated nebulizer microchip for mass spectrometry
Haapala, M.; Saarela, S.; Pol, J.; Franssila, S.; Kotiaho, T.; Kostiainen, R.2009 Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices
Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, S.; Haeggström, E.2009 Microchip atmospheric pressure photoionization-mass spectrometry of underivatizeed anabolic steroids
Hintikka, Laura; Haapala, Markus; kuuranne, Tiia; Leinonen, Antti; Saarela, Ville; Franssila, Sami; Kostiainen, Risto2009 New sampling surfaces for desorption atmospheric pressure photoionization-mass spectrometry
Luosujärvi, Laura; Vähänissi, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Kauppila, Tiina2009 Ti02-microchip combined to mass spectrometer for mimcking phase I metabolic reactions
Nissilä, Teemu; Sainiemi, Lauri; Karikko, Mika-Matti; Kemell, Marianna; Ritala, Mikko; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.2009 Electrospray photoionization microchip for mass spectrometry
Nissilä, Teemu; Sainiemi, Lauri; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo2009 TiO2 microreactoe/electrospray ionization/MS for mimcking metabolic phase I reactions
Nissilä, T.; Sainiemi, L.; Karikko, M-M.; Kemell, M.; Ritala, M.; Franssila, S.; Kostiainen, R.; Ketola, R.A.2009 Integrated chip for liquid chromatography separation and atmospheric pressure ionization for mass spectrometry
Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kolari, Kai; Kostiainen, Risto; Franssila, Sami2009 Fabrication of nanoperforated silicon membranes with tunalbe sized high aspect ratio perforations
Sainiemi, Lauri; Viheriälä, Jukka; Laukkanen, Janne; Niemi, Tapio; Franssila, Sami2009 Transparent, flexible and superhydrophobic material based on three-dimesional mushroom-shaped PDMS microstructures
Sainiemi, L.; Jokinen, V.; Aura, S.; Franssila, S.2009 Micro fuel cell with lithographically defined flowfield channels and random patterns for gas diffusion layer
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2009 Dynamic coating of SU-8 microchannels by phospholipid disks to study cell membrane associated interactions
Sikanen, Tiina; Wiedmer, Susanne; Heikkilä, Liisa; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio2009 Fabrication silicon nanoclusters with electric discharge
Suni, Niina; Haapala, Markus; Färm, Elina; Ritala, Mikko; Sainiemi, Lauri; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2009 Fabrication of nanoclustered silicon surface with electric discharge
Suni, N.; Haapala, M.; Färm, E.; Ritala, M.; Sainiemi, L.; Franssila, Sami; Kotiaho, T.; Kostiainen, R.2009 Optical tweezers experiments with a microfluidic laminar flow channel device
Wallin, Anders; Ojala, Heikki; Rahikkala, Antti; Aura, Susanna; Franssila, Sami; Haeggström, Edward; Tuma, Roman2009 Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors
Zavodchikova, M.Y; Nasibulin, A.G; Grigoras, K.; Kauppinen, E.I; Ermolov, V.; Franssila, S.2009 Rapid separation of protein digests on SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips
Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto2008 Suppression of current hysteresis in Carbon Nanotube Network transistors by ALD passivation
Grigoras, Kestutis; Kulmala, Tero; Zavodchikova, Marina; Nasibulin, Albert; Kauppinen, Esko; Ermolov, Vladimir; Franssila, Sami2008 Etching undr the corner, inclined macropores by ICP-RIE
Grigoras, Kestutis; Franssila, Sami2008 Analysis of selective androgen receptor modulators by gas chromatograpgy-microchip atmospheric pressure ionizationmass spectrometry
Haapala, M.; Luosujärvi, L.; Saarela, V.; Franssila, S.; Thevis, M.; Kostiainen, R.2008 Effect of LED spectral shift on vertical resolution in stroboscopic white lifht interferometry
Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, Sami; Häggström, E.2008 Stroboscopic White Light Interferometry for Dynamic Characterization of Capacitive Pressure Sensors
Kassamakov, I.; Hanhijärvi, K.; Aaltonen, J.; Sainiemi, L.; Grigoras, K.; Franssila, S.; Häggström, E.2008 Microchip heated nebulizer as an atmospheric pressure thermospray ionozation source for mass spectrometry
Keski-Rahkonen, P.; Haapala, M; Saarela, V.; Franssila, S.; Kotiaho, T.; Kostiainen, R.; Auriola, S.2008 Pattering of as-deposited, random SWNT network for FET channel application by optical lithography
Kulmala, T.; Grigoras, K.; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.2008 Microfluidic nozzle chips as ionozation sources fof mass spectrometry
Saarela, Ville; Franssila, Sami2008 Fabrication of freestending Al2o3 nanomembranes and bridges
Sainiemi, L.; Grigoras, K.; Franssila, S.2008 High-tempereture silicon microbridge actuator
Sainiemi, Lauri; Grigoras, Kestutis; Fan, Ji; Saarela, Ville; Vähänissi, Ville; Laakso, Aki; Franssila, Sami2008 Hybrid ceramic-polymer microfluidics chips for amino acid, peptide and protein CE separations
Sikanen, Tiina; Aura, Susanna; Heikkilä, Liisa; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2008 Selective surface patterning with electric discharge
Suni, N.; Haapala, M.; Mäkinen, A.; Sainiemi, L.; Franssila, S.; Färm, E.; Puukilainen, E.; Ritala, M.; Yli-Kauhaluoma, J.; Kostiainen, R.2008 Towards High-Throughput Optical Tweezers Experiments
Wallin, A.E; Ojala, H.; Aura, S.; Franssila, S.; Häggström, E.; Tuma, R.2008 Disposable Electrochemiluminescence Sensors of Bacterial Spores
Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Ala-Kleme, Timo; Kulmala, Sakari2008 Detection of bacterial spores on the basis of electrochemiluminescence
Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Kulmala, Sakari; Ala-Kleme, Timo2008 Novel carbon nanotube network deposition techniques for electronic device fabrication
Zavodchikova, M.; Kulmala, T.; Grigoras, K.; Nasibulin, A.G; Anisimov, A.S; Franssila, S.; Ermolov, V.; Kauppinen, E.I2008 High efficiency sample transfer between IEF and SDS-PASGE separations on a miniaturized proteomics chips
Demianova, Z.; Pöysä, Eemeli; Franssila, Sami; Baumann, Marc2007 Microfaricated nebulizer chips for atmospheric pressure photoionization mass spectrometry
Haapala, Markus; Pol, Jaroslav; Kauppila, Tiina; Luosujärvi, Laura; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kotiaho, Tapio; Kostiainen, Risto2007 Microchip APPI Device for Combining GC or LC with MS
Haapala, Markus; Luosujärvi, Laura; Saarela, Ville; Kotiaho, Tapio; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto2007 Conditions for capillary filling in microfabricated channels with hydrophilic and hydrophobic walls
Jokinen, Ville; Franssila, Sami2007 Desorption Atmospheric Pressure Photoionozation
Kauppila, Tiina; Haapala, Markus; Pol, Jaroslav; Arvola, Ville; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kostiainen, Risto2007 Deep plasme etching of glass for fluidic devices
Kolari, K.; Saarela, V.; Franssila, S.2007 Miniature Tunnel Oxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminescence Studies
Niskanen, Antti J.; Ylinen-Hinkka, Tiina; Håkansson, Markus; Suomi, Johanna; Ala-Kleme, Timo; Kulmala, Sakari; Franssila, Sami2007 Micropillar array electrospray chip for analysis of biomolecules
Nissilä, Teemu; Sainiemi, Lauri; Sikanen, Tiina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.2007 On-chip liquid cromatography-atmospheric pressure ionization mass spectrometry
Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kalkkinen, Nisse; Hukka, Marko; Kolari, Kai; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2007 High sensitivity micropillar electrospray ionization chip fabricated of silicon
Sainiemi, Lauri; Nissilä, T.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.; Ketola, R.; Franssila, S.2007 Fully integrated, polymer-based CZE-ESI microchip for high throughput MS analysis
Sikanen, T.; Tuomikoski, S.; Ketola, R.A; Kostiainen, R.; Franssila, S.; Kotiaho, T.2007 Monolithically integrated electrophoresis microchip with electrospray ionization mass spectrometry detection
Tuomikoski, Santeri; Sikanen, Tiina; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2007 Characterization of SU-8 microchannels for electrophoretic separations
Sikanen, Tiina; Korpisalo, Iiro; Tuomikoski, Santeri; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2005 Design and fabrication of integrated SPE-CE device for testosterone detection
Tuomikoski, Santeri; Rovio, Stella; Hokkanen, Ari; Siren, Heli; Franssila, Sami2005 SPE/CE chip in SU-8
Tuomikoski, S.; Franssila, S.; Siren, H.; Rovio, S.; Hokkanen, A.2005 Fabrication of porous membrane filter from p-type silicon
Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.2004 Atmospheric pressure photoionization with a microchip heated nebulizer
Kauppila, T.; Östman, P.; Marttila, S.; Ketola, R.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 DLC-PDMS-hyprid patterning and surface treatment
Laakso, T.; Soininen, A.; Franssila, S.2004 Reusable multi-inlet PDMS fluidic connector
Saarela, Ville; Franssila, Sami2004 Fabrication of 3D SU-8 tips for electrospray ionization mass spectrometry
Tuomikoski, Santeri; Sikanen, Tiina; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2004 Microchip atmospheric pressure chemical ionisation-mass spectrometry
Östman, P.; Marttila, S.; Kotiaho, S.; Franssila, s.; Kostiainen, R.2004 Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectromerty
Östman, P.; Marttila, S.J.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 Droplet based self-assembly of SU-8 microparts
Corral, S.; Zhou, Q.; Albut, A.; Franssila, S.; Tuomikoski, S.; Koivo, H.2003 Microfluidic-to-mass spectrometry interfacing with atmospheric pressure chemical ionization (APCI) microchip
Franssila, S.; Marttila, S.; Östman, P.; Kotiaho, T.; Kostiainen, R.2003 Formation of nanoporous glass layer
Grigoras, K.; Franssila, S.2003 Thickness Evaluation of Si/SiO2 Multilayers by Ellipsometry and Reflection Spectrometry
Ovchinnikov, V.; Franssila, Sami; Jiang, H.; Nasibulin, A.G.; Kauppinen, E.I.2003 Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist
Tuomikoski, S.; Franssila, S.2003 SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot
Tuomikoski, S.; del Corral, C.; Zhou, Q.; Franssila, S.2003 PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters
Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Puolanne, K.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2002 PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters
Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2002 Optical interferometric detection of a mechanical silicon oscillator
Nera, Kaisa; Hahtela, Ossi; Franssila, Sami; Tittonen, Ilkka2002 Luminescence Study of Silicon Nanostructures Prepared by Ion Beam mixing
Ovchinnikov, V.; Sokolov, V.; Franssila, Sami2002 Electrochemiluminoimmunoassay of 2-microglobulin at disposable planar oxide-coated silicon electrodes
Spehar, Anna-Maria; Vainio, Piia; Eskola, J.; Nyman, Annika; Håkansson, Markus; Jiang, Qinghong; Franssila, Sami; Kulmala, Sakari2002 Modified porous silicon surfaces as DIOS-MS sample plates
Tuomikoski, S.; Huikko, K.; Östman, P.; Grigoras, K.; Baumann, M.; Kostiainen, R.; Franssila, S.; Kotiaho, T.2002 Microsystems education in the Nordic region
Grey, F.; Franssila, S.; Furuberg, L.; Hjort, K.2001 Bulk-Micromachined Silicon Microbridges for Infrared Emitters
Grigoras, Kestutis; Juvonen, Tuuli; Nera, Kaisa; Heikkilä, Paula; Franssila, Sami2001 Time resolved electrochemiluminoimmunoassay of hCRP at oxide-coated p-type silicon electrodes
Vainio, P.; Ala-Kleme, Timo; Väre, Leif; Håkansson, Markus; Canty, Philip; Eskola, J.; Franssila, S.; Kulmala, Sakari2001 Deep Silicon Structures by Electrochemical Etching
Grigoras, Kestutis; Niskanen, A.J.; Franssila, Sami2000 Submicron image reversal by liquid phase deposition of oxide
Niskanen, A.J.; Franssila, S.2000 Mikroelektroniikan trendit, teoksessa Elektroniikka- ja sähköalan osaamistarpeet 1997-2002
Franssila, S.1999 Text book or professional handbook or guidebook or dictionaryHandbook of silicon based MEMS materials and technologies
Tilli, Markku; Motooka, Teruaki; Airaksinen, Veli-Matti; Franssila, Sami; Paulasto-Kröckel, Mervi; Lindroos, Veikko2015 ISBN: 978-0-323-29965-7“MEMS lithography” in Handbook of silicon based MEMS materials and technologies
Franssila, Sami; Tuomikoski, Santeri; Lindroos, Veikko; Tilli, Markku; Lehto, Ari; Motooka, Teruaki2010 Mechanical properties of ultrathin ALD Al2O3 films
Rontu, Ville; Hokkanen, Ari; Franssila, Sami2017 Fabrication of superomniphobic nanoserif surfaces
Rontu, Ville; Hoshian, Sasha; Shah, Syed; Jokinen, Ville; Franssila, Sami2016 Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition
Rontu, Ville; Pitkänen, Olli; Heikkinen, Joonas; Ge, Yanling; Kordas, Krisztian; Franssila, Sami; Tuukkanen, Sampo2015 Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water
Berdova, Maria; Rontu, Ville; Sajavaara, Timo; Eskelinen, Antti-Pekka; Franssila, Sami2014
Sähköä metanolipatruunasta
Mikrokanavia biosiruihin
Pisaroita piikiekolla
Atmospheric pressure photoionization with a microchip heated nebulizer
DLC-PDMS-hybrid patterning and surface treatment
Microchip atmospheric pressure chemical ionisation-mass spectrometry
Valtaavatko mikropiirit elektroniikan?
Tekniikka kuin luonto
Kuinka pieneksi pii-transistori voidaan kutistaa?
Mikroelektroniikan rajat ja reunaehdot
Characterization of Micro Fuel Cells with Black Silicon Gas Diffusion Layer, International Session on Nanomaterials: fabrication, characterisation and applications
A micro fuel cell stack without interconnect overhead - macro world-like stacks in MEMS, 21st Micromechanics and Micro systems Europe Workshop
Published development or research reportDetermination of C-reactive protein by hot electron induced electrochemiluminescence on integrated electrode chips
Ylinen-Hinkka, Tiina; Niskanen, Antti J.; Franssila, Sami; Kulmala, Sakari2011 Bioresorbable Polymer Scaffolds by Micromolding in Capillaries
Malin, Minna; Korhonen, Harri; Jokinen, Ville; Aura, Susanna; Leinikka, M.; Franssila, Sami; Seppälä, Jukka2010 Pore formation in inorganic-organic hydrid material by oxygen plasma treatment
Aura, Susanna; Jokinen, Ville; Baumann, Marc; Franssila, Sami2009 SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips for high resolution quadrupole time-of-flight mass spectrometry
Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto2009 Fabrication of SOI micro- and nanoelectromechanical devices by focused ion beam doping and deep reactive ion etching
Chekurov, Nikolai; Sainiemi, Lauri; Peltonen, Antti; Tittonen, Ilkka; Franssila, Sami2009 Silicon nanostructere fabrication by focused ion beam doping and cryogenic deep reactive ion etching
Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka2009 Atomic layer deposition on single-walled carbon nanotubes for device application
Grigoras, Kestutis; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.2009 Integrated liquid chomatography-heated nebulizer microchip for mass spectrometry
Haapala, M.; Saarela, S.; Pol, J.; Franssila, S.; Kotiaho, T.; Kostiainen, R.2009 Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices
Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, S.; Haeggström, E.2009 Microchip atmospheric pressure photoionization-mass spectrometry of underivatizeed anabolic steroids
Hintikka, Laura; Haapala, Markus; kuuranne, Tiia; Leinonen, Antti; Saarela, Ville; Franssila, Sami; Kostiainen, Risto2009 New sampling surfaces for desorption atmospheric pressure photoionization-mass spectrometry
Luosujärvi, Laura; Vähänissi, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Kauppila, Tiina2009 Ti02-microchip combined to mass spectrometer for mimcking phase I metabolic reactions
Nissilä, Teemu; Sainiemi, Lauri; Karikko, Mika-Matti; Kemell, Marianna; Ritala, Mikko; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.2009 Electrospray photoionization microchip for mass spectrometry
Nissilä, Teemu; Sainiemi, Lauri; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo2009 TiO2 microreactoe/electrospray ionization/MS for mimcking metabolic phase I reactions
Nissilä, T.; Sainiemi, L.; Karikko, M-M.; Kemell, M.; Ritala, M.; Franssila, S.; Kostiainen, R.; Ketola, R.A.2009 Integrated chip for liquid chromatography separation and atmospheric pressure ionization for mass spectrometry
Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kolari, Kai; Kostiainen, Risto; Franssila, Sami2009 Fabrication of nanoperforated silicon membranes with tunalbe sized high aspect ratio perforations
Sainiemi, Lauri; Viheriälä, Jukka; Laukkanen, Janne; Niemi, Tapio; Franssila, Sami2009 Transparent, flexible and superhydrophobic material based on three-dimesional mushroom-shaped PDMS microstructures
Sainiemi, L.; Jokinen, V.; Aura, S.; Franssila, S.2009 Micro fuel cell with lithographically defined flowfield channels and random patterns for gas diffusion layer
Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami2009 Dynamic coating of SU-8 microchannels by phospholipid disks to study cell membrane associated interactions
Sikanen, Tiina; Wiedmer, Susanne; Heikkilä, Liisa; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio2009 Fabrication silicon nanoclusters with electric discharge
Suni, Niina; Haapala, Markus; Färm, Elina; Ritala, Mikko; Sainiemi, Lauri; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2009 Fabrication of nanoclustered silicon surface with electric discharge
Suni, N.; Haapala, M.; Färm, E.; Ritala, M.; Sainiemi, L.; Franssila, Sami; Kotiaho, T.; Kostiainen, R.2009 Optical tweezers experiments with a microfluidic laminar flow channel device
Wallin, Anders; Ojala, Heikki; Rahikkala, Antti; Aura, Susanna; Franssila, Sami; Haeggström, Edward; Tuma, Roman2009 Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors
Zavodchikova, M.Y; Nasibulin, A.G; Grigoras, K.; Kauppinen, E.I; Ermolov, V.; Franssila, S.2009 Rapid separation of protein digests on SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips
Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto2008 Suppression of current hysteresis in Carbon Nanotube Network transistors by ALD passivation
Grigoras, Kestutis; Kulmala, Tero; Zavodchikova, Marina; Nasibulin, Albert; Kauppinen, Esko; Ermolov, Vladimir; Franssila, Sami2008 Etching undr the corner, inclined macropores by ICP-RIE
Grigoras, Kestutis; Franssila, Sami2008 Analysis of selective androgen receptor modulators by gas chromatograpgy-microchip atmospheric pressure ionizationmass spectrometry
Haapala, M.; Luosujärvi, L.; Saarela, V.; Franssila, S.; Thevis, M.; Kostiainen, R.2008 Effect of LED spectral shift on vertical resolution in stroboscopic white lifht interferometry
Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, Sami; Häggström, E.2008 Stroboscopic White Light Interferometry for Dynamic Characterization of Capacitive Pressure Sensors
Kassamakov, I.; Hanhijärvi, K.; Aaltonen, J.; Sainiemi, L.; Grigoras, K.; Franssila, S.; Häggström, E.2008 Microchip heated nebulizer as an atmospheric pressure thermospray ionozation source for mass spectrometry
Keski-Rahkonen, P.; Haapala, M; Saarela, V.; Franssila, S.; Kotiaho, T.; Kostiainen, R.; Auriola, S.2008 Pattering of as-deposited, random SWNT network for FET channel application by optical lithography
Kulmala, T.; Grigoras, K.; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.2008 Microfluidic nozzle chips as ionozation sources fof mass spectrometry
Saarela, Ville; Franssila, Sami2008 Fabrication of freestending Al2o3 nanomembranes and bridges
Sainiemi, L.; Grigoras, K.; Franssila, S.2008 High-tempereture silicon microbridge actuator
Sainiemi, Lauri; Grigoras, Kestutis; Fan, Ji; Saarela, Ville; Vähänissi, Ville; Laakso, Aki; Franssila, Sami2008 Hybrid ceramic-polymer microfluidics chips for amino acid, peptide and protein CE separations
Sikanen, Tiina; Aura, Susanna; Heikkilä, Liisa; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto2008 Selective surface patterning with electric discharge
Suni, N.; Haapala, M.; Mäkinen, A.; Sainiemi, L.; Franssila, S.; Färm, E.; Puukilainen, E.; Ritala, M.; Yli-Kauhaluoma, J.; Kostiainen, R.2008 Towards High-Throughput Optical Tweezers Experiments
Wallin, A.E; Ojala, H.; Aura, S.; Franssila, S.; Häggström, E.; Tuma, R.2008 Disposable Electrochemiluminescence Sensors of Bacterial Spores
Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Ala-Kleme, Timo; Kulmala, Sakari2008 Detection of bacterial spores on the basis of electrochemiluminescence
Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Kulmala, Sakari; Ala-Kleme, Timo2008 Novel carbon nanotube network deposition techniques for electronic device fabrication
Zavodchikova, M.; Kulmala, T.; Grigoras, K.; Nasibulin, A.G; Anisimov, A.S; Franssila, S.; Ermolov, V.; Kauppinen, E.I2008 High efficiency sample transfer between IEF and SDS-PASGE separations on a miniaturized proteomics chips
Demianova, Z.; Pöysä, Eemeli; Franssila, Sami; Baumann, Marc2007 Microfaricated nebulizer chips for atmospheric pressure photoionization mass spectrometry
Haapala, Markus; Pol, Jaroslav; Kauppila, Tiina; Luosujärvi, Laura; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kotiaho, Tapio; Kostiainen, Risto2007 Microchip APPI Device for Combining GC or LC with MS
Haapala, Markus; Luosujärvi, Laura; Saarela, Ville; Kotiaho, Tapio; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto2007 Conditions for capillary filling in microfabricated channels with hydrophilic and hydrophobic walls
Jokinen, Ville; Franssila, Sami2007 Desorption Atmospheric Pressure Photoionozation
Kauppila, Tiina; Haapala, Markus; Pol, Jaroslav; Arvola, Ville; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kostiainen, Risto2007 Deep plasme etching of glass for fluidic devices
Kolari, K.; Saarela, V.; Franssila, S.2007 Miniature Tunnel Oxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminescence Studies
Niskanen, Antti J.; Ylinen-Hinkka, Tiina; Håkansson, Markus; Suomi, Johanna; Ala-Kleme, Timo; Kulmala, Sakari; Franssila, Sami2007 Micropillar array electrospray chip for analysis of biomolecules
Nissilä, Teemu; Sainiemi, Lauri; Sikanen, Tiina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.2007 On-chip liquid cromatography-atmospheric pressure ionization mass spectrometry
Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kalkkinen, Nisse; Hukka, Marko; Kolari, Kai; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2007 High sensitivity micropillar electrospray ionization chip fabricated of silicon
Sainiemi, Lauri; Nissilä, T.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.; Ketola, R.; Franssila, S.2007 Fully integrated, polymer-based CZE-ESI microchip for high throughput MS analysis
Sikanen, T.; Tuomikoski, S.; Ketola, R.A; Kostiainen, R.; Franssila, S.; Kotiaho, T.2007 Monolithically integrated electrophoresis microchip with electrospray ionization mass spectrometry detection
Tuomikoski, Santeri; Sikanen, Tiina; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2007 Characterization of SU-8 microchannels for electrophoretic separations
Sikanen, Tiina; Korpisalo, Iiro; Tuomikoski, Santeri; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2005 Design and fabrication of integrated SPE-CE device for testosterone detection
Tuomikoski, Santeri; Rovio, Stella; Hokkanen, Ari; Siren, Heli; Franssila, Sami2005 SPE/CE chip in SU-8
Tuomikoski, S.; Franssila, S.; Siren, H.; Rovio, S.; Hokkanen, A.2005 Fabrication of porous membrane filter from p-type silicon
Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.2004 Atmospheric pressure photoionization with a microchip heated nebulizer
Kauppila, T.; Östman, P.; Marttila, S.; Ketola, R.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 DLC-PDMS-hyprid patterning and surface treatment
Laakso, T.; Soininen, A.; Franssila, S.2004 Reusable multi-inlet PDMS fluidic connector
Saarela, Ville; Franssila, Sami2004 Fabrication of 3D SU-8 tips for electrospray ionization mass spectrometry
Tuomikoski, Santeri; Sikanen, Tiina; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami2004 Microchip atmospheric pressure chemical ionisation-mass spectrometry
Östman, P.; Marttila, S.; Kotiaho, S.; Franssila, s.; Kostiainen, R.2004 Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectromerty
Östman, P.; Marttila, S.J.; Kotiaho, T.; Franssila, S.; Kostiainen, R.2004 Droplet based self-assembly of SU-8 microparts
Corral, S.; Zhou, Q.; Albut, A.; Franssila, S.; Tuomikoski, S.; Koivo, H.2003 Microfluidic-to-mass spectrometry interfacing with atmospheric pressure chemical ionization (APCI) microchip
Franssila, S.; Marttila, S.; Östman, P.; Kotiaho, T.; Kostiainen, R.2003 Formation of nanoporous glass layer
Grigoras, K.; Franssila, S.2003 Thickness Evaluation of Si/SiO2 Multilayers by Ellipsometry and Reflection Spectrometry
Ovchinnikov, V.; Franssila, Sami; Jiang, H.; Nasibulin, A.G.; Kauppinen, E.I.2003 Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist
Tuomikoski, S.; Franssila, S.2003 SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot
Tuomikoski, S.; del Corral, C.; Zhou, Q.; Franssila, S.2003 PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters
Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Puolanne, K.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2002 PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters
Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.2002 Optical interferometric detection of a mechanical silicon oscillator
Nera, Kaisa; Hahtela, Ossi; Franssila, Sami; Tittonen, Ilkka2002 Luminescence Study of Silicon Nanostructures Prepared by Ion Beam mixing
Ovchinnikov, V.; Sokolov, V.; Franssila, Sami2002 Electrochemiluminoimmunoassay of 2-microglobulin at disposable planar oxide-coated silicon electrodes
Spehar, Anna-Maria; Vainio, Piia; Eskola, J.; Nyman, Annika; Håkansson, Markus; Jiang, Qinghong; Franssila, Sami; Kulmala, Sakari2002 Modified porous silicon surfaces as DIOS-MS sample plates
Tuomikoski, S.; Huikko, K.; Östman, P.; Grigoras, K.; Baumann, M.; Kostiainen, R.; Franssila, S.; Kotiaho, T.2002 Microsystems education in the Nordic region
Grey, F.; Franssila, S.; Furuberg, L.; Hjort, K.2001 Bulk-Micromachined Silicon Microbridges for Infrared Emitters
Grigoras, Kestutis; Juvonen, Tuuli; Nera, Kaisa; Heikkilä, Paula; Franssila, Sami2001 Time resolved electrochemiluminoimmunoassay of hCRP at oxide-coated p-type silicon electrodes
Vainio, P.; Ala-Kleme, Timo; Väre, Leif; Håkansson, Markus; Canty, Philip; Eskola, J.; Franssila, S.; Kulmala, Sakari2001 Deep Silicon Structures by Electrochemical Etching
Grigoras, Kestutis; Niskanen, A.J.; Franssila, Sami2000 Submicron image reversal by liquid phase deposition of oxide
Niskanen, A.J.; Franssila, S.2000 Mikroelektroniikan trendit, teoksessa Elektroniikka- ja sähköalan osaamistarpeet 1997-2002
Franssila, S.1999 Text book or professional handbook or guidebook or dictionaryHandbook of silicon based MEMS materials and technologies
Tilli, Markku; Motooka, Teruaki; Airaksinen, Veli-Matti; Franssila, Sami; Paulasto-Kröckel, Mervi; Lindroos, Veikko2015 ISBN: 978-0-323-29965-7“MEMS lithography” in Handbook of silicon based MEMS materials and technologies
Franssila, Sami; Tuomikoski, Santeri; Lindroos, Veikko; Tilli, Markku; Lehto, Ari; Motooka, Teruaki2010 Mechanical properties of ultrathin ALD Al2O3 films
Rontu, Ville; Hokkanen, Ari; Franssila, Sami2017 Fabrication of superomniphobic nanoserif surfaces
Rontu, Ville; Hoshian, Sasha; Shah, Syed; Jokinen, Ville; Franssila, Sami2016 Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition
Rontu, Ville; Pitkänen, Olli; Heikkinen, Joonas; Ge, Yanling; Kordas, Krisztian; Franssila, Sami; Tuukkanen, Sampo2015 Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water
Berdova, Maria; Rontu, Ville; Sajavaara, Timo; Eskelinen, Antti-Pekka; Franssila, Sami2014
Determination of C-reactive protein by hot electron induced electrochemiluminescence on integrated electrode chips
Bioresorbable Polymer Scaffolds by Micromolding in Capillaries
Pore formation in inorganic-organic hydrid material by oxygen plasma treatment
SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips for high resolution quadrupole time-of-flight mass spectrometry
Fabrication of SOI micro- and nanoelectromechanical devices by focused ion beam doping and deep reactive ion etching
Silicon nanostructere fabrication by focused ion beam doping and cryogenic deep reactive ion etching
Atomic layer deposition on single-walled carbon nanotubes for device application
Integrated liquid chomatography-heated nebulizer microchip for mass spectrometry
Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices
Microchip atmospheric pressure photoionization-mass spectrometry of underivatizeed anabolic steroids
New sampling surfaces for desorption atmospheric pressure photoionization-mass spectrometry
Ti02-microchip combined to mass spectrometer for mimcking phase I metabolic reactions
Electrospray photoionization microchip for mass spectrometry
TiO2 microreactoe/electrospray ionization/MS for mimcking metabolic phase I reactions
Integrated chip for liquid chromatography separation and atmospheric pressure ionization for mass spectrometry
Fabrication of nanoperforated silicon membranes with tunalbe sized high aspect ratio perforations
Transparent, flexible and superhydrophobic material based on three-dimesional mushroom-shaped PDMS microstructures
Micro fuel cell with lithographically defined flowfield channels and random patterns for gas diffusion layer
Dynamic coating of SU-8 microchannels by phospholipid disks to study cell membrane associated interactions
Fabrication silicon nanoclusters with electric discharge
Fabrication of nanoclustered silicon surface with electric discharge
Optical tweezers experiments with a microfluidic laminar flow channel device
Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors
Rapid separation of protein digests on SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips
Suppression of current hysteresis in Carbon Nanotube Network transistors by ALD passivation
Etching undr the corner, inclined macropores by ICP-RIE
Analysis of selective androgen receptor modulators by gas chromatograpgy-microchip atmospheric pressure ionizationmass spectrometry
Effect of LED spectral shift on vertical resolution in stroboscopic white lifht interferometry
Stroboscopic White Light Interferometry for Dynamic Characterization of Capacitive Pressure Sensors
Microchip heated nebulizer as an atmospheric pressure thermospray ionozation source for mass spectrometry
Pattering of as-deposited, random SWNT network for FET channel application by optical lithography
Microfluidic nozzle chips as ionozation sources fof mass spectrometry
Fabrication of freestending Al2o3 nanomembranes and bridges
High-tempereture silicon microbridge actuator
Hybrid ceramic-polymer microfluidics chips for amino acid, peptide and protein CE separations
Selective surface patterning with electric discharge
Towards High-Throughput Optical Tweezers Experiments
Disposable Electrochemiluminescence Sensors of Bacterial Spores
Detection of bacterial spores on the basis of electrochemiluminescence
Novel carbon nanotube network deposition techniques for electronic device fabrication
High efficiency sample transfer between IEF and SDS-PASGE separations on a miniaturized proteomics chips
Microfaricated nebulizer chips for atmospheric pressure photoionization mass spectrometry
Microchip APPI Device for Combining GC or LC with MS
Conditions for capillary filling in microfabricated channels with hydrophilic and hydrophobic walls
Desorption Atmospheric Pressure Photoionozation
Deep plasme etching of glass for fluidic devices
Miniature Tunnel Oxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminescence Studies
Micropillar array electrospray chip for analysis of biomolecules
On-chip liquid cromatography-atmospheric pressure ionization mass spectrometry
High sensitivity micropillar electrospray ionization chip fabricated of silicon
Fully integrated, polymer-based CZE-ESI microchip for high throughput MS analysis
Monolithically integrated electrophoresis microchip with electrospray ionization mass spectrometry detection
Characterization of SU-8 microchannels for electrophoretic separations
Design and fabrication of integrated SPE-CE device for testosterone detection
SPE/CE chip in SU-8
Fabrication of porous membrane filter from p-type silicon
Atmospheric pressure photoionization with a microchip heated nebulizer
DLC-PDMS-hyprid patterning and surface treatment
Reusable multi-inlet PDMS fluidic connector
Fabrication of 3D SU-8 tips for electrospray ionization mass spectrometry
Microchip atmospheric pressure chemical ionisation-mass spectrometry
Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectromerty
Droplet based self-assembly of SU-8 microparts
Microfluidic-to-mass spectrometry interfacing with atmospheric pressure chemical ionization (APCI) microchip
Formation of nanoporous glass layer
Thickness Evaluation of Si/SiO2 Multilayers by Ellipsometry and Reflection Spectrometry
Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist
SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot
PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters
PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters
Optical interferometric detection of a mechanical silicon oscillator
Luminescence Study of Silicon Nanostructures Prepared by Ion Beam mixing
Electrochemiluminoimmunoassay of 2-microglobulin at disposable planar oxide-coated silicon electrodes
Modified porous silicon surfaces as DIOS-MS sample plates
Microsystems education in the Nordic region
Bulk-Micromachined Silicon Microbridges for Infrared Emitters
Time resolved electrochemiluminoimmunoassay of hCRP at oxide-coated p-type silicon electrodes
Deep Silicon Structures by Electrochemical Etching
Submicron image reversal by liquid phase deposition of oxide
Mikroelektroniikan trendit, teoksessa Elektroniikka- ja sähköalan osaamistarpeet 1997-2002
Handbook of silicon based MEMS materials and technologies
“MEMS lithography” in Handbook of silicon based MEMS materials and technologies
Mechanical properties of ultrathin ALD Al2O3 films
Rontu, Ville; Hokkanen, Ari; Franssila, Sami2017 Fabrication of superomniphobic nanoserif surfaces
Rontu, Ville; Hoshian, Sasha; Shah, Syed; Jokinen, Ville; Franssila, Sami2016 Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition
Rontu, Ville; Pitkänen, Olli; Heikkinen, Joonas; Ge, Yanling; Kordas, Krisztian; Franssila, Sami; Tuukkanen, Sampo2015 Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water
Berdova, Maria; Rontu, Ville; Sajavaara, Timo; Eskelinen, Antti-Pekka; Franssila, Sami2014
Mechanical properties of ultrathin ALD Al2O3 films
Fabrication of superomniphobic nanoserif surfaces
Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition
Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water
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