Sami Franssila

Professor, materials science at Aalto University School of Business

Schools

  • Aalto University School of Business

Expertise

Links

Biography

Aalto University School of Business

Research:

Micro- and nanofabrication, microfluidics, MEMS, thin films, surfaces and coatings

Teaching:

  • Academic thinking for freshmen (in Finnish; periodit I-II) CHEM-A1600
  • Microfabrication (periods III-IV) CHEM-E5155
  • Microfluidics and BioMEMS (periods III-V) CHEM-E8135
  • Advanced microtechnology (doctoral course, next fall 2017)
  • Thin film technology (doctoral course, next fall 2016)

Recent publications:

Books and book chapters

S. Franssila: Introduction to Microfabrication, 2nd edition, John Wiley & Sons, 2010

Sami Franssila & Lauri Sainiemi: “RIE”, an entry in Encyclopedia of Micro- and nanofluidics, Dongqing Li, editor, Springer, 2nd edition 2014

Sami Franssila & Santeri Tuomikoski: “MEMS lithography”, a chapter in Handbook of silicon based MEMS materials and technologies”, Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka (eds.) Elsevier, 2nd edition 2015

Franz Lärmer, Sami Franssila, Lauri Sainiemi & Kai Kolari: “DRIE”, a chapter in Handbook of silicon based MEMS materials and technologies, Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka (eds.), Elsevier, 2nd edition 2015

Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos (eds): Handbook of silicon based MEMS materials and technologies, 2nd edition, Elsevier 2015

Sami Franssila, Cristina Davis, Michael K. LeVasseur, Zhu Cao, Levent Yobas: Microfluidics and BioMEMS in silicon, a chapter in Veikko Lindroos, Teruaki Motooka, Sami Franssila, Mervi Paulasto-Krockel, Markku Tilli, Veli-Matti Airaksinen, (eds): Handbook of silicon based MEMS materials and technologies, 2nd edition, Elsevier 2015

Review articles

Cecilia A Brunello, Ville Jokinen, Prasanna Sakha, Terazono Hideyuki, Fumimasa Nomura, Tomoyuki Kaneko, Sari E Lauri, Sami Franssila, Claudio Rivera, Kenji Yasuda and Henri J Huttunen: Microtechnologies to fuel neurobiological research with nanometer precision, Journal of Nanobiotechnology, 2013, Vol 11, DOI: 10.1186/1477-3155-11-11

Ciprian Iliescu, Hayden Taylor, Matioara Avram, Jianmin Miao, Sami Franssila: A practical guide for the fabrication of micro- and nano-fluidic devices using glass and silicon, Biomicrofluidics 6, 016505 (2012)

Tuukka Verho, Chris Bower, Piers Andrew, Sami Franssila, Olli Ikkala and Robin H. A. Ras: Mechanically Durable Superhydrophobic Surfaces, Advanced Materials (2011) 23, pp. 673-678. http://dx.doi.org/10.1002/adma.201003129

Sikanen, T., Franssila, S., Kauppila, T., Kostiainen, R., Kotiaho, T., Ketola, R.: Microchip technology in mass spectrometry, Mass Spectrometry Reviews, 2010, pp.351-391, 10.1002/mas.20238

Original articles in peer reviewed journals 2013-2015

S. Hoshian, V.Jokinen, K. Hjort, R.H.A. Ras, S. Franssila: Amplified and Localized Photo-Switching of Atomic Layer Deposited TiO2 by Micro -and Nanostructuring, ACS Applied Materials and Interfaces, 2015, 7, 15593−15599

Nina Nordman, Susanna Laurén, Tapio Kotiaho, Sami Franssila, Risto Kostiainen, Tiina Sikanen: Interfacing Microchip Isoelectric Focusing with On-chip Electrospray Ionization Mass Spectrometry, accepted in Journal of Chromatography A, 2015

Sung Il Kim, Bibhuti Bhusan Sahu, Byung Mook Weon, Jeon Geon Han, Jari Koskinen, and Sami Franssila: Making porous conductive carbon films with unbalanced magnetron sputtering, Japanese Journal of Applied Physics, 2014

Hoshian, Sasha, Jokinen, Ville, Somerkivi, Villeseveri, Lokanathan, Arcot, Franssila, Sami: Robust Superhydrophobic Silicon Without a Low Surface-Energy Hydrophobic Coating, ACS Applied Materials & Interfaces, 2015, Pages: 941-949

Aneliya Karadzhinova, Timo Hilden, Maria Berdova, Rauno Lauhakangas, Jouni Heino, Eija Tuominen, Sami Franssila, Edward Häggström, Ivan Kassamakov: Calibrating an optical scanner for quality assurance of large area radiation detectors, Measurement Science and Technology, 2014

Gianmario Scotti, Ville Matilainen, Petri Kanninen, Heidi Piili, Antti Salminen, Tanja Kallio, Sami Franssila: Laser Additive Manufacturing of Micro Fuel Cells, in J.Power Sources, 2014

Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila: Simple Stacking Method for Silicon Micro Fuel Cells, Micromachines, 2014

Maria Berdova, Oili M. E. Ylivaara, Ville Rontu, Pekka T. Törmä, Riikka L. Puurunen, Sami Franssila: Fracture properties of atomic layer deposited aluminum oxide free-standing membranes, J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015

Berdova, Maria; Perros, Alexander; Kim, Wonjae; Riikonen, Juha; Ylitalo, Tuomo; Heino, Jouni; Li, Changfeng; Kassamakov, Ivan; Haeggstroem, Edward; Lipsanen, Harri; Franssila, Sami: Exceptionally Strong and Robust Millimeter-Scale Graphene-Alumina Composite Membranes, Nanotechnology 25 (2014) 355701 (7pp)

J. Lyytinen, M. Berdova, P. Hirvonen, X.W. Liu , S. Franssila, Q. Zhou and J. Koskinen: Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres, RSC Advances, 2014

Akanksha Singh, Gianmario Scotti, Tiina Sikanen, Ville P. Jokinen, Sami Franssila: Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips, Micromachines 2014, 5(3), 472-485; doi:10.3390/mi5030472

Ville-Veikko Telkki, Vladimir V. Zhivonitko, Anne Selent, Gianmario Scotti, Jarmo Leppäniemi, Sami Franssila, Igor V. Koptyug: Lab-on-a-Chip Reactor Imaging with Unprecedented Chemical Resolution by Hadamard-Encoded Remote Detection NMR, Angewandte Chemie, Vol 126 (2014) pp. 11471–11475

Nordman, Nina; Barrios-Lopez, Brianda; Laurén, Susanna; Suvanto, Pia; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto; Sikanen, Tiina: Shape-Anchored Porous Polymer Monoliths for Integrated Online Solid-Phase Extraction-Microchip Electrophoresis-Electrospray Ionization Mass Spectrometry, Electrophoresis, 2014

Juan Li, Xuelin Tian, Alexander Pyymaki Perros, Sami Franssila, Ville Jokinen: Self-Propelling and Positioning of Droplets Using Continuous Topography Gradient Surface, Advanced Materials Interfaces (admi.201400001R1), 2014

Maryam Borghei, Gianmario Scotti, Petri Kanninen, T. Weckman, Iyya V. Anoshkin, Albert G. Nasibulin, Sami Franssila, Esko I. Kauppinen, Virginia Ruiz: Enhanced performance of silicon microfabricated DMFC by PtRu anode catalysis supported on carbon nanotubes, Energy 65 (2014) pp. 612-620

Maria Berdova, Tuomo Ylitalo, Ivan Kassamakov, Jouni Heino, Pekka T. Törmä, Lauri Kilpi, Helena Ronkainen, Jari Koskinen, Edward Hæggström, Sami Franssila: Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques, Acta Materialia 66 (2014) 370–377

Jussi Lyytinen, Maria Berdova, Sami Franssila, Jari Koskinen: Adhesion Testing of ALD TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres, J.Vac.Sci.Technol. A 32, 01A102 (2014); doi: 10.1116/1.4827197

Kalle Hanhijärvi, Ivan Kassamakov, Juha Aaltonen, Ville Heikkinen, Lauri Sainiemi, Sami Franssila and Edward Hæggström: Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry, IEEE-ASME Transactions on Mechatronics 18 (2013) pp. 1418-1420, DOI: 10.1109/TMECH.2012.2235080

Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila: Bulk aluminum micromachining for high performance micro fuel cells, J.MEMS 2014 Vol. 23, No. 2, p. 372

M. Wirtssohn, M. Haapala, L. Sainiemi, S. Franssila: Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry, J. Micromech. Microeng. 23 (2013) 074006 (6pp)

Ville Jokinen, Pia Suvanto, Anshul Rao Garapaty, Jussi Lyytinen, Jari Koskinen and Sami Franssila: Durable Superhydrophobicity in Embossed CYTOP Fluoropolymer Micro and Nanostructures; Colloids and Surfaces A: Physicochem. Eng. Aspects 434 (2013) 207– 212

Maria Berdova, Jussi Lyytinen, Kestutis Grigoras, Anu Baby, Lauri Kilpi, Helena Ronkainen, Sami Franssila, Jari Koskinen: characterization of thin film adhesion by a MEMS shaft-loading blister testing, J. Vac. Sci. Technol. A 31, 031102 (2013); doi: 10.1116/1.4801921

Gianmario Scotti, Daniel Trusheim, Petri Kanninen, Denys Naumenko, Malte Shulz-Ruhtenberg, Valentinas Snitka, Tanja Kallio and Sami Franssila: Picosecond Laser-Ablation for Silicon Micro Fuel Cell, Fabrication, J. Micromech. Microeng. 23 (2013) 055021 (14pp)

Vladimir V. Zhivonitko, Ville-Veikko Telkki, Jarmo Leppäniemi, Gianmario Scotti, Sami Franssila &Igor V. Koptyug: Remote detection NMR imaging of gas phase hydrogenation in microfluidic chips, Lab Chip, 2013, pp. 1554 - 1561

Ivan Kassamakov, Kestutis Grigoras, Ville Heikkinen, Kalle Hanhijärvi, Juha Aaltonen, Sami Franssila and Edward Hæggström: Non-destructive inspection of buried channels and cavities in silicon, J.MEMS 2013, p. 438

Ville Jokinen, Prasanna Sakha, Pia Suvanto, Claudio Rivera, Sami Franssila, Sari E. Lauri and Henri J. Huttunen: A Microfluidic Chip for Axonal Isolation and Electrophysiological Measurements, Journal of Neuroscience Methods, 212 (2013) pp. 276– 282

Peer-reviewed scientific articles

Journal article-refereed, Original research

Friction and Wetting Transitions of Magnetic Droplets on Micropillared Superhydrophobic Surfaces

Al-Azawi, Anas; Latikka, Mika; Jokinen, Ville; Franssila, Sami; Ras, Robin H.A.
2017 in SMALL (Wiley-VCH Verlag)
ISSN: 1613-6810

Thiol-ene micropillar array electrospray ionization platform for zeptomole level bioanalysis

Lipponen, Katriina; Tähkä, Sari; Sikanen, T.; Jokinen, V.; Tatikonda, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.
2017 in ANALYST (Royal Society of Chemistry)
ISSN: 0003-2654

Electrochemical Characterization of the Microfabricated Electrochemical Sensor-Array System

Pitman, Kätlin; Raud, Merlin; Scotti, Gianmario; Jokinen, Ville; Franssila, Sami; Nerut, Jaak; Lust, Enn; Kikas, Timo
2017 in ELECTROANALYSIS (Wiley-VCH Verlag)
ISSN: 1040-0397

Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications

Berdova, Maria; Wiemer, Claudia; Lamperti, Alessio; Tallarida, Grazia; Cianci, Elena; Lamagna, Luca; Losa, Stefano; Rossini, Silvia; Somaschini, Roberto; Gioveni, Salvatore; Fanciulli, Marco; Franssila, Sami
2016 in APPLIED SURFACE SCIENCE (Elsevier Science B.V.)
ISSN: 0169-4332

Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition

Berdova, Maria; Liu, Xuwen; Wiemer, Claudia; Lamperti, Alessio; Tallarida, Grazia; Cianci, Elena; Fanciulli, Marco; Franssila, Sami
2016 in JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (AVS Science and Technology Society)
ISSN: 0734-2101

Inkjet printed silver electrodes on macroporous paper for a paper-based isoelectric focusing device

Henriques Gaspar, Cristina; Sikanen, Tiina; Franssila, Sami; Jokinen, Ville
2016 in BIOMICROFLUIDICS (American Institute of Physics)
ISSN: 1932-1058

Robust hybrid elastomer/metal-oxide superhydrophobic surfaces

Hoshian, Sasha; Jokinen, Ville; Franssila, Sami
2016 in SOFT MATTER (ROYAL SOC CHEMISTRY)
ISSN: 1744-683X

Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

Hoshian, Sasha; Henriques Gaspar, Cristina; Vasara, Teemu; Jahangiri, Farzin; Jokinen, Ville; Franssila, Sami
2016 in MICROMACHINES (Multidisciplinary Digital Publishing Institute (MDPI))
ISSN: 2072-666X

UV-ozone patterning of micro-nano fibrillated cellulose (MNFC) with alkylsilane self-assembled monolayers

Kämäräinen, Tero; Arcot, Lokanathan R.; Johansson, Leena-Sisko; Campbell, Joseph; Tammelin, Tekla; Franssila, Sami; Laine, Janne; Rojas, Orlando J.
2016 in CELLULOSE (SPRINGER)
ISSN: 0969-0239

Cellulose Nanofibril Film as a Piezoelectric Sensor Material

Rajala, Satu; Siponkoski, Tuomo; Sarlin, Essi; Mettänen, Marja; Vuoriluoto, Maija; Pammo, Arno; Juuti, Jari; Rojas, Orlando J.; Franssila, Sami; Tuukkanen, Sampo
2016 in ACS APPLIED MATERIALS AND INTERFACES (AMER CHEMICAL SOC)
ISSN: 1944-8244

Axonal Kainate Receptors Modulate the Strength of Efferent Connectivity by Regulating Presynaptic Differentiation

Sakha, Prasanna; Vesikansa, Aino; Orav, Ester; Heikkinen, Joonas; Kukko-Lukjanov, Tiina-Kaisa; Shintyapina, Alexandra; Franssila, Sami; Jokinen, Ville; Huttunen, Henri J.; Lauri, Sari E.
2016 in FRONTIERS IN CELLULAR NEUROSCIENCE (FRONTIERS MEDIA SA)
ISSN: 1662-5102

Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

Berdova, Maria; Ylivaara, Oili M. E.; Rontu, Ville; Törmä, Pekka T.; Puurunen, Riikka; Franssila, Sami
2015 in JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (AVS Science and Technology Society)
ISSN: 0734-2101

Amplified and Localized Photoswitching of TiO2 by Micro- and Nanostructuring

Hoshian, Sasha; Jokinen, Ville; Hjort, Klas; Ras, Robin H. A.; Franssila, Sami
2015 in ACS APPLIED MATERIALS AND INTERFACES (AMER CHEMICAL SOC)
ISSN: 1944-8244

Robust Superhydrophobic Silicon Without a Low Surface-Energy Hydrophobic Coating

Hoshian, Sasha; Jokinen, Ville; Somerkivi, Villeseveri; Arcot Raghupathi, Lokanathan; Franssila, Sami
2015 in ACS APPLIED MATERIALS AND INTERFACES (AMER CHEMICAL SOC)
ISSN: 1944-8244

Making porous conductive carbon films with unbalanced magnetron sputtering

Kim, Sung II; Sahu, Bibhuti Bhusan; Weon, Byung Mook; Han, Jeon Geon; Koskinen, Jari; Franssila, Sami
2015 in JAPANESE JOURNAL OF APPLIED PHYSICS (Japan Society of Applied Physics)
ISSN: 0021-4922

Interfacing microchip isoelectric focusing with on-chip electrospray ionization mass spectrometry

Nordman, Nina; Lauren, Susanna; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto; Sikanen, Tiina
2015 in JOURNAL OF CHROMATOGRAPHY A (Elsevier Science B.V.)
ISSN: 0021-9673

Shape-Anchored Porous Polymer Monoliths for Integrated Online Solid-Phase Extraction-Microchip Electrophoresis-Electrospray Ionization Mass Spectrometry

Nordman, Nina; Barrios-Lopez, Brianda; Laurén, Susanna; Suvanto, Pia; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto; Sikanen, Tiina
2015 in ELECTROPHORESIS (Wiley-VCH Verlag)
ISSN: 0173-0835

Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques

Berdova, Maria; Ylitalo, Tuomo; Kassamakov, Ivan; Heino, Jouni; Törmä, Pekka; Kilpi, Lauri; Ronkainen, Helena; Koskinen, Jari; Hæggström, Edward; Franssila, Sami
2014 in ACTA MATERIALIA (PERGAMON-ELSEVIER SCIENCE LTD)
ISSN: 1359-6454

Exceptionally strong and robust millimeter-scale graphenealumina composite membranes

Berdova, Maria; Perros, Alexander; Kim, Wonjae; Riikonen, Juha; Ylitalo, Tuomo; Heino, Jouni; Li, Changfeng; Kassamakov, Ivan; Hæggström, Edward; Lipsanen, Harri; Franssila, Sami
2014 in NANOTECHNOLOGY (IOP PUBLISHING LTD)
ISSN: 0957-4484

Corrigendum Exceptionally strong and robust millimeterscale graphene-alumina composite (Nanotechnology (2014) 25, (355701))

Berdova, Maria; Pyymaki Perros, Alexander; Kim, Won; Riikonen, Juha; Ylitalo, Tuomo; Heino, Jouni; Li, Changfeng; Kassamakov, Ivan; Hæggström, Edward; Lipsanen, Harri; Franssila, Sami
2014 in NANOTECHNOLOGY (IOP PUBLISHING LTD)
ISSN: 0957-4484

Enhanced performance of a silicon microfabricated direct methanol fuel cell with PtRu catalysts supported on few-walled carbon nanotubes

Borghei, Maryam; Scotti, Gianmario; Kanninen, Petri; Weckman, Timo; Anoshkin, Ilya V.; Nasibulin, Albert G.; Franssila, Sami; Kauppinen, Esko I.; Kallio, Tanja; Ruiz, Virginia
2014 in ENERGY (PERGAMON-ELSEVIER SCIENCE LTD)
ISSN: 0360-5442

MME 2013 Editorial Preface

Franssila, Sami; Kolari, Kai
2014 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)
ISSN: 0960-1317

Calibrating an optical scanner for quality assurance of large area radiation detectors

Karadzhinova, Aneliya; Hilden, Timo; Berdova, Maria; Lauhakangas, Rauno; Heino, Jouni; Tuominen, Eija; Franssila, Sami; Häggström, Edward; Kassamakov, Ivan
2014 in MEASUREMENT SCIENCE AND TECHNOLOGY (IOP PUBLISHING LTD)
ISSN: 0957-0233

Self-Propelling and Positioning of Droplets Using Continuous Topography Gradient Surface

Li, Juan; Tian, X.L.; Perros, A. P.; Franssila, Sami; Jokinen, Ville
2014 in ADVANCED MATERIALS INTERFACES (WILEY-BLACKWELL)

Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres

Lyytinen, Jussi; Berdova, Maria; Franssila, Sami; Koskinen, Jari
2014 in JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (AVS Science and Technology Society)
ISSN: 0734-2101

Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres

Lyytinen, Jussi; Berdova, Maria; Hirvonen, Petri; Liu, Xuwen; Franssila, Sami; Zhou, Quan; Koskinen, Jari
2014 in RSC ADVANCES (ROYAL SOC CHEMISTRY)

Simple Stacking Methods for Silicon Micro Fuel Cells

Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami
2014 in MICROMACHINES (Multidisciplinary Digital Publishing Institute (MDPI))

Bulk-Aluminum Microfabrication for Micro Fuel Cells

Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami
2014 in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (Institute of Electrical and Electronics Engineers Inc.)
ISSN: 1057-7157

A micro heat exchanger microfabricated from bulk aluminium

Scotti, G.; Franssila, S.
2014 in Journal of Physics: Conference Series (IOP Publishing Ltd.)
ISSN: 1742-6588

Laser Additive Manufacturing of Stainless Steel Micro Fuel Cells

Scotti, Gianmario; Matilainen, Ville; Kanninen, Petri; Piili, Heidi; Salminen, Antti; Kallio, Tanja; Franssila, Sami
2014 in JOURNAL OF POWER SOURCES (Elsevier Science B.V.)
ISSN: 0378-7753

Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips

Singh, Akanksha; Scotti, Gianmario; Sikanen, Tiina; Jokinen, Ville; Franssila, Sami
2014 in MICROMACHINES (Multidisciplinary Digital Publishing Institute (MDPI))

Lab-on-a-Chip Reactor Imaging with Unprecedented Chemical Resolution by Hadamard-Encoded Remote Detection NMR

Telkki, Ville-Veikko; Zhivonitko, Vladimir V.; Selent, Anne; Scotti, Gianmario; Leppäniemi, Jarmo; Franssila, Sami; Koptyug, Igor V.
2014 in ANGEWANDTE CHEMIE (Wiley-VCH Verlag GmbH & Co. KGaA)
ISSN: 1433-7851

Characterization of thin film adhesion by MEMS shaft-loading blister testing

Berdova, Maria; Lyytinen, Jussi; Grigoras, Kestuti; Baby, Anu; Kilpi, Lauri; Ronkainen, Helena; Franssila, Sami; Koskinen, Jari
2013 in JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (AVS Science and Technology Society)
ISSN: 0734-2101

Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry

Hanhijarvi, Kalle; Kassamakov, Ivan; Aaltonen, Juha; Heikkinen, Ville; Sainiemi, Lauri; Franssila, Sami; Haeggstrom, Edward
2013 in IEEE-ASME TRANSACTIONS ON MECHATRONICS (Institute of Electrical and Electronics Engineers Inc.)
ISSN: 1083-4435

Durable superhydrophobicity in embossed CYTOP fluoropolymer micro and nanostructures

Jokinen, Ville; Suvanto, Pia; Garapaty, Anshul Rao; Lyytinen, Jussi; Koskinen, Jari; Franssila, Sami
2013 in COLLOIDS AND SURFACES A: PHYSICOCHEMICAL AND ENGINEERING ASPECTS (Elsevier Science B.V.)
ISSN: 0927-7757

A Microfluidic Chip for Axonal Isolation and Electrophysiological Measurements

Jokinen, Ville; Sakha, Prasanna; Suvanto, Pia; Rivera, Claudio; Franssila, Sami; Lauri, Sari E.; Huttunen, Henri J.
2013 in JOURNAL OF NEUROSCIENCE METHODS (Elsevier)
ISSN: 0165-0270

Cell adhesion and osteogenic differentiation on three-dimensional pillar surfaces

Kaivosoja, Emilia; Suvanto, Pia; Barreto, Goncalo; Aura, Susanna; Soininen, Antti; Franssila, Sami; Konttinen, Yrjo T.
2013 in JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART A (WILEY-LISS)
ISSN: 1549-3296

Non-destructive inspection of buried channels and cavities in silicon

Kassamakov, Ivan; Grigoras, Kestutis; Heikkinen, Ville; Hanhijärvi, Kalle; Aaltonen, Juha; Franssila, Sami; Hæggström, Edward
2013 in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (Institute of Electrical and Electronics Engineers Inc.)
ISSN: 1057-7157

Picosecond laser ablation for silicon micro fuel cell fabrication

Scotti, Gianmario; Trusheim, Daniel; Kanninen, Petri; Naumenko, Denys; Shulz-Ruhtenberg, Malte; Snitka, Valentinas; Kallio, Tanja; Franssila, Sami
2013 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)
ISSN: 0960-1317

Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry

Wirtssohn, M.; Haapala, M.; Sainiemi, Lauri; Franssila, Sami
2013 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)
ISSN: 0960-1317

Remote detection NMR imaging of gas phase hydrogenation in microfluidic chips

Zhivonitko, Vladimir V.; Telkki, Ville-Veikko; Leppaniemi, Jarmo; Scotti, Gianmario; Franssila, Sami; Koptyug, Igor V.
2013 in LAB ON A CHIP (Royal Society of Chemistry)
ISSN: 1473-0197

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Hanhijärvi, K.; Kassamakov, I.; Heikkinen, V.; Aaltonen, J.; Sainiemi, L.; Grigoras, K.; Franssila, S.; Hæggström, E.
2012 in OPTICS LETTERS (OPTICAL SOC AMER)
ISSN: 0146-9592

A practical guide for the fabrication of microfluidic devices using glass and silicon

Iliescu, Ciprian; Taylor, Hayden; Avram, Marioara; Miao, Jianmin; Franssila, Sami
2012 in BIOMICROFLUIDICS (American Institute of Physics)

Oxygen and nitrogen plasma hydrophilization and hydrophobic recovery of polymers

Jokinen, Ville; Suvanto, Pia; Franssila, Sami
2012 in BIOMICROFLUIDICS (American Institute of Physics)

Rotating multitip micropillar array electrospray ionization-mass spectrometry for rapid analysis and high-throughput screening

Nissila, Teemu; Backman, Nina; Kolmonen, Marjo; Leinonen, Antti; Kiriazis, Alexandros; Yli-Kauhaluoma, Jari; Sainiemi, Lauri; Kostiainen, Risto; Franssila, Sami; Ketola, Raimo A.
2012 in INTERNATIONAL JOURNAL OF MASS SPECTROMETRY (Elsevier)
ISSN: 1387-3806

A microfabricated micropillar liquid chromatographic chip monolithically integrated with electrospray ionization tip

Sainiemi, Lauri; Nissilä, Teemu; Ketola, Raimo A.; Franssila, Sami
2012 in LAB ON A CHIP (Royal Society of Chemistry)
ISSN: 1473-0197

Integration of carbon felt gas diffusion layers in silicon micro fuel cells

Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami
2012 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)
ISSN: 0960-1317

Microchip capillary electrophoresis-electrospray ionization-mass spectrometry of intact proteins using uncoated Ormocomp microchips

Sikanen, Tiina; Aura, Susanna; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto
2012 in ANALYTICA CHIMICA ACTA (Elsevier)
ISSN: 0003-2670

Reversible Switching between Superhydrophobic States on a Hierarchically Structured Surface

Verho, Tuukka; Korhonen, Juuso T.; Sainiemi, Lauri; Jokinen, Ville; Bower, Chris; Franze, Kristian; Franssila, Sami; Andrew, Piers; Ikkala, Olli; Ras, Robin H.A.
2012 in PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA (NATL ACAD SCIENCES)
ISSN: 0027-8424

Porous inorganic-organic hybrid material by oxygen plasma treatment

Aura, Susanna; Jokinen, Ville; Laitinen, Mikko; Sajavaara, Timo; Franssila, Sami
2011 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)
ISSN: 0960-1317

Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

Grigoras, Kestutis; Zavodchikova, Marina Y.; Nasibulin, Albert G.; Kauppinen, Esko I.; Ermolov, Vladimir; Franssila, Sami
2011 in JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY (AMER SCIENTIFIC PUBLISHERS)
ISSN: 1533-4880

Controlled Lateral Spreading and Pinning of Oil Droplets Based on Topography and Chemical Patterning

Jokinen, Ville; Sainiemi, Lauri; Franssila, Sami
2011 in LANGMUIR (AMER CHEMICAL SOC)
ISSN: 0743-7463

Engineered droplets for dried droplet solute deposition by mass spectrometric imaging

Jokinen, Ville; Franssila, Sami; Baumann, Marc
2011 in MICROFLUIDICS AND NANOFLUIDICS (Springer Verlag)
ISSN: 1613-4982

Feasibility of capillary liquid chromatography-microchip-atmospheric pressure photoionization-mass spectrometry for pesticide analysis in tomato

Kruve, Anneli; Haapala, Markus; Saarela, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Ketola, Raimo A.
2011 in ANALYTICA CHIMICA ACTA (Elsevier)
ISSN: 0003-2670

Superhydrophobic Tracks for Low-Friction, Guided Transport of Water Droplets

Mertaniemi, Henrikki; Jokinen, Ville; Sainiemi, Lauri; Franssila, Sami; Marmur, Abraham; Ikkala, Olli; Ras, Robin H.A.
2011 in ADVANCED MATERIALS (WILEY-V C H VERLAG GMBH)
ISSN: 0935-9648

Integrated microelectrode hot electron electrochemiluminescent sensor for microfluidic applications

Niskanen, Antti J.; Ylinen-Hinkka, Tiina; Kulmala, Sakari; Franssila, Sami
2011 in SENSORS AND ACTUATORS B: CHEMICAL (Elsevier)
ISSN: 0925-4005

Integrated photocatalytic micropillar nanoreactor electrospray ionization chip for mimicking phase I metabolic reactions

Nissila, Teemu; Sainiemi, Lauri; Karikko, Mika-Matti; Kemell, Marianna; Ritala, Mikko; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.
2011 in LAB ON A CHIP (Royal Society of Chemistry)
ISSN: 1473-0197

Rapid and sensitive drug metabolism studies by SU-8 microchip capillary electrophoresis-electrospray ionization mass spectrometry

Nordman, Nina; Sikanen, Tiina; Moilanen, Maria-Elisa; Aura, Susanna; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto
2011 in JOURNAL OF CHROMATOGRAPHY A (Elsevier Science B.V.)
ISSN: 0021-9673

Non-Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication

Sainiemi, Lauri; Jokinen, Ville; Shah, Ali; Shpak, Maksim; Aura, Susanna; Suvanto, Pia; Franssila, Sami
2011 in ADVANCED MATERIALS (WILEY-V C H VERLAG GMBH)
ISSN: 0935-9648

Microfabricated silicon platform with 60 microfluidic chips for rapid mass spectrometric analysis

Sainiemi, Lauri; Nissilä, Teemu; Kostiainen, Risto; Ketola, Raimo A.; Franssila, Sami
2011 in LAB ON A CHIP (Royal Society of Chemistry)
ISSN: 1473-0197

Lithography-free fabrication of carbon nanotube network transistors

Timmermans, Marina Y.; Grigoras, Kestutis; Nasibulin, Albert G.; Hurskainen, Ville; Franssila, Sami; Ermolov, Vladimir; Kauppinen, Esko I.
2011 in NANOTECHNOLOGY (IOP PUBLISHING LTD)
ISSN: 0957-4484

Mechanically Durable Superhydrophobic Surfaces

Verho, Tuukka; Bower, Chris; Andrew, Piers; Franssila, Sami; Ikkala, Olli; Ras, Robin H.A.
2011 in ADVANCED MATERIALS (WILEY-V C H VERLAG GMBH)
ISSN: 0935-9648

Immunoassay of C-reactive protein by hot electron induced electrochemiluminescence using integrated electrodes with hydrophobic sample confinement

Ylinen-Hinkka, Tiina; Niskanen, Antti J.; Franssila, Sami; Kulmala, Sakari
2011 in ANALYTICA CHIMICA ACTA (Elsevier)
ISSN: 0003-2670

Feasibility of capillary liquid chromatography/microchip atmospheric pressure photoionization mass spectrometry in analyzing anabolic steroids in urine samples

Ahonen, Linda; Haapala, Markus; Saarela, Ville; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto
2010 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)
ISSN: 0951-4198

Feasability of SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microfluidic chips in the analysis of the human cell lysates

Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto
2010 in ELECTROPHORESIS (Wiley-VCH Verlag)
ISSN: 0173-0835

Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

Chekurov, Nikolai; Grigoras, Kestutis; Sainiemi, Lauri; Peltonen, Antti; Tittonen, Ilkka; Franssila, Sami
2010 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)
ISSN: 0960-1317

Integrated liquid chromatography - heated nebulizer microchip for mass spectrometry

Haapala, Markus; Saarela, Ville; Pól, Jaroslav; Kolari, Kai; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto
2010 in ANALYTICA CHIMICA ACTA (Elsevier)
ISSN: 0003-2670

Feasibility of gas chromatography-microchip atmospheric pressure photoionization-mass spectrometry in analysis of anabolic steroids

Hintikka, Laura; Haapala, Markus; Franssila, Sami; kuuranne, Tiia; Leinonen, Antti; Kostiainen, Risto
2010 in JOURNAL OF CHROMATOGRAPHY A (Elsevier Science B.V.)
ISSN: 0021-9673

Environmental and food analysis by desorption atmospheric pressure photoionizationmass spectrometry

Luosujärvi, Laura; Kanerva, Sanna; Saarela, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Kaupplia, Tiina
2010 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)
ISSN: 0951-4198

Deposited dielectrics on metal thin films using silicon and glass substrates for hot electron-induced electrochemiluminescence

Niskanen, Antti J.; Ylinen-Hinkka, Tiina; Pusa, Matti; Kulmala, Sakari; Franssila, Sami
2010 in THIN SOLID FILMS (Elsevier Science)
ISSN: 0040-6090

Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors

Niskanen, Antti J.; Varpula, Aapo; Utriainen, Mikko; Natarajan, Gomathi; Cameron, David C; Novikov, Sergey; Airaksinen, Veli-Matti; Sinkkonen, Juha; Franssila, Sami
2010 in SENSORS AND ACTUATORS B: CHEMICAL (Elsevier)
ISSN: 0925-4005

Ionspray Microchip

Pól, Jaroslav; Kauppila, Tiina J.; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto
2010 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)
ISSN: 0951-4198

Silicon nanograss as micro fuel cell gas diffusion layer

Scotti, Gianmario; Kanninen, P.; Makinen, M.; Kallio, T.; Franssila, S.
2010 in MICRO AND NANO LETTERS (Institution of Engineering and Technology)

Temperature measurements of a glowing microbridge

Shpak, Maksim; Sainiemi, Lauri; Ojanen, Maija; Kärhä, Petri; Heinonen, Martti; Franssila, Sami; Ikonen, Erkki
2010 in APPLIED OPTICS (OPTICAL SOC AMER)
ISSN: 1559-128X

Optical Temperature Measurements of Silicon Microbridge Emitters

Shpak, Maksim; Sainiemi, Lauri; Ojanen, Maija; Kärhä, Petri; Heinonen, Martti; Franssila, Sami; Ikonen, Erkki
2010 in APPLIED OPTICS (OPTICAL SOC AMER)
ISSN: 1559-128X

Hybrid Ceramic-Polymers New, Non-Biofouling and Optically Transparent Materials for Microfluidics

Sikanen, Tiina; Aura, Susanna; Heikkilä, Liisa; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto
2010 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)
ISSN: 0003-2700

Dynamic coating of SU-8 microfluidic chips with phospholipid disks

Sikanen, Tiina; Wiedmer, Susanne; Heikkilä, Liisa; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio
2010 in ELECTROPHORESIS (Wiley-VCH Verlag)
ISSN: 0173-0835

Fabrication of nanocluster silicon surface with electric discharge and the application in desorption/ionization on silicon-mass spectrometry (DIOS-MS)

Suni, Niina; Haapala, Markus; Främ, Elina; Härkönen, Emma; Ritala, Mikko; Sainiemi, Lauri; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto
2010 in LAB ON A CHIP (Royal Society of Chemistry)
ISSN: 1473-0197

UV-enbossed inorganic-organic hybrid nanopillars for bioapplications

Aura, Susanna; Jokinen, Ville; Sainiemi, Lauri; Baumann, Marc; Franssila, sami
2009 in Journal of Nanosciense and Nanotechnology (Royal Society of Chemistry)

The fabrication of silicon nanostructures by local gallium implantation and cryogenic deep reactive ion etching Ion Etching

Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka
2009 in NANOTECHNOLOGY (IOP PUBLISHING LTD)

Etching under the corner-inclined macropores by reactive ion etching

Grigoras, Kestutis; Franssila, Sami
2009 in Physica Status Solidi A (IOP PUBLISHING LTD)

Microchip atmospheric pressure photoionization for analysis of pertoleum by FT-IVR mass spectrometry

Haapala, Markus; Purcell, Jeremiah M.; Saarela, Ville; Franssila, Sami; Rodgers, Ryan P.; Hendrickson, Christopher L.; Kotiaho, Tapio; Marshall, Alan; Kostiainen, Risto
2009 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)

Silicon-glass instrumented solid-phase extraction-zone electrophoresis microchip with thin amorphous silicon filn electrodes: perfomance in immunoaffinity analysis

Hokkanen, Ari; Siren, Heli; Amundsen, Lotta; Kolari, Kai; Franssila, Sami; Tuomikoski, Santeri; Stuns, Ingmar; Rovio, Stella; Nevanen, Tarja; Takkinen, Kristiina; Söderlund, Hans
2009 in Microsystems Technology (AMER CHEMICAL SOC)

Microstructured surfaces for directional wetting

Jokinen, Ville; Leinikka, Marianne; Franssila, Sami
2009 in ADVANCED MATERIALS (WILEY-V C H VERLAG GMBH)

Surface assisted laser desorption/ionization on two-layered amorhous silicon coated hydrid nanostructures

Jokinen, Ville; Aura, Susanna; Luosujärvi, Laura; Sainiemi, Lauri; Kotiaho, Tapani; Franssila, Sami; Baumann, Marc
2009 in JOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY (Springer New York)

Microchip heated nebulizer as an atmospheric pressure thermospray ionization source for mass spectrometry

Keski-Rahkonen, P.; Haapala, Markus; Saarela, Ville; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami; Auriola, S.
2009 in RCM (Springer New York)

Electronic cooling a submicron-sized metallic beam

Muhonen, Juha; Niskanen, Antti; Meschke, Matthias; Pashkin, Yury; Tsai, J.S.; Sainiemi, L.; Franssila, S.; Pekola, Jukka
2009 in APPLIED PHYSICS LETTERS (AMERICAN INSTITUTE OF PHYSICS)
ISSN: 0003-6951

Ultrathin tunnel insulator films on silicon for electrochemiluminescence studies

Niskanen, A.J.; Ylinen-Hinkka, T.; Kulmala, Sakari; Franssila, S.
2009 in THIN SOLID FILMS (Elsevier Science)
ISSN: 0040-6090

Ultrathin insulating films on silicon foe electrochemiluminescence

Niskanen, Antti; Ylinen-Hinkka, Tiina; Kulmala, Sakari; Franssila, Sami
2009 in THIN SOLID FILMS (Elsevier Science)

Fully polymeric integrated microreactor/electrospray ionozation chip for on-chip digestion and mass spectrometric analysis

Nissilä, Teemu; Sainiemi, Lauri; Franssila, Sami; Ketola, Raimo
2009 in Sensors and Actuators B (Elsevier Science)

Microflidic heated gas jet shape analysis by temperature scanning

Saarela, Ville; Haapala, Markus; Kostiainen, Risto; Kotiaho, Tapani; Franssila, Sami
2009 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)

Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses

Sainiemi, Lauri; Grigoras, Kestas; Kassamakov, Ivan; Hanhijärvi, Kalle; Aaltonen, Juha; Fan, Ji; Saarela, Ville; Haeggström, Edward; Franssila, Sami
2009 in SENSORS AND ACTUATORS A: PHYSICAL (Elsevier)

Suspended nanostructured alumina membranes

Sainiemi, Lauri; Grigoras, Kestas; Franssila, Sami
2009 in NANOTECHNOLOGY (IOP PUBLISHING LTD)

Carbon nanotube thin film transistors based on aerosol methods

Zavodchikova, Marina; Kulmala, Tero; Nasibulin, Albert G.; Ermolov, Vladimir; Franssila, Sami; Grigoras, Kestutis; Kauppinen, Esko I.
2009 in NANOTECHNOLOGY (IOP PUBLISHING LTD)

Development and application of a miniaturised gel eletrophoresis device for protein analysis

Demianova, Z.; Pöysä, E.; Ihalainen, S.; Aura, S.; Shimmo, M.; Franssila, S.; Baumann, M.
2008 in MOLECULAR BIOSYSTEMS (Royal Society of Chemistry)

Investigation of sub-nm ALD aluminum oxide films by plasma assisted etch-through

Grigoras, K.; Franssila, S.; Airaksinen, V-M.
2008 in THIN SOLID FILMS (Elsevier Science)

Coating of nanoporous membranes: atomic layer deposition versus sputtering

Grigoras, K.; Airaksinen, V-M; Franssila, S.
2008 in NANOTECHNOLOGY (IOP PUBLISHING LTD)

Capillary filling conditions of square-shaped microfluidic channels

Jokinen, Ville; Franssila, Sami
2008 in MICROFLUIDICS AND NANOFLUIDICS (Springer Verlag)

Complex droplets on chemically modified silicon nanograss

Jokinen, Ville; Sainiemi, Lauri; Franssila, Sami
2008 in ADVANCED MATERIALS (WILEY-V C H VERLAG GMBH)
ISSN: 0935-9648

Direct Analysis of Illicit Drugs by Desorption Atmospheric Pressure Photoionization

Kauppila, Tiina; Arvola, Ville; Haapala, Markus; Pol, Jaroslav; Aalberg, Laura; Saarela, Ville; Franssila, Sami
2008 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)

Deep plasma etching of glass for fluidic devices with different mask materials

Kolari, K.; Saarela, V.; Franssila, S.
2008 in Microengineering (JOHN WILEY & SONS LTD)

Desorption and Ionization Mechanisms in Desorption Atmospheric Pressure Photoionization

Luosujärvi, L.; Arvola, V.; Haapala, M.; Pol, J.; Saarela, V.; Franssila, S.; Kotiaho, T.; Kostiainen, R.; Kauppila, TJ
2008 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)

Gas chromatography-mass spectrometry of polychlorinated biphenyls using atmospheric pressure chemical ionization and atmospheric pressure photoionization microchip

Luosujärvi, Laura; Karikko, Mika-Matti; Haapala, Markus; Saarela, Ville; Huhtala, Sami; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Kauppila, Tiina
2008 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)

Fabrication and electrical, mechanical and optical characterization of SOI thermal microbridge actuators

Sainiemi, Lauri; Kassamakov, Ivan; Hanhijärvi, Kalle; Ji, Fan; Saarela, V.; Franssila, Sami
2008 in Sensor Actuators (JOHN WILEY & SONS LTD)

Fabrication and characterization of silicon micropillar array electrospray ionization chip

Sainiemi, L.; Nissilä, T.; Jokinen, V.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.; Ketola, R.A; Franssila, S.
2008 in Sensors & Actuators B Chemical (JOHN WILEY & SONS LTD)

Fabrication and fluidic characterization of silicon micropillar array electrospray ionization chip

Sainiemi, Lauri; Nissilä, Teemu; Jokinen, Ville; Sikanen, Tiina; Kotiaho, Tapio; Kostiainen, Risto; Ketola, Raimo A.; Franssila, Sami
2008 in SENSORS AND ACTUATORS B: CHEMICAL (Elsevier)
ISSN: 0925-4005

Temperature modeling and measurement of an electrokinetic separation chip

Sikanen, Tiina; Zwinger, Thomas; Tuomikoski, Santeri; Franssila, Sami; Lehtiniemi, Reijo; Fager, Carl- Magnus; Kotiaho, Tapio; Pursula, Antti
2008 in MICROFLUIDICS AND NANOFLUIDICS (Springer Verlag)

Analytical characterization of microfabricated SU-8 emitters for electrospray ionization mass spectrometry

Sikanen, T.; Tuomikoski, T.; Ketola, S.; Kostiainen, R.; Franssila, S.; Kotiaho, T.
2008 in JOURNAL OF MASS SPECTROMETRY (John Wiley and Sons Ltd)

Selective Surface Patterning with an Electric Discharge in the Fabrication of Microfluidic Structures

Suni, Niina; Haapala, Markus; Mäkinen, Ari; Sainiemi, Lauri; Franssila, Sami; Färm, Elina; Puukilainen, Esa; Ritala, Mikko; Kostiainen, Risto
2008 in ANGEWANDTE CHEMIE (Wiley-VCH Verlag GmbH & Co. KGaA)

Novel carbon nanotube network deposition technique for electronic device fabrication

Zavodchikova, Marina; Nasibulin, Albert; Kulmala, Tero; Grigoras, Kestutis; Anisimov, Amton S.; Franssila, Sami; Ermolov, Vladimir; Kauppinen, Esko
2008 in physica status solidi (b) (Wiley-VCH Verlag GmbH & Co. KGaA)

Thin film transistors based on carbon nanotubes prepared by aerosol technique

Zavodchikova, Marina; Grigoras, K.; Kulmala, T.; Nasibulin, A.; Ermolov, V.; Franssila, Sami
2008 in NANOTECHNOLOGY (IOP PUBLISHING LTD)

Novel hybrid material for microfluidic devices

Aura, Susanna; Sikanen, Tiina; Kotiaho, Tapio; Franssila, Sami
2007 in SENSORS AND ACTUATORS B: CHEMICAL (Elsevier)

Mask material effects in cryogenic deep reactive ion etching

Franssila, Sami; Sainiemi, Lauri
2007 in Journal of Vacuum Science and Technology. Part B. (AMER INST PHYSICS)
ISSN: 1071-1023

Application of ultra-thin aluminum oxide etch mask made by atomic layer deposition technique

Grigoras, K.; Sainiemi, L.; Tiilikainen, J.; Säynätjoki, A.; Airaksinen, V-M.; Franssila, S.
2007 in Journal of Physics: Conference Series (IOP Publishing Ltd.)

Microchip for combining gas chromatography or capillary liquic chromatography with Atmospheric Pressure Photoionization Mass Spectrometry

Haapala, M.; Luosujärvi, L.; Saarela, V.; Kotiaho, T.; Ketola, R.; Franssila, S.; Kostiainen, R.
2007 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)

Desorption Atmospheric Pressure Photoionization

Haapala, Markus; Pol, Jaroslav; Saarela, Ville; Arvola, Ville; Kotiaho, Tapio; Ketola, Raimo; Franssila, Sami; Kauppila, Tiina; Kostiainen, Risto
2007 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)

Silicon Micropillar Array Electrospray Chip for Drug and Biomolecule Analysis

Nissilä, T; Sainiemi, L.; Sikanen, T.; Kotiaho, T.; Franssila, S.; Kostiainen, R; Ketola, R.
2007 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)

Glass microfabricated nebulizer chip for mass spectrometry

Saarela, V.; Haapala, Markus; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami
2007 in Lab Chip (JOHN WILEY & SONS LTD)

Rapid fabrication of high aspect ratio silicon nanopillars for Chemical analysis

Sainiemi, L.; Keskinen, H.; Aromaa, M.; Luosujärvi, L.; Grigoras, K.; Kotiaho, T.; Mäkelä, J.; Franssila, S.
2007 in NANOTECHNOLOGY (IOP PUBLISHING LTD)

Fully microfabricated and integrated, SU-8-based capillary electrophoresis-electrospray ionization microchips for mass spectrometry

Sikanen, T.; Tuomikoski, S.; Ketola, R.; Kostiainen, R.; Franssila, S.; Kotiaho, T.
2007 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)

Performance of SU-8 microchips as separation devices and comparison

Sikanen, T.; Heikkilä, L.; Tuomikoski, S.; Ketola, R.A; Kostiainen, R.; Franssila, S.; Kotiaho, T
2007 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)

A microfabricated nebulizer for liquid vaporization in chemical analysis

Franssila, Sami; Marttila, Seppo; Kolari, Kai; Östman, Pekka; Kotiaho, Tapio; Kostiainen, Risto; Lehtiniemi, Reijo; Fager, Carl-Magnus; Manninen, Jorma
2006 in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (Institute of Electrical and Electronics Engineers Inc.)
ISSN: 1057-7157

Minimum Proton Affinity for Efficient Ionization with Atmospheric Pressure Desorption /Ionization on Silicon Mass Spectrometry

Franssila, Sami; Östman, Pekka; Pakarinen, Jaana M.H.; Vainiotalo, Pirjo; Kostiainen, Risto; Kotiaho, Tapio
2006 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)
ISSN: 0951-4198

Design and fabrication of integrated solid-phase extraction-zone electrophoresis microchip

Tuomikoski, Santeri; Virkkala, Nina; Rovio, Stella; Hokkanen, Ari; Sirén, Heli; Franssila, Sami
2006 in JOURNAL OF CHROMATOGRAPHY A (Elsevier Science B.V.)
ISSN: 0021-9673

Capillary liquid chromatography-microchip atmospheric pressure chemical ionization-mass spectrometry

Östman, Pekka; Jäntti, Sirkku; Grigoras, Kestutis; Saarela, Ville; Ketola, Raimo A.; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto
2006 in LAB ON A CHIP (Royal Society of Chemistry)

Gas Chromatography-Microchip Atmospheric Pressure Chemical Ionization-Mass Spectrometry

Östman, Pekka; Luosujärvi, Laura; Haapala, Markus; Grigoras, Kestutis; Ketola, Raimo; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto
2006 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)

Fabrication of porous membrane filter from p-type silicon

Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.
2005 in Physica Status Solidi (AMER CHEMICAL SOC)

Analysis of amphetamines and fentanyls by atmospheric pressure desorption/ionization on silicon mass spectrometry and matrix-assisted laser desorption/ionization mass spectrometry and its application to forensic analysis of drug seizures

Pihlainen, Katja; Grigoras, Kestutis; Franssila, S.; Ketola, Raimo; Kotiaho, Tapio; Kostiainen, Risto
2005 in JOURNAL OF MASS SPECTROMETRY (John Wiley and Sons Ltd)

Re-usable multi-inlet PDMS fluidic connector

Saarela, Ville; Franssila, Sami; Tuomikoski, Santeri; Marttila, Seppo; Östman, Pekka; Sikanen, Tiina; Kotiaho, Tapio; Kostiainen, Risto
2005 in SENSORS AND ACTUATORS B: CHEMICAL (Elsevier)
ISSN: 0925-4005

Characterization of SU-8 for electrokinetic microfluidic applications

Sikanen, Tiina; Tuomikoski, Santeri; Ketola, Raimo; Kostiainen, Risto; Franssila, Sami; Kotiaho, Tapio
2005 in Lab on aChip (Elsevier)

Fabrication on enclosed SU-8 tips for electrospray ionization spectrometry

Tuomikoski, Santeri; Sikanen, tiina; Ketola, Raimo; Kotiaho, Tapio; Franssila, Sami
2005 in ELECTROPHORESIS (Wiley-VCH Verlag)

Free-standing SU-8 microfluidic chips by adhesive bonding and release etching

Tuomikoski, Santeri; Franssila, Sami
2005 in Sensors and Actuators A (Wiley-VCH Verlag)

Formation of nanoporous glass layer

Grigoras, Kestutis; Franssila, Sami
2004 in PHYSICA SCRIPTA (IOP Publishing Ltd.)

Atmospheric Pressure Photoionization-Mass Spectrometry with a Microchip Heated Nebulizer

Kauppila, Tiina; Östman, Pekka; Mattila, Seppo; Ketola, Raimo; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto
2004 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)

Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist

Tuomikoski, S.; Franssila, S.
2004 in PHYSICA SCRIPTA (IOP Publishing Ltd.)

Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectrometry

Östman, Pekka; Marttila, Seppo J.; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto
2004 in ANALYTICAL CHEMISTRY (AMER CHEMICAL SOC)

Poly(Dimethylsiloxane) Electrospray Devices Fabricated With Diamond-Like Carbon-Poly(Dimethylsiloxane) Coated SU-8 Masters

Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V-M.; Soininen, A.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.
2003 in Lab Chip (AMER CHEMICAL SOC)

Feasibility of Atmospheric Pressure Desorption/Ionization on Silicon Mass Spectrometry in Analysis of Drugs

Huikko, K.; Östman, P.; Sauber, C.; Mandel, F.; Grigoras, K.; Franssila, S.; Kotiaho, T.; Kostiainen, R.
2003 in RAPID COMMUNICATIONS IN MASS SPECTROMETRY (JOHN WILEY & SONS LTD)

Rapid thermal annealing of Cu/WNx/Si structures

Lipsanen, Antti; Kuivalainen, Pekka; Rauhala, Eero; Franssila, Sami; Seppälä, Anu
2003 in JOURNAL OF MATERIALS SCIENCE: MATERIALS IN ELECTRONICS (Springer New York)

Luminescence study of silicon nanostructures prepared by ion beam mixing

Ovchinnikov, V.; Sokolov, V.; Franssila, S.
2003 in MICROELECTRONICS JOURNAL (ELSEVIER SCI LTD)

Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS)

Tuomikoski, S.; Huikko, K.; Grigoras, K; Östman, P.; Kotiaho, T; Kostiainen, R.; Baumann, M.; Franssila, S.
2002 in Lab-on-chip (ELSEVIER SCI LTD)

Spectrometrie de mass sur silicum poreux: desorption/ionisation sur silicium (DIOS)

Tuomikoski, S.; Huikko, K.; Östman, P.; Grigoras, K.; Baumann, M.; Kostiainen, R.; Franssila, S.; Kotiaho, T.
2002 in Bio Forum International, Edition Francaise (ELSEVIER SCI LTD)

Mass spectrometry on porous silicon: Desorption/Ionization on Silicon (DIOS)

Tuomikoski, S.; Huikko, K.; Östman, P.; Grigoras, K.; Baumann, M.; Kostiainen, R.; Franssila, S.; Kotiaho, T.
2002 in Bio Forum International (ELSEVIER SCI LTD)

PLASMA ETCHED INITIAL PITS FOR MACROPOROUS SILICON STRUCTURES

Grigoras, Kestutis; Niskanen, Antti J.; Franssila, Sami
2001 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)

Plasma etched initial pits for electrochemically etched macroporous silicon structures

Grigoras, Kestutis; Niskanen, Antti; Franssila, Sami
2001 in JOURNAL OF MICROMECHANICS AND MICROENGINEERING (IOP PUBLISHING LTD)

Submicron image reversal by liquid phase deposition of oxide

Niskanen, Antti; Franssila, Sami
2001 in MICROELECTRONIC ENGINEERING (Elsevier)

Improved neuron MOS-transistor structures for integrated neural network circuits

Rantala, A.; Franssila, S.; Kaski, K.; Lampinen, J.; Åberg, M.; Kuivalainen, P.
2001 in IEE Proceedings - Circuits, Devices and Systems (Institute of Electrical Engineers)
ISSN: 1350-2409

Etching through silicon wafer in inductively coupled plasma

Franssila, S.; Kiihamäki, J.; Karttunen, J.
2000 in Microsystems Technologies (Institute of Electrical Engineers)

Depth and profile control in plasma etched MEMS structures

Kiihamäki, J.; Kattelus, H.; Karttunen, J.; Franssila, S.
2000 in Sensors & Actuators (Institute of Electrical Engineers)

Pattern shape effects and artefacts in deep silicon etching

Kiihamäki, J.; Franssila, Sami
1999 in Journal of Vacuum Science and Technology (Institute of Electrical Engineers)

Deep silicon etching in inductively coupled plasma reactor for MEMS

Kiihamäki, J.; Franssila, Sami
1999 in PHYSICA SCRIPTA (IOP Publishing Ltd.)

High-precision neuron MOSFET structures

Rantala, A.; Franssila, S.; Kaski, K.; Lampinen, J.; Åberg, M.; Kuivalainen, P.
1999 in ELECTRONICS LETTERS (Institution of Engineering and Technology)
ISSN: 0013-5194

Reduction of molybdenum resistivity by a seed layer of Ti-W

Franssila, Sami; Kattelus, H.; Nykänen, E.
1997 in MICROELECTRONIC ENGINEERING (Elsevier)

Hospital mouth cleaning aids may cause dental erosion

Meuman, J.H.; Sorva, R.; Pelttari, A.; Rytömaa, I.; Franssila, Sami; Kroon, L.
1996 in Special Car in Dentistry (Elsevier)

Plasma etching in microdevice fabrication: thin film and process integration aspects.

Franssila, S.
1995 in Acta Polytechnica Scandinavica (Elsevier)

Linewidth uniformity and etch rate uniformity in refractory metal plasma etching

Franssila, Sami
1994 in Journal of Vacuum Science and Technology (Elsevier)

Tungsten silicide formation from sequentially sputtered tungsten and silicon films

Molarius, J.M.; Franssila, S.; Drozdy, G.; Saarilahti, J.
1991 in APPLIED SURFACE SCIENCE (Elsevier Science B.V.)

Review article, Literature review, Systematic review

Microtechnologies to fuel neurobiological research with nanometer precision

Brunello, Cecilia A.; Jokinen, Ville; Sakha, Prasanna; Terazono, Hideyuki; Nomura, Fumimasa; Kaneko, Tomoyuki; Lauri, Sari E.; Franssila, Sami; Rivera, Claudio; Yasuda, Kenji; Huttunen, Henri J.
2013 in JOURNAL OF NANOBIOTECHNOLOGY (Elsevier Science B.V.)

Analysis of selective androgen receptor modulators by gas chromatography-microchip atmospheric pressure photoionization-mass spectrometry

Luosujärvi, Laura; Haapala, Markus; Thevis, Mario; Saarela, Ville; Franssila, Sami; Ketola, Raimo A; Kostiainen, Risto; Kotiaho, Tapio
2010 in JOURNAL OF THE AMERICAN SOCIETY FOR MASS SPECTROMETRY (Springer New York)
ISSN: 1044-0305

Microchip technology in mass spectrometry

Sikanen, Tiina; Franssila, Sami; Kauppila, Tiina J.; Kostiainen, Risto; Kotiaho, Tapio; Ketola, Raimo A.
2010 in MASS SPECTROMETRY REVIEWS (John Wiley and Sons Inc.)
ISSN: 0277-7037

Book section, Chapters in research books

Etching Techniques for Superhydrophobic Surface Fabrication

Franssila, Sami
2017 in RSC Soft Matter (ROYAL SOCIETY OF CHEMISTRY)
ISBN: 978-1-78262-154-6

MEMS lithography

Franssila, Sami; Tuomikoski, Santeri
2015
ISBN: 9780323299657

Microfluidics and BioMEMS in silicon

Franssila, Sami; Davis, Cristina; LeVasseur, Michael K.; Cao, Zhu; Yobas, Levent
2015
ISBN: 978-0-323-29965-7

Deep Reactive Ion Etching

Lärmer, Franz; Franssila, Sami; Sainiemi, Lauri; Kolari, Kai
2015
ISBN: 978-0-323-29965-7

Deep Reactive Ion Etching

Lärmer, Franz; Franssila, Sami; Sainiemi, Lauri; Kolari, Kai
2010
ISBN: 978-081551594-4

an entry in Encyclopedia of Micro-and nanofluidics

Franssila, Sami; Sainiemi, Lauri
2008

Conference proceedings

Novel nanostructure replication process for robust superhydrophobic surfaces

Hoshian, Sasha; Jokinen, Ville; Franssila, Sami
2016
ISBN: 9781509019731
ISSN: 1084-6999

Microfluidics with on-line mass spectrometric methods for investigation of reaction mechanisms

Nilsson, Sofia M E; Aumüller, Ingo; Kiriazis, Alexandros; Boije af Gennäs, Gustav; Haapala, Markus; Scotti, Gianmario; Franssila, Sami; Yli-Kauhaluoma, Jari; Kotiaho, Tapio
2015
ISBN: 9780979806483

Piezoelectric sensitivity measurement for nanofibrillated cellulose film sensors

Rajala, Satu; Vuoriluoto, Maija; Rojas, Orlando; Franssila, Sami; Tuukkanen, Sampo
2015
ISSN: 0000-0000

Micro-writing under water droplet using photo-switchable titanium oxide on nanocellulose coated micro-hoodoos

Hoshian, Sasha; Jokinen, Ville; Hjort, Klas; Ras, Robin H A; Franssila, Sami
2014
ISBN: 9780979806476

Characterization of nano-coated micro- and nanostructures by pushing

Liimatainen, Ville; Venäläinen, Janne; Koverola, Mikko; Lyytinen, Jussi; Rontu, Ville; Berdova, Maria; Koskinen, Jari; Franssila, Sami; Zhou, Quan
2014

A micro heat exchanger microfabricated from bulk aluminium Journal of Physics

Scotti, Gianmario; Franssila, Sami
2014

Printable and disposable supercapacitor from nanocellulose and carbon nanotubes

Tuukkanen, S.; Lehtimäki, S.; Jahangir, F.; Eskelinen, A.-P.; Lupo, D.; Franssila, S.
2014
ISBN: 9781479940264

Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

Heikkinen, V.; Hanhijärvi, K.; Aaltonen, J.; Grigoras, K.; Kassamakov, I.; Franssila, S.; Haeggstrom, E.
2012
ISBN: 978-0-8194-8893-0
ISSN: 0277-786X

Non-destructive 3D measurement of microchannels

Heikkinen, V.; Nolvi, A.; Kassamakov, I.; Grigoras, K.; Franssila, S.; Haeggstrom, E.
2012
ISBN: 978-0-8194-9183-1
ISSN: 0277-786X

IR-SWLI for subsurface imaging of large MEMS structures

Nolvi, A.; Heikkinen, V.; Kassamakov, I.; Aaltonen, J.; Ylitalo, T.; Saresoja, O.; Berdova, M.; Franssila, S.; Haeggstrom, E.
2012
ISBN: 978-0-8194-9122-0
ISSN: 0277-786X

SIMULTANEOUS TIRF MICROSCOPY AND OPTICAL TRAPPING FOR SINGLE MOLECULE EXPERIMENTS

Hanhijärvi, Kalle; Ojala, Heikki; Wallin, Anders E.; Ziedaite, Gabija; Aura, Susanna; Franssila, Sami; Bamford, Dennis H.; Hæggström, Edward
2011

Infrared Scanning White Light Interferometry Using a Solid State Light Source

Heikkinen, V.; Aaltonen, J.; Wälchli, B.; Räikkönen, H.; Kassamakov, I; Cholakova, T.; Grigorias, K.; Franssila, S.; Kakanakov, R.; Hæggström, E.
2011

Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control

Heikkinen, V.; Hanhijärvi, K.; Aaltonen, J.; Räikkönen, H.; Wälchli, B.; Paulin, T.; Kassamakov, I.; Grigoras, K.; Franssila, S.; Hæggström, E.
2011

MINIATURIZED LIQUID-LIQUID EXTRACTION SYSTEM BASED ON CONTROLLED AQUEOUS AND ORGANIC DROPLETS

Jokinen, V.; Sikanen, T.; Kostiainen, R.; Franssila, Sami
2011

RAPID BIOMOLECULE ANALYSIS USING TWO-DIMENSIONAL ELECTROPHORESIS-ELECTROSPRAY IONIZATION MICROCHIP

Nordman, Nina; Sikanen, Tiina; Aura, Susanna; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto
2011

INTEGRATED MULTI-TIP PHOTOCATALYTIC NANOREACTOR ELECTROSPRAY CHIP FOR PHOSPHOPEPTIDE ENRICHMENT AND OXIDATION

Ruokolainen, Miina; Sikanen, Tiina; Sainiemi, Lauri; Nissilä, Teemu; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio
2011

MICROFABRICATED ELECTROSPRAY IONIZATION PLATFORM WITH 60 TIPS FOR HIGH THROUGHPUT MASS SPECTROMETRIC ANALYSES

Sainiemi, Lauri; Nissilä, Teemu; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto
2011

Velcro-type attachment of black silicon and carbon cloth for improved galvanic contact in micro fuel cells

Scotti, Gianmario; Mäkinen, M.; Kanninen, Petri; Kallio, Tanja; Franssila, Sami
2011

Refractive index of silicon with various doping levels at high temperatures

Shpak, M.; Sainiemi, L.; Kärhä, P.; Heinonen, M.; Franssila, S.; Ikonen, E.
2011

INTACT PROTEIN SEPARATIONS WITH INHERENTLY BIOCOMPATIBLE ORMOCOMP SEPARATION CHIP WITH INTEGRATED ELECTROSPRAY IONIZATION EMITTER

Sikanen, Tiina; Aura, Susanna; Barrios-Lopez, Brianda; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto
2011

SUPERHYDROPHOBIC PERFLUOROPOLYMER MICRO- AND NANOSTRUCTURES BY EMBOSSING

Suvanto, P.; Jokinen, V.; Franssila, Sami
2011

Combined photolithography and embossing for fabrication of multilevel, free standing microfluidic structures

Aura, Susanna; Franssila, Sami
2010

Applications of focused ion beam in nanofabrications

Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka
2009

Localized gallium doping and cryogenic deep reactive ion etching in fabrication of silicon nanostructures

Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka
2009 in Materials Research Society Symposium Proceedings (SPIE)
ISBN: 978-1-60511-154-4
ISSN: 0272-9172

Electronic cooling of submicron-sized metallic beams

Muhonen, Juha; Niskanen, Antti; Meschke, Matthias; Pashkin, Yu.A.; Tsai, J.S.; Sainiemi, L.; Franssila, S.; Pekola, Jukka
2009
ISBN: 978-951-22-9793-1
ISSN: 1254-5667

Symmetric silicon micro fuel cell with porous eletrodes

Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami
2009

Fully microfabricated polymer-based microfludic chips for bioanalysis

Sikanen, T.; Franssila, S.; Aura, S.; Tuomikoski, S.; Kotiaho, T.; Kostiainen, R.
2009

Application of polymer microfluidic chips to the characterization of recombinant human erytropoietin by electrospray ionization mass spectrometry

Sikanen, Tiina; Aura, Susanna; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto
2009

Materials and technologies foe analitical microsystems

Franssila, Sami
2008

Desorption atmospheric pressure photoionization-mass spectrometry in drug analysis

Luosujärvi, L.; Arvola, V; Haapala, M; Pol, J.; Saarela, V.; Franssila, S.; Kostiainen, R.; Kotiaho, T.; Kauppila, T.
2008

Lidless SU-8 polymer electrospray ionization chip

Sainiemi, L.; Ketola, R.; Franssila, S.
2008

Microchip-based CE-ESI/MS analysis of biological molecules

Sikanen, T.; Tuomikoski, S.; Ketola, R.A; Kostianen, R.; Franssila, S.; Kotiaho, T.
2008

Novel hybrid material for microfluidic devices

Aura, Susanna; Sikanen, Tiina; Kotiaho, Tapio; Franssila, Sami
2007
ISBN: 1-4244-0842-3

Coating of nanoporous membranes atomic layer deposition versus sputtering

Grigoras, K.; Sirviö, S.; Airaksinen, V-M; Franssila, S.
2007

Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask

Mäkelä, J.M.; Keskinen, H.; Aromaa, M.; Sainiemi, L.; Luosujärvi, L.; Kotiaho, T.; Franssila, S.
2007

Atomic layer deposition of Al2O3, TiO2 and ZnO films into high aspect ratio pores

Sirviö, Sari; Sainiemi, L.; Franssila, S.; Grigoras, K.
2007

Microfluidic channels from photoactive hybrid material ORMOCER[R]

Aura, Susanna; Franssila, Sami
2006

Development of analytical methods for analysis of drug and environmental compounds using gas chromatography-microchip APCI-MS

Franssila, Sami; Luosujärvi, Laura; Haapala, Markus; Östman, Pekka; Kostiainen, Risto; Grigoras, Kestutis; Ketola, Raimo; Kotiaho, Tapio
2006

Automated 2D analysis on a proteome microchip

Franssila, Sami; Demianova, Zuzana; Shimmo, Masahiko; Pöysä, Eemeli; Kotiaho, Tapio; Kostiainen, Risto; Baumann, Marc
2006

Application of ultra-thin aluminium oxide mask made by atomic layer deposition technique

Grigoras, kestutis; Airaksinen, Veli-Matti; Franssila, Sami; Sainiemi, Lauri; Tiilikainen, Jouni; Säynätjoki, Antti
2006

Spontaneous microflow of micropillar array electrospray electrospray ionization microchip

Nissilä, T.; Sainiemi, L.; Sikanen, T.; Kotiaho, T.; Franssila, S.; Kostiainen, R.; Ketola, R.A.
2006

Thermal characterization of a microfluidic nebulizer

Saarela, Ville; Haapala, Markus; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami
2006

Mask material effects in cryogenic DRIE

Sainiemi, Lauri; Franssila, Sami
2006

Developed of a microdevice for 2-dimensional gel electrophoresis

Demianova, Zuzana; Shimmo, Masahiko; Pöysä, Eemeli; Kotiaho, Tapani; Kostiainen, Risto; Franssila, Sami; Bauman, Marc
2005

The effect of physical properties of selected molecules on desorption/ionization on porous silicon-mass spectrometry

Franssila, Sami; Östman, Pekka; Kostiainen, Risto; Ketola, Raimo; Kotiaho, Tapio
2005

Infrared thermal imaging of microfluidic chips

Franssila, Sami; Grigoras, Kestutis; Marttila, Seppo; Lehtiniemi, Reijo; Fager, Carl-Magnus; Manninen, Jorma
2005

Characterization of SU-8 polymer for electrophoretic separaions

Sikanen, T.; Korpisalo, S.; Tuomikoski, S.; Ketola, R.A.; Kostiainen, R.; Franssila, Sami; Kotiaho, T.
2005

Fabrication and optimization of enclosed SU-8 tips for electrospray ionization mass spectrometry

Tuomikoski, Santeri; Sikanen, Tiina; Kostiainen, Risto; Franssila, Sami
2005

Electrophoretic separations of pharmaceutical compounds in microchannels composed of SU-8 polymer

Zwinger, T.; Sikanen, T.; Tuomikoski, S.; Ketola, R.A.; Kostiainen, R.; Franssila, S.; Kotiaho, T.
2005

Microfluidic Nebulizer Chip for Mass Spectrometry

Franssila, S.; Östman, P.; Marttila, S.; Kotiaho, T.; Kostiainen, R.
2004

Fabrication of porous membrane filter from p-type silicon

Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.
2004

Fabrication of microfluidic devices from SU-8

Tuomikoski, Santeri; Franssila, Sami
2004

Droplet based self-assembly of SU-8 microparts

del Corral, Carlos; Zhou, Quan; Albut, Aurelian; Chang, Bo; Franssila, Sami; Tuomikoski, Santeri; Koivo, Heikki N.
2003

Microglow: a microsystems laboratory course

Franssila, S.; Tittonen, I.; Grigoras, K.; Juvonen, T.; Nera, K.; Heikkilä, P.
2002

Microsystems and nanotechnology in the Nordic region

Franssila, S.; Furuberg, L.; Enoksson, P.; Grey, F.; Larsen, A.
2002

Silicon devices for chemistry and lifesciences

Franssila, Sami
2002

Micromechanics in silicon

Juvonen, T.; Poulsen, J.; Franssila, S.
2002

Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS MS)

Tuomikoski, S.; Huikko, K.; Grigoras, K.; Niskanen, A.; Kotiaho, T.; Kostiainen, R.; Franssila, S.; Baumann, M.
2001

Loading effects in deep silicon etching

Karttunen, J.; Kiihamäki, J.; Franssila, S.
2000

Etching through silicon wafer in inductively coupled plasma

Franssila, S.; Kiihamäki, J.; Karttunen, J.
1999

Depth and profile control in plasma etched MEMS structures

Kiihamäki, J.; Kattelus, H.; Franssila, S.
1999

Variable Threshold (MOS) - Transistor for Integrated Neural Network Circuits

Rantala, A.; Franssila, S.; Kaski, K.; Lampinen, J.; Åberg, M.
1997

Non-refereed scientific articles

Unrefereed conference proceedings

Silicon Micropillar Electrospray Ionization Chip Platform for Biomolecular Analysis in the Aqueous Phase

Hirvonen, Saara; Lipponen, Katriina; Jokinen, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio
2015
ISBN: 978-0-9798064-8-3
ISSN: 1556-5904

Scientific books (monographs)

Book

Introduction to Microfabrication

Franssila, Sami
2004
ISBN: 0-470-85105-8

Publications intended for professional communities

Article in professional journal

Sähköä metanolipatruunasta

Ranta, Anja; Noponen, Tuula; Granström, Tom; Scotti, Gianmario; Kanninen, Petri; Franssila, Sami; Halme, Aarne
2010 in Prosessori (John Wiley&Sons)
ISSN: 0357-4121

Mikrokanavia biosiruihin

Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto; Baumann, Marc; Leppihalme, Matti; Hokkanen, Ari; Grigoras, Kestutis
2004 in Prosessori (John Wiley&Sons)
ISSN: 0357-4121

Pisaroita piikiekolla

Franssila, Sami
2004 in Helsingin Sanomat (John Wiley&Sons)
ISSN: 0355-2047

Atmospheric pressure photoionization with a microchip heated nebulizer

Kauppila, T.; Östman, P.; Marttila, S.; Ketola, R.; Kotiaho, T.; Franssila, S.; Kostiainen, R.
2004 in Proceedings MicroTAS (John Wiley&Sons)

DLC-PDMS-hybrid patterning and surface treatment

Laakso, T.; Soininen, A.; Franssila, S.
2004 in Prooceedings MicroTAS (John Wiley&Sons)

Microchip atmospheric pressure chemical ionisation-mass spectrometry

Östman, Pekka; Marttila, Seppo; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto
2004 in Proceedings MicroTAS (John Wiley&Sons)

Valtaavatko mikropiirit elektroniikan?

Franssila, Sami
1998 in Tiede 2000 (John Wiley&Sons)

Tekniikka kuin luonto

Franssila, Sami
1996 in Tiede 2000 (John Wiley&Sons)

Kuinka pieneksi pii-transistori voidaan kutistaa?

Franssila, Sami; Kuivalainen, Pekka
1994 in Fysiikka tänään (John Wiley&Sons)

Mikroelektroniikan rajat ja reunaehdot

Franssila, Sami
1990 in Tekniikan Tekijät (John Wiley&Sons)

Article in professional conference proceedings

Characterization of Micro Fuel Cells with Black Silicon Gas Diffusion Layer, International Session on Nanomaterials: fabrication, characterisation and applications

Scotti, Gianmario; Kanninen, Petri; Mäkinen, M.; Kallio, Tanja; Franssila, Sami
2010

A micro fuel cell stack without interconnect overhead - macro world-like stacks in MEMS, 21st Micromechanics and Micro systems Europe Workshop

Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami
2010

Published development or research report

Determination of C-reactive protein by hot electron induced electrochemiluminescence on integrated electrode chips

Ylinen-Hinkka, Tiina; Niskanen, Antti J.; Franssila, Sami; Kulmala, Sakari
2011

Bioresorbable Polymer Scaffolds by Micromolding in Capillaries

Malin, Minna; Korhonen, Harri; Jokinen, Ville; Aura, Susanna; Leinikka, M.; Franssila, Sami; Seppälä, Jukka
2010

Pore formation in inorganic-organic hydrid material by oxygen plasma treatment

Aura, Susanna; Jokinen, Ville; Baumann, Marc; Franssila, Sami
2009

SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips for high resolution quadrupole time-of-flight mass spectrometry

Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapio; Franssila, Sami; Kostiainen, Risto
2009

Fabrication of SOI micro- and nanoelectromechanical devices by focused ion beam doping and deep reactive ion etching

Chekurov, Nikolai; Sainiemi, Lauri; Peltonen, Antti; Tittonen, Ilkka; Franssila, Sami
2009

Silicon nanostructere fabrication by focused ion beam doping and cryogenic deep reactive ion etching

Chekurov, Nikolai; Grigoras, Kestutis; Peltonen, Antti; Franssila, Sami; Tittonen, Ilkka
2009

Atomic layer deposition on single-walled carbon nanotubes for device application

Grigoras, Kestutis; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.
2009

Integrated liquid chomatography-heated nebulizer microchip for mass spectrometry

Haapala, M.; Saarela, S.; Pol, J.; Franssila, S.; Kotiaho, T.; Kostiainen, R.
2009

Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices

Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, S.; Haeggström, E.
2009

Microchip atmospheric pressure photoionization-mass spectrometry of underivatizeed anabolic steroids

Hintikka, Laura; Haapala, Markus; kuuranne, Tiia; Leinonen, Antti; Saarela, Ville; Franssila, Sami; Kostiainen, Risto
2009

New sampling surfaces for desorption atmospheric pressure photoionization-mass spectrometry

Luosujärvi, Laura; Vähänissi, Ville; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio; Kauppila, Tiina
2009

Ti02-microchip combined to mass spectrometer for mimcking phase I metabolic reactions

Nissilä, Teemu; Sainiemi, Lauri; Karikko, Mika-Matti; Kemell, Marianna; Ritala, Mikko; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.
2009

Electrospray photoionization microchip for mass spectrometry

Nissilä, Teemu; Sainiemi, Lauri; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo
2009

TiO2 microreactoe/electrospray ionization/MS for mimcking metabolic phase I reactions

Nissilä, T.; Sainiemi, L.; Karikko, M-M.; Kemell, M.; Ritala, M.; Franssila, S.; Kostiainen, R.; Ketola, R.A.
2009

Integrated chip for liquid chromatography separation and atmospheric pressure ionization for mass spectrometry

Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kolari, Kai; Kostiainen, Risto; Franssila, Sami
2009

Fabrication of nanoperforated silicon membranes with tunalbe sized high aspect ratio perforations

Sainiemi, Lauri; Viheriälä, Jukka; Laukkanen, Janne; Niemi, Tapio; Franssila, Sami
2009

Transparent, flexible and superhydrophobic material based on three-dimesional mushroom-shaped PDMS microstructures

Sainiemi, L.; Jokinen, V.; Aura, S.; Franssila, S.
2009

Micro fuel cell with lithographically defined flowfield channels and random patterns for gas diffusion layer

Scotti, Gianmario; Kanninen, Petri; Kallio, Tanja; Franssila, Sami
2009

Dynamic coating of SU-8 microchannels by phospholipid disks to study cell membrane associated interactions

Sikanen, Tiina; Wiedmer, Susanne; Heikkilä, Liisa; Franssila, Sami; Kostiainen, Risto; Kotiaho, Tapio
2009

Fabrication silicon nanoclusters with electric discharge

Suni, Niina; Haapala, Markus; Färm, Elina; Ritala, Mikko; Sainiemi, Lauri; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto
2009

Fabrication of nanoclustered silicon surface with electric discharge

Suni, N.; Haapala, M.; Färm, E.; Ritala, M.; Sainiemi, L.; Franssila, Sami; Kotiaho, T.; Kostiainen, R.
2009

Optical tweezers experiments with a microfluidic laminar flow channel device

Wallin, Anders; Ojala, Heikki; Rahikkala, Antti; Aura, Susanna; Franssila, Sami; Haeggström, Edward; Tuma, Roman
2009

Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors

Zavodchikova, M.Y; Nasibulin, A.G; Grigoras, K.; Kauppinen, E.I; Ermolov, V.; Franssila, S.
2009

Rapid separation of protein digests on SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips

Brenner, Nina; Sikanen, Tiina; Aura, Susanna; Tuomikoski, Santeri; Vuorensola, Katariina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto
2008

Suppression of current hysteresis in Carbon Nanotube Network transistors by ALD passivation

Grigoras, Kestutis; Kulmala, Tero; Zavodchikova, Marina; Nasibulin, Albert; Kauppinen, Esko; Ermolov, Vladimir; Franssila, Sami
2008

Etching undr the corner, inclined macropores by ICP-RIE

Grigoras, Kestutis; Franssila, Sami
2008

Analysis of selective androgen receptor modulators by gas chromatograpgy-microchip atmospheric pressure ionizationmass spectrometry

Haapala, M.; Luosujärvi, L.; Saarela, V.; Franssila, S.; Thevis, M.; Kostiainen, R.
2008

Effect of LED spectral shift on vertical resolution in stroboscopic white lifht interferometry

Hanhijärvi, K.; Aaltonen, J.; Kassamakov, I.; Grigoras, K.; Sainiemi, L.; Franssila, Sami; Häggström, E.
2008

Stroboscopic White Light Interferometry for Dynamic Characterization of Capacitive Pressure Sensors

Kassamakov, I.; Hanhijärvi, K.; Aaltonen, J.; Sainiemi, L.; Grigoras, K.; Franssila, S.; Häggström, E.
2008

Microchip heated nebulizer as an atmospheric pressure thermospray ionozation source for mass spectrometry

Keski-Rahkonen, P.; Haapala, M; Saarela, V.; Franssila, S.; Kotiaho, T.; Kostiainen, R.; Auriola, S.
2008

Pattering of as-deposited, random SWNT network for FET channel application by optical lithography

Kulmala, T.; Grigoras, K.; Zavodchikova, M.Y; Nasibulin, A.G; Kauppinen, E.I; Ermolov, V.; Franssila, S.
2008

Microfluidic nozzle chips as ionozation sources fof mass spectrometry

Saarela, Ville; Franssila, Sami
2008

Fabrication of freestending Al2o3 nanomembranes and bridges

Sainiemi, L.; Grigoras, K.; Franssila, S.
2008

High-tempereture silicon microbridge actuator

Sainiemi, Lauri; Grigoras, Kestutis; Fan, Ji; Saarela, Ville; Vähänissi, Ville; Laakso, Aki; Franssila, Sami
2008

Hybrid ceramic-polymer microfluidics chips for amino acid, peptide and protein CE separations

Sikanen, Tiina; Aura, Susanna; Heikkilä, Liisa; Franssila, Sami; Kotiaho, Tapio; Kostiainen, Risto
2008

Selective surface patterning with electric discharge

Suni, N.; Haapala, M.; Mäkinen, A.; Sainiemi, L.; Franssila, S.; Färm, E.; Puukilainen, E.; Ritala, M.; Yli-Kauhaluoma, J.; Kostiainen, R.
2008

Towards High-Throughput Optical Tweezers Experiments

Wallin, A.E; Ojala, H.; Aura, S.; Franssila, S.; Häggström, E.; Tuma, R.
2008

Disposable Electrochemiluminescence Sensors of Bacterial Spores

Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Ala-Kleme, Timo; Kulmala, Sakari
2008

Detection of bacterial spores on the basis of electrochemiluminescence

Ylinen-Hinkka, Tiina; Niskanen, Antti; Franssila, Sami; Kulmala, Sakari; Ala-Kleme, Timo
2008

Novel carbon nanotube network deposition techniques for electronic device fabrication

Zavodchikova, M.; Kulmala, T.; Grigoras, K.; Nasibulin, A.G; Anisimov, A.S; Franssila, S.; Ermolov, V.; Kauppinen, E.I
2008

High efficiency sample transfer between IEF and SDS-PASGE separations on a miniaturized proteomics chips

Demianova, Z.; Pöysä, Eemeli; Franssila, Sami; Baumann, Marc
2007

Microfaricated nebulizer chips for atmospheric pressure photoionization mass spectrometry

Haapala, Markus; Pol, Jaroslav; Kauppila, Tiina; Luosujärvi, Laura; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kotiaho, Tapio; Kostiainen, Risto
2007

Microchip APPI Device for Combining GC or LC with MS

Haapala, Markus; Luosujärvi, Laura; Saarela, Ville; Kotiaho, Tapio; Ketola, Raimo A.; Franssila, Sami; Kostiainen, Risto
2007

Conditions for capillary filling in microfabricated channels with hydrophilic and hydrophobic walls

Jokinen, Ville; Franssila, Sami
2007

Desorption Atmospheric Pressure Photoionozation

Kauppila, Tiina; Haapala, Markus; Pol, Jaroslav; Arvola, Ville; Saarela, Ville; Franssila, Sami; Ketola, Raimo; Kostiainen, Risto
2007

Deep plasme etching of glass for fluidic devices

Kolari, K.; Saarela, V.; Franssila, S.
2007

Miniature Tunnel Oxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminescence Studies

Niskanen, Antti J.; Ylinen-Hinkka, Tiina; Håkansson, Markus; Suomi, Johanna; Ala-Kleme, Timo; Kulmala, Sakari; Franssila, Sami
2007

Micropillar array electrospray chip for analysis of biomolecules

Nissilä, Teemu; Sainiemi, Lauri; Sikanen, Tiina; Kotiaho, Tapani; Franssila, Sami; Kostiainen, Risto; Ketola, Raimo A.
2007

On-chip liquid cromatography-atmospheric pressure ionization mass spectrometry

Saarela, Ville; Haapala, Markus; Pol, Jaroslav; Kalkkinen, Nisse; Hukka, Marko; Kolari, Kai; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami
2007

High sensitivity micropillar electrospray ionization chip fabricated of silicon

Sainiemi, Lauri; Nissilä, T.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.; Ketola, R.; Franssila, S.
2007

Fully integrated, polymer-based CZE-ESI microchip for high throughput MS analysis

Sikanen, T.; Tuomikoski, S.; Ketola, R.A; Kostiainen, R.; Franssila, S.; Kotiaho, T.
2007

Monolithically integrated electrophoresis microchip with electrospray ionization mass spectrometry detection

Tuomikoski, Santeri; Sikanen, Tiina; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami
2007

Characterization of SU-8 microchannels for electrophoretic separations

Sikanen, Tiina; Korpisalo, Iiro; Tuomikoski, Santeri; Ketola, Raimo; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami
2005

Design and fabrication of integrated SPE-CE device for testosterone detection

Tuomikoski, Santeri; Rovio, Stella; Hokkanen, Ari; Siren, Heli; Franssila, Sami
2005

SPE/CE chip in SU-8

Tuomikoski, S.; Franssila, S.; Siren, H.; Rovio, S.; Hokkanen, A.
2005

Fabrication of porous membrane filter from p-type silicon

Grigoras, K.; Franssila, S.; Sikanen, T.; Kotiaho, T.; Kostiainen, R.
2004

Atmospheric pressure photoionization with a microchip heated nebulizer

Kauppila, T.; Östman, P.; Marttila, S.; Ketola, R.; Kotiaho, T.; Franssila, S.; Kostiainen, R.
2004

DLC-PDMS-hyprid patterning and surface treatment

Laakso, T.; Soininen, A.; Franssila, S.
2004

Reusable multi-inlet PDMS fluidic connector

Saarela, Ville; Franssila, Sami
2004

Fabrication of 3D SU-8 tips for electrospray ionization mass spectrometry

Tuomikoski, Santeri; Sikanen, Tiina; Kostiainen, Risto; Kotiaho, Tapio; Franssila, Sami
2004

Microchip atmospheric pressure chemical ionisation-mass spectrometry

Östman, P.; Marttila, S.; Kotiaho, S.; Franssila, s.; Kostiainen, R.
2004

Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectromerty

Östman, P.; Marttila, S.J.; Kotiaho, T.; Franssila, S.; Kostiainen, R.
2004

Droplet based self-assembly of SU-8 microparts

Corral, S.; Zhou, Q.; Albut, A.; Franssila, S.; Tuomikoski, S.; Koivo, H.
2003

Microfluidic-to-mass spectrometry interfacing with atmospheric pressure chemical ionization (APCI) microchip

Franssila, S.; Marttila, S.; Östman, P.; Kotiaho, T.; Kostiainen, R.
2003

Formation of nanoporous glass layer

Grigoras, K.; Franssila, S.
2003

Thickness Evaluation of Si/SiO2 Multilayers by Ellipsometry and Reflection Spectrometry

Ovchinnikov, V.; Franssila, Sami; Jiang, H.; Nasibulin, A.G.; Kauppinen, E.I.
2003

Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist

Tuomikoski, S.; Franssila, S.
2003

SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot

Tuomikoski, S.; del Corral, C.; Zhou, Q.; Franssila, S.
2003

PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters

Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Puolanne, K.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.
2002

PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters

Huikko, K.; Östman, P.; Grigoras, K.; Tuomikoski, S.; Tiainen, V.-M.; Soininen, A.; Manz, A.; Franssila, S.; Kostiainen, R.; Kotiaho, T.
2002

Optical interferometric detection of a mechanical silicon oscillator

Nera, Kaisa; Hahtela, Ossi; Franssila, Sami; Tittonen, Ilkka
2002

Luminescence Study of Silicon Nanostructures Prepared by Ion Beam mixing

Ovchinnikov, V.; Sokolov, V.; Franssila, Sami
2002

Electrochemiluminoimmunoassay of 2-microglobulin at disposable planar oxide-coated silicon electrodes

Spehar, Anna-Maria; Vainio, Piia; Eskola, J.; Nyman, Annika; Håkansson, Markus; Jiang, Qinghong; Franssila, Sami; Kulmala, Sakari
2002

Modified porous silicon surfaces as DIOS-MS sample plates

Tuomikoski, S.; Huikko, K.; Östman, P.; Grigoras, K.; Baumann, M.; Kostiainen, R.; Franssila, S.; Kotiaho, T.
2002

Microsystems education in the Nordic region

Grey, F.; Franssila, S.; Furuberg, L.; Hjort, K.
2001

Bulk-Micromachined Silicon Microbridges for Infrared Emitters

Grigoras, Kestutis; Juvonen, Tuuli; Nera, Kaisa; Heikkilä, Paula; Franssila, Sami
2001

Time resolved electrochemiluminoimmunoassay of hCRP at oxide-coated p-type silicon electrodes

Vainio, P.; Ala-Kleme, Timo; Väre, Leif; Håkansson, Markus; Canty, Philip; Eskola, J.; Franssila, S.; Kulmala, Sakari
2001

Deep Silicon Structures by Electrochemical Etching

Grigoras, Kestutis; Niskanen, A.J.; Franssila, Sami
2000

Submicron image reversal by liquid phase deposition of oxide

Niskanen, A.J.; Franssila, S.
2000

Mikroelektroniikan trendit, teoksessa Elektroniikka- ja sähköalan osaamistarpeet 1997-2002

Franssila, S.
1999

Text book or professional handbook or guidebook or dictionary

Handbook of silicon based MEMS materials and technologies

Tilli, Markku; Motooka, Teruaki; Airaksinen, Veli-Matti; Franssila, Sami; Paulasto-Kröckel, Mervi; Lindroos, Veikko
2015
ISBN: 978-0-323-29965-7

“MEMS lithography” in Handbook of silicon based MEMS materials and technologies

Franssila, Sami; Tuomikoski, Santeri; Lindroos, Veikko; Tilli, Markku; Lehto, Ari; Motooka, Teruaki
2010

Mechanical properties of ultrathin ALD Al2O3 films

Rontu, Ville; Hokkanen, Ari; Franssila, Sami
2017

Fabrication of superomniphobic nanoserif surfaces

Rontu, Ville; Hoshian, Sasha; Shah, Syed; Jokinen, Ville; Franssila, Sami
2016

Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition

Rontu, Ville; Pitkänen, Olli; Heikkinen, Joonas; Ge, Yanling; Kordas, Krisztian; Franssila, Sami; Tuukkanen, Sampo
2015

Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water

Berdova, Maria; Rontu, Ville; Sajavaara, Timo; Eskelinen, Antti-Pekka; Franssila, Sami
2014

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